公开(公告)号：US20170062242A1

公开(公告)日：2017-03-02

申请号：US15172740

申请日：2016-06-03

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： YOUNG-HOO KIM ,  IL-SANG LEE ,  IN-GI KIM ,  KYOUNG-HWAN KIM ,  HYO-SAN LEE ,  SANG-WON BAE ,  TAE-HONG KIM ,  YONG-JUN CHOI

IPC: H01L21/67

CPC classification number: H01L21/6708 ,  H01L21/67017

Abstract: A chemical liquid supply apparatus includes a nozzle unit including a nozzle arm and an injection nozzle mounted in an end of the nozzle arm, a chemical liquid supply unit including a first chemical liquid tank accommodating a first chemical liquid and a second chemical liquid tank accommodating a second chemical liquid, and supplying the first chemical liquid and the second chemical liquid to the nozzle unit, and a mixer unit provided in the nozzle unit and discharging a process fluid by mixing the first chemical liquid and the second chemical liquid, wherein the mixer unit includes an in-line mixer mixing the first chemical liquid and the second chemical liquid that are continually injected from the chemical liquid supply unit, and a mixer pipe extending from the in-line mixer to the injection nozzle.

Abstract translation: 一种药液供给装置包括：喷嘴单元，包括喷嘴臂和安装在喷嘴臂的端部的喷嘴;药液供给单元，包括容纳第一药液的第一药液槽和容纳第一药液的第二药液箱， 第二化学液体，并且将第一化学液体和第二化学液体供给到喷嘴单元;以及混合器单元，其设置在喷嘴单元中，并且通过混合第一化学液体和第二化学液体来排出处理流体，其中混合器单元 包括混合从化学液体供应单元连续注入的第一化学液体和第二化学液体的串联混合器，以及从在线混合器延伸到喷嘴的混合管。

公开(公告)号：US20150151336A1

公开(公告)日：2015-06-04

申请号：US14301515

申请日：2014-06-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： KYOUNG-SEOB KIM ,  SUCK-HYUN KANG ,  YONG-SUN KO ,  KYOUNG-HWAN KIM ,  KUN-TACK LEE ,  HYO-SAN LEE

IPC: B08B3/02 ,  H01L21/67 ,  H01L21/02

CPC classification number: H01L21/67017 ,  H01L21/67051

Abstract: A nozzle may include a nozzle body, a conductive line and a resistance-measuring member. The nozzle body may include a plurality of injecting holes. The conductive line may be disposed along the injecting holes. The resistance-measuring member may be configured to measure a resistance of the conductive line to detect a deformation of the injecting holes.

Abstract translation: 喷嘴可以包括喷嘴体，导电线和电阻测量部件。 喷嘴体可以包括多个喷射孔。 导线可以沿着注入孔设置。 电阻测量构件可以被配置为测量导线的电阻以检测注入孔的变形。

公开(公告)号：US20180028936A1

公开(公告)日：2018-02-01

申请号：US15482549

申请日：2017-04-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： JUNG-MIN OH ,  JI-HOON JEONG ,  DONG-GYUN HAN ,  KUN-TACK LEE ,  HYO-SAN LEE ,  YONG-MYUNG JUN

IPC: B01D11/04 ,  B01D11/02

CPC classification number: B01D11/0407 ,  B01D11/0203 ,  B01D11/0403 ,  B01D11/0411 ,  G01N21/3554 ,  H01L21/02101 ,  H01L21/67017 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/67109 ,  H01L21/6719

Abstract: A source supplier includes a source reservoir that contains a liquefied source fluid for a supercritical process, a vaporizer that vaporizes the liquefied source fluid into a gaseous source fluid under high pressure, a purifier that removes organic impurities and moistures from the gaseous source fluid and an analyzer connected to the purifier that analyzes an impurity fraction and a moisture fraction in the gaseous source fluid. Moisture and organic impurities are removed from the source fluid to reduce the moisture concentration of the supercritical fluid in the supercritical process.