公开(公告)号：US20150151336A1

公开(公告)日：2015-06-04

申请号：US14301515

申请日：2014-06-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： KYOUNG-SEOB KIM ,  SUCK-HYUN KANG ,  YONG-SUN KO ,  KYOUNG-HWAN KIM ,  KUN-TACK LEE ,  HYO-SAN LEE

IPC: B08B3/02 ,  H01L21/67 ,  H01L21/02

CPC classification number: H01L21/67017 ,  H01L21/67051

Abstract: A nozzle may include a nozzle body, a conductive line and a resistance-measuring member. The nozzle body may include a plurality of injecting holes. The conductive line may be disposed along the injecting holes. The resistance-measuring member may be configured to measure a resistance of the conductive line to detect a deformation of the injecting holes.

Abstract translation: 喷嘴可以包括喷嘴体，导电线和电阻测量部件。 喷嘴体可以包括多个喷射孔。 导线可以沿着注入孔设置。 电阻测量构件可以被配置为测量导线的电阻以检测注入孔的变形。