公开(公告)号：US20150151336A1

公开(公告)日：2015-06-04

申请号：US14301515

申请日：2014-06-11

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： KYOUNG-SEOB KIM ,  SUCK-HYUN KANG ,  YONG-SUN KO ,  KYOUNG-HWAN KIM ,  KUN-TACK LEE ,  HYO-SAN LEE

IPC: B08B3/02 ,  H01L21/67 ,  H01L21/02

CPC classification number: H01L21/67017 ,  H01L21/67051

Abstract: A nozzle may include a nozzle body, a conductive line and a resistance-measuring member. The nozzle body may include a plurality of injecting holes. The conductive line may be disposed along the injecting holes. The resistance-measuring member may be configured to measure a resistance of the conductive line to detect a deformation of the injecting holes.

Abstract translation: 喷嘴可以包括喷嘴体，导电线和电阻测量部件。 喷嘴体可以包括多个喷射孔。 导线可以沿着注入孔设置。 电阻测量构件可以被配置为测量导线的电阻以检测注入孔的变形。

公开(公告)号：US20180028936A1

公开(公告)日：2018-02-01

申请号：US15482549

申请日：2017-04-07

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： JUNG-MIN OH ,  JI-HOON JEONG ,  DONG-GYUN HAN ,  KUN-TACK LEE ,  HYO-SAN LEE ,  YONG-MYUNG JUN

IPC: B01D11/04 ,  B01D11/02

CPC classification number: B01D11/0407 ,  B01D11/0203 ,  B01D11/0403 ,  B01D11/0411 ,  G01N21/3554 ,  H01L21/02101 ,  H01L21/67017 ,  H01L21/67028 ,  H01L21/67034 ,  H01L21/67109 ,  H01L21/6719

Abstract: A source supplier includes a source reservoir that contains a liquefied source fluid for a supercritical process, a vaporizer that vaporizes the liquefied source fluid into a gaseous source fluid under high pressure, a purifier that removes organic impurities and moistures from the gaseous source fluid and an analyzer connected to the purifier that analyzes an impurity fraction and a moisture fraction in the gaseous source fluid. Moisture and organic impurities are removed from the source fluid to reduce the moisture concentration of the supercritical fluid in the supercritical process.