Abstract:
A semiconductor device and a method of fabricating a semiconductor device, the device including a substrate including an element isolation film and an active region defined by the element isolation film; a word line crossing the active region in a first direction; and a bit line structure on the substrate and connected to the active region, the bit line structure extending in a second direction crossing the first direction, wherein the bit line structure includes a first cell interconnection film including an amorphous material or ruthenium, a second cell interconnection film on and extending along the first cell interconnection film and including ruthenium, and a cell capping film on and extending along the second cell interconnection film.
Abstract:
A semiconductor device is provided and includes: a voltage sensing circuit configured to output first and second sensing voltages based on a target voltage applied thereto; and a comparing circuit configured to generate a monitoring output signal based on levels of the first and second sensing voltages, wherein the voltage sensing circuit includes: a first transistor including a gate to receive a reference bias voltage, a source connected to an input node, and a drain connected to one end of a first resistive element; a second transistor provided in a current mirror structure with the first transistor, and including a drain connected to a third resistive element; and a second resistive element connected to another end of the first resistive element, the first sensing voltage being provided to both ends of the second resistive element, and the second sensing voltage being provided to both ends of the third resistive element.
Abstract:
A memory module includes a first printed circuit board (PCB) which includes a first surface, a second surface, first taps formed on the first surface, and second taps formed on the second surface, a first buffer attached to the first PCB, and first memory devices attached to the first PCB, in which the first buffer is configured to transmit signals input through the first taps and the second taps to the first memory devices, and signals re-driven by the first buffer among the signals are transmitted to a second module through the second taps.
Abstract:
A semiconductor includes a first signal line commonly connected to a plurality of semiconductor devices and a second signal line commonly connected to one or more of the plurality of semiconductor devices. The first signal line has a first impedance per unit length, the second signal line has a second impedance per unit length, the second impedance per unit length is greater than the first impedance per unit length, and the first signal line has a longer routing length than the first signal line. Widths of the signal lines may be set to reduce a difference in the impedances.
Abstract:
A DLC film deposition apparatus comprises a chamber in which processes are performed, a substrate in the chamber, the substrate having a first surface facing the top of the chamber, and a second surface opposite to the first surface, a holder in the chamber, the holder configured to support the substrate while being in contact with part of the second surface of the substrate, and a DLC film generator below the substrate, in the chamber, the DLC film generator configured to deposit a DLC film on the second surface of the substrate, wherein the DLC film is formed on the part of the second surface of the substrate that is not in contact with the holder.
Abstract:
A lithography apparatus is provided. The lithography apparatus a reticle having a first surface and a second surface facing each other, and a pattern region formed on the first surface, a reticle stage facing the second surface of the reticle, the reticle stage to chuck the reticle, a protection conductor within a chamber housing the reticle and the reticle stage; and a power source to supply a voltage to the protection conductor.
Abstract:
A method of fabricating semiconductor device is provided. The method includes providing a substrate having a trench, plasma-ionizing a gas which comprises a deposition material precursor and a doping material precursor to respectively obtain a plasma-ionized deposition material and a plasma-ionized doping material, and depositing the plasma-ionized deposition material and the plasma-ionized doping material in the trench by applying a bias voltage to a bottom surface of the trench, wherein the bottom surface of the trench comprises a first material, and sidewalls of the trench comprise a second material different from the first material.
Abstract:
An apparatus for beamforming including a multi-cluster architecture is disclosed, in which, a number of unit clusters including a reconfigurable processor and a co-processor may vary based on requirements.
Abstract:
An apparatus and method for decoding audio data. The apparatus for decoding the audio data may perform block data unpacking by preferring a channel order to a block order from a bitstream, and perform dithering through preferring a block order to a channel order. Complexity in decoding may be reduced through integrating bitstream searching and the bock data unpacking, and a dithering error may be prevented through processing the block data unpacking and the dithering separately.
Abstract:
A method and apparatus for applying a tile size adaptively based on a size of a coding unit. An image processing apparatus may detect a size of a largest coding unit (LCU) used in encoding of a video from a header of a bitstream, may determine a tile size adaptively based on the detected size of the LCU, and may decode the bitstream in units of the LCU based on the determined tile size.