公开(公告)号：US06299724B1

公开(公告)日：2001-10-09

申请号：US09535761

申请日：2000-03-28

申请人： Robert T. Fayfield ,  John M. Heitzinger

发明人： Robert T. Fayfield ,  John M. Heitzinger

IPC分类号： H01L21302

CPC分类号： H01L21/02049 ,  H01L21/30604 ,  H01L21/31116

摘要： Apparatus and method for direct delivery of enabling chemical gas from a liquid source and of HF gas in a hydrogen fluoride/enabling chemical based cleaning or etching process, such as a silicon dioxide film etching process. The liquid enabling chemical is temperature controlled to generate a vapor pressure which is sufficient to operate a mass flow controller at a desired processing pressure without a carrier gas. Prior to entering the process chamber, the enabling chemical gas is pre-mixed with HF and optionally, a carrier gas, all of which are supplied at flow rates independent of each other. By controlling the vapor pressure of the solvent in this way, solvent/HF/carrier mixtures which are not physically possible with carrier gas systems are attainable allowing access to a larger process space.

摘要翻译： 用于直接输送来自液体源和HF气体的化学气体在氟化氢/使得基于化学的清洁或蚀刻工艺（例如二氧化硅膜蚀刻工艺）中的装置和方法。 液体使能化学品受温度控制，以产生足以在没有载气的情况下以所需加工压力操作质量流量控制器的蒸气压。 在进入处理室之前，使能化学气体与HF和任选的载气一起预混合，所有载气都以彼此独立的流速供应。 通过以这种方式控制溶剂的蒸汽压力，可以实现在载体气体系统上物理不可能的溶剂/ HF /载体混合物，从而允许进入更大的工艺空间。

公开(公告)号：US20090191670A1

公开(公告)日：2009-07-30

申请号：US12359929

申请日：2009-01-26

申请人： John M. Heitzinger ,  John Snyder

发明人： John M. Heitzinger ,  John Snyder

IPC分类号： H01L21/84

CPC分类号： H01L29/78603 ,  H01L27/1218 ,  H01L27/1292 ,  H01L29/66757

摘要： Systems and methods of fabricating silicon-based thin film transistors (TFTs) on flexible substrates. The systems and methods incorporate and combine deposition processes such as chemical vapor deposition and plasma-enhance vapor deposition, printing, coating, and other deposition processes, with laser annealing, etching techniques, and laser doping, all performed at low temperatures such that the precision, resolution, and registration is achieved to produce a high performing transistor. Such TFTs can be used in applications such as displays, packaging, labeling, and the like.

公开(公告)号：US08836533B2

公开(公告)日：2014-09-16

申请号：US13216814

申请日：2011-08-24

申请人： Matthew P. Timm ,  Jeffrey T. Griffin ,  John M. Heitzinger ,  David G. Sime

发明人： Matthew P. Timm ,  Jeffrey T. Griffin ,  John M. Heitzinger ,  David G. Sime

IPC分类号： G08B5/00 ,  G06Q30/02 ,  G04F1/00

CPC分类号： G06Q30/0623 ,  G04F1/005 ,  G06Q30/02 ,  G08B5/36 ,  H04W4/80

摘要： An dynamic electronic communication device. The tag according to embodiments of the invention is designed or set to discount, promote, incentivize, or apply information at certain states or within a certain timeframe at initial deployment, the tags themselves being capable of handling the logic. The tag generally includes a circuit, such as a silicon chip, that controls a flexible printed display, which displays the information when applied. The tag is optionally encapsulated in a plastic or glass case. The tag is made of a suitably small size such that the tag can easily be placed on individual items, and can be secured to other objects via an adhesive backing, sewn in, pinned on, and the like.

摘要翻译： 动态电子通信设备。 根据本发明的实施例的标签被设计或设置为在初始部署时在某些状态下或在特定时间范围内折扣，促进，激励或应用信息，标签本身能够处理该逻辑。 标签通常包括控制柔性印刷显示器的电路，例如硅芯片，其在应用时显示信息。 标签可选地封装在塑料或玻璃外壳中。 标签由适当小的尺寸制成，使得标签可以容易地放置在单独的物品上，并且可以通过粘合剂背衬固定到其他物体上，缝合，固定等。

公开(公告)号：US20120050061A1

公开(公告)日：2012-03-01

申请号：US13216814

申请日：2011-08-24

申请人： Matthew P. Timm ,  Jeffrey T. Griffin ,  John M. Heitzinger ,  David G. Sime

发明人： Matthew P. Timm ,  Jeffrey T. Griffin ,  John M. Heitzinger ,  David G. Sime

IPC分类号： G08B5/00

CPC分类号： G06Q30/0623 ,  G04F1/005 ,  G06Q30/02 ,  G08B5/36 ,  H04W4/80

摘要： An dynamic electronic communication device. The tag according to embodiments of the invention is designed or set to discount, promote, incentivize, or apply information at certain states or within a certain timeframe at initial deployment, the tags themselves being capable of handling the logic. The tag generally includes a circuit, such as a silicon chip, that controls a flexible printed display, which displays the information when applied. The tag is optionally encapsulated in a plastic or glass case. The tag is made of a suitably small size such that the tag can easily be placed on individual items, and can be secured to other objects via an adhesive backing, sewn in, pinned on, and the like.

摘要翻译： 动态电子通信设备。 根据本发明的实施例的标签被设计或设置为在初始部署时在某些状态下或在特定时间范围内折扣，促进，激励或应用信息，标签本身能够处理该逻辑。 标签通常包括控制柔性印刷显示器的电路，例如硅芯片，其在应用时显示信息。 标签可选地封装在塑料或玻璃外壳中。 标签由适当小的尺寸制成，使得标签可以容易地放置在单独的物品上，并且可以通过粘合剂背衬固定到其他物体上，缝合，固定等。

公开(公告)号：US08039838B2

公开(公告)日：2011-10-18

申请号：US12359922

申请日：2009-01-26

申请人： John M. Heitzinger ,  John Snyder

发明人： John M. Heitzinger ,  John Snyder

IPC分类号： H01L21/00

CPC分类号： H01L29/78603 ,  H01L27/1218 ,  H01L27/1292 ,  H01L29/66757

摘要： Systems and methods of fabricating silicon-based thin film transistors (TFTs) on flexible substrates. The systems and methods incorporate and combine deposition processes such as chemical vapor deposition and plasma-enhance vapor deposition, printing, coating, and other deposition processes, with laser annealing, etching techniques, and laser doping, all performed at low temperatures such that the precision, resolution, and registration is achieved to produce a high performing transistor. Such TFTs can be used in applications such as displays, packaging, labeling, and the like.

公开(公告)号：US07977173B2

公开(公告)日：2011-07-12

申请号：US12359929

申请日：2009-01-26

申请人： John M. Heitzinger ,  John Snyder

发明人： John M. Heitzinger ,  John Snyder

IPC分类号： H01L21/84

CPC分类号： H01L29/78603 ,  H01L27/1218 ,  H01L27/1292 ,  H01L29/66757

摘要： Systems and methods of fabricating silicon-based thin film transistors (TFTs) on flexible substrates. The systems and methods incorporate and combine deposition processes such as chemical vapor deposition and plasma-enhance vapor deposition, printing, coating, and other deposition processes, with laser annealing, etching techniques, and laser doping, all performed at low temperatures such that the precision, resolution, and registration is achieved to produce a high performing transistor. Such TFTs can be used in applications such as displays, packaging, labeling, and the like.

摘要翻译： 在柔性基板上制造硅基薄膜晶体管（TFT）的系统和方法。 这些系统和方法结合并组合了沉积过程，例如化学气相沉积和等离子体增强气相沉积，印刷，涂覆和其它沉积工艺，具有激光退火，蚀刻技术和激光掺杂，均在低温下进行，使精度 ，分辨率和配准，以产生高性能晶体管。 这样的TFT可以用于诸如显示器，包装，标签等的应用中。

公开(公告)号：US07913382B2

公开(公告)日：2011-03-29

申请号：US11977020

申请日：2007-10-22

申请人： John M. Heitzinger

发明人： John M. Heitzinger

IPC分类号： H05K3/02 ,  H05K3/10 ,  H05K3/30 ,  B23P17/00 ,  B21D53/76 ,  B41J2/01

CPC分类号： H05K3/02 ,  G03F7/40 ,  H05K3/0002 ,  H05K3/1275 ,  H05K2203/0113 ,  H05K2203/0143 ,  Y10T29/49126 ,  Y10T29/4913 ,  Y10T29/49155 ,  Y10T29/49156 ,  Y10T29/49401

摘要： Printing plates, printing system and method for printing electrical circuits. According to embodiments of the invention, patterned layers of conductive, insulating, semi-conductive materials, and other materials can be additively print deposited on a substrate to form electrical circuits. The electrical circuits so formed of single or multiple printed layers can comprise or compose transistor devices, including thin film transistors, multiple transistor circuits or assemblies, or other electrical devices, for example batteries, sensors, displays, memory arrays, and the like. The invention further provides a patterned printing plate imaged by a photolithography and etch process, and a printing system and methods using the patterned plate by which such high resolution, precise registration electrical circuits and circuit devices can be produced.

摘要翻译： 印版，印刷系统及电路印刷方法。 根据本发明的实施例，导电，绝缘，半导体材料和其它材料的图案化层可以被附加地印刷在衬底上以形成电路。 由单个或多个印刷层形成的电路可以包括或组成晶体管器件，包括薄膜晶体管，多晶体管电路或组件，或其它电气设备，例如电池，传感器，显示器，存储器阵列等。 本发明还提供了通过光刻和蚀刻工艺成像的图案印刷版，以及使用该图案化印版的印刷系统和方法，通过该印刷系统和方法可以产生这种高分辨率，精确的配准电路和电路装置。

公开(公告)号：US20090189204A1

公开(公告)日：2009-07-30

申请号：US12359922

申请日：2009-01-26

申请人： John M. Heitzinger ,  John Snyder

发明人： John M. Heitzinger ,  John Snyder

IPC分类号： H01L29/786 ,  H01L21/84

CPC分类号： H01L29/78603 ,  H01L27/1218 ,  H01L27/1292 ,  H01L29/66757

摘要： Systems and methods of fabricating silicon-based thin film transistors (TFTs) on flexible substrates. The systems and methods incorporate and combine deposition processes such as chemical vapor deposition and plasma-enhance vapor deposition, printing, coating, and other deposition processes, with laser annealing, etching techniques, and laser doping, all performed at low temperatures such that the precision, resolution, and registration is achieved to produce a high performing transistor. Such TFTs can be used in applications such as displays, packaging, labeling, and the like.

摘要翻译： 在柔性基板上制造硅基薄膜晶体管（TFT）的系统和方法。 这些系统和方法结合并组合了沉积过程，例如化学气相沉积和等离子体增强气相沉积，印刷，涂覆和其它沉积工艺，具有激光退火，蚀刻技术和激光掺杂，均在低温下进行，使精度 ，分辨率和配准，以产生高性能晶体管。 这样的TFT可以用于诸如显示器，包装，标签等的应用中。

公开(公告)号：US5961732A

公开(公告)日：1999-10-05

申请号：US872958

申请日：1997-06-11

申请人： John C. Patrin ,  John M. Heitzinger

发明人： John C. Patrin ,  John M. Heitzinger

IPC分类号： B08B5/02 ,  B08B3/08 ,  F25D3/10 ,  H01L21/304 ,  H01L21/306 ,  B08B3/02

CPC分类号： H01L21/02043 ,  F25D2400/22 ,  F25D3/10 ,  Y10S134/902

摘要： A substrate may be treated by impinging the substrate with a cryogenic aerosol spray wherein the cryogenic aerosol spray is formed by expanding a pressurized liquid or liquid/gaseous stream of one or more cryogens through a nozzle at a given distance from the substrate into a process chamber with a pressure of about 1.6.times.10.sup.4 Pascal or less so as to form at least substantially solid aerosol particles of said one or more cryogens downstream from the nozzle by the cooling resulting from the expansion and/or evaporation to form an at least substantially solid particle containing aerosol.

摘要翻译： 底物可以通过用低温气溶胶喷雾冲击基材来处理，其中低温气溶胶喷雾是通过将一个或多个低温原液的加压液体或液体/气体流通过喷嘴以一定距离从基底扩展到处理室而形成的 其压力为约1.6×10 4帕斯卡或更小，以便通过由膨胀和/或蒸发产生的冷却形成至少基本上固体的颗粒，从喷嘴下游形成所述一种或多种低温液的至少基本上固体的气溶胶颗粒， 气雾剂。