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公开(公告)号:US20220162128A1
公开(公告)日:2022-05-26
申请号:US17329001
申请日:2021-05-24
申请人: Pallidus, Inc.
发明人: Douglas M. Dukes , Ashish P. Diwanji , Andrew R. Hopkins , Walter J. Sherwood , Glenn Sandgren , Mark S. Land , Brian L. Benac
IPC分类号: C04B35/80 , C04B35/56 , C04B35/571 , C04B35/64 , C08G77/20 , C04B35/515 , C08L83/04 , C08G77/50 , C01B32/907
摘要: Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
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公开(公告)号:US20210009430A1
公开(公告)日:2021-01-14
申请号:US16825162
申请日:2020-03-20
申请人: Pallidus, Inc.
发明人: Mark S. Land , Ashish P. Diwanji , Andrew R. Hopkins , Walter J. Sherwood , Douglas M. Dukes , Glenn Sandgren , Brian L. Benac
IPC分类号: C01B32/956 , C30B23/00 , C30B23/02 , C30B29/36 , C30B29/06 , H01L29/16 , H01L29/66 , H01L21/02 , C04B35/56 , C04B35/571 , C08G77/20 , C08G77/50 , C08L83/04 , C01B32/977 , C08L83/00
摘要: Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
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公开(公告)号:US20180201546A1
公开(公告)日:2018-07-19
申请号:US15924141
申请日:2018-03-16
申请人: Pallidus, Inc.
发明人: Mark S. Land , Ashish P. Diwanji , Andrew R. Hopkins , Walter J. Sherwood , Douglas M. Dukes , Glenn Sandgren , Brian L. Benac
IPC分类号: C04B35/571 , C08L83/04 , C01B32/956 , C08L83/00 , C04B35/56 , C04B35/80 , C08G77/20 , C08G77/00 , C08G77/12
CPC分类号: C04B35/571 , C01B32/956 , C04B35/56 , C04B35/5603 , C04B35/806 , C04B2235/3418 , C04B2235/3826 , C04B2235/44 , C04B2235/48 , C04B2235/483 , C04B2235/528 , C04B2235/5427 , C04B2235/5436 , C04B2235/5445 , C04B2235/6581 , C04B2235/72 , C04B2235/721 , C04B2235/727 , C04B2235/77 , C04B2235/785 , C04B2235/94 , C04B2235/96 , C08G77/12 , C08G77/20 , C08G77/50 , C08G77/80 , C08L83/00 , C08L83/04
摘要: Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
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公开(公告)号:US12030819B2
公开(公告)日:2024-07-09
申请号:US17367380
申请日:2021-07-04
申请人: Pallidus, Inc.
发明人: Douglas M. Dukes , Ashish P. Diwanji , Andrew R. Hopkins , Walter J. Sherwood , Glenn Sandgren , Mark S. Land , Brian L. Benac
IPC分类号: C01B32/956 , C01B32/977 , C04B35/515 , C04B35/56 , C04B35/571 , C04B35/80 , C08G77/20 , C08G77/50 , C08L83/00 , C08L83/04 , C08G77/00 , C08G77/12
CPC分类号: C04B35/571 , C01B32/956 , C01B32/977 , C04B35/515 , C04B35/56 , C04B35/5603 , C04B35/80 , C08G77/20 , C08G77/50 , C08L83/00 , C08L83/04 , C04B2235/3418 , C04B2235/3826 , C04B2235/44 , C04B2235/48 , C04B2235/483 , C04B2235/528 , C04B2235/5427 , C04B2235/5436 , C04B2235/5445 , C04B2235/6581 , C04B2235/72 , C04B2235/721 , C04B2235/727 , C04B2235/77 , C04B2235/785 , C04B2235/94 , C04B2235/96 , C08G77/12 , C08G77/80 , C08L83/04 , C08L83/00
摘要: Materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC. Doped SiOC and SiC materials for providing semiconductor properties to SiC wafers, including p- and n-type properties.
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公开(公告)号:US20230089735A1
公开(公告)日:2023-03-23
申请号:US17687735
申请日:2022-03-07
申请人: Pallidus, Inc.
发明人: Douglas M. Dukes , Ashish P. Diwanji , Andrew R. Hopkins , Walter J. Sherwood , Glenn Sandgren , Mark S. Land , Brian L. Benac
IPC分类号: C01B32/907 , C04B35/571 , C04B35/56 , C08G77/20 , C08G77/50 , C08L83/04 , C04B35/80
摘要: Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
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公开(公告)号:US20220002207A1
公开(公告)日:2022-01-06
申请号:US17367380
申请日:2021-07-04
申请人: Pallidus, Inc.
发明人: Douglas M. Dukes , Ashish P. Diwanji , Andrew R. Hopkins , Walter J. Sherwood , Glenn Sandgren , Mark S. Land , Brian L. Benac
IPC分类号: C04B35/571 , C04B35/56 , C08G77/20 , C08G77/50 , C08L83/04 , C01B32/977 , C04B35/80 , C04B35/515 , C01B32/956 , C08L83/00
摘要: Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
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公开(公告)号:US11820666B2
公开(公告)日:2023-11-21
申请号:US17396687
申请日:2021-08-07
申请人: Pallidus, Inc.
发明人: Douglas M. Dukes , Andrew R. Hopkins , Walter J. Sherwood , Ashish P. Diwanji , Glenn Sandgren , Mark S. Land , Brian L. Benac
IPC分类号: C01B33/00 , C01B32/956 , C04B35/571 , C08G77/50 , C04B35/56 , C08L83/04 , C08G77/20 , C01B32/40 , C01B32/50 , C01B32/977 , C04B35/80 , C08G77/12 , C09K8/80 , C08G77/00
CPC分类号: C01B32/956 , C01B32/40 , C01B32/50 , C01B32/977 , C04B35/56 , C04B35/5603 , C04B35/571 , C04B35/80 , C08G77/20 , C08G77/50 , C08L83/04 , C04B2235/3418 , C04B2235/3826 , C04B2235/44 , C04B2235/48 , C04B2235/483 , C04B2235/528 , C04B2235/5427 , C04B2235/5436 , C04B2235/6581 , C04B2235/72 , C04B2235/77 , C04B2235/96 , C08G77/12 , C08G77/80 , C09K8/80 , C08L83/00
摘要: Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
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公开(公告)号:US11365124B2
公开(公告)日:2022-06-21
申请号:US16825162
申请日:2020-03-20
申请人: Pallidus, Inc.
发明人: Mark S. Land , Ashish P. Diwanji , Andrew R. Hopkins , Walter J. Sherwood , Douglas M. Dukes , Glenn Sandgren , Brian L. Benac
IPC分类号: C01B32/977 , C01B32/956 , C30B23/00 , C30B23/02 , C30B29/36 , C30B29/06 , H01L29/16 , H01L29/66 , H01L21/02 , C04B35/56 , C04B35/571 , C08G77/20 , C08G77/50 , C08L83/04 , C04B35/80 , C08L83/00 , C08G77/12 , C08G77/00
摘要: Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
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公开(公告)号:US10322974B2
公开(公告)日:2019-06-18
申请号:US15924141
申请日:2018-03-16
申请人: Pallidus, Inc.
发明人: Mark S. Land , Ashish P. Diwanji , Andrew R. Hopkins , Walter J. Sherwood , Douglas M. Dukes , Glenn Sandgren , Brian L. Benac
IPC分类号: C01B32/956 , C04B35/571 , C04B35/56 , C04B35/80 , C08G77/20 , C08G77/50 , C08L83/04 , C08L83/00 , C08G77/12 , C08G77/00
摘要: Organosilicon chemistry, polymer derived ceramic materials, and methods. Such materials and methods for making polysilocarb (SiOC) and Silicon Carbide (SiC) materials having 3-nines, 4-nines, 6-nines and greater purity. Processes and articles utilizing such high purity SiOC and SiC.
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公开(公告)号:US20180290893A1
公开(公告)日:2018-10-11
申请号:US15939423
申请日:2018-03-29
申请人: Pallidus, Inc.
IPC分类号: C01B32/963 , C30B29/36 , C30B29/66 , C30B25/16
摘要: Volumetric shapes of SiC starting materials for boule growth. Methods of controlling vapor deposition growth of SiC boules, and providing directional flux. Methods of increase the number of wafers, the number of electronic components and the number of operable devices from a single boule growth cycle.
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