Optical sensor and manufacturing method thereof

    公开(公告)号:US10326030B2

    公开(公告)日:2019-06-18

    申请号:US14695675

    申请日:2015-04-24

    Inventor: Teng-Chien Yu

    Abstract: Some embodiments of the present disclosure provide an optical sensor. The optical sensor includes a semiconductive block having a front side and a back side, a wave guide region, and a light sensing region. The wave guide region is positioned over the back side of the semiconductive block and having a core layer. The wave guide region is configured to guide an incident light. The light sensing region is positioned in the semiconductive block, having a multi-junction photodiode. The light sensing region is configured to sense emission lights from the wave guide region.

    Method for manufacturing an optical sensor

    公开(公告)号:US11362223B2

    公开(公告)日:2022-06-14

    申请号:US16665352

    申请日:2019-10-28

    Abstract: A method for manufacturing an optical sensor is provided. The operations of the method for manufacturing the optical sensor includes providing a semiconductive layer having an electrical circuit area and an optical sensing area; forming a first electrical contact directly over the electrical circuit area; forming a first light guiding part directly over the optical sensing area simultaneously with forming the first electrical contact; forming a first metal layer directly over the first electrical contact; forming a second light guiding part directly over the first light guiding part simultaneously with forming a second electrical contact directly over the first electrical contact; forming a thick metal layer over the electrical circuit area and an optical sensing area; and forming an aperture in the thick metal layer, wherein the aperture aligning with the optical sensing area.

    Optical sensing module
    4.
    发明授权

    公开(公告)号:US09945782B2

    公开(公告)日:2018-04-17

    申请号:US15660961

    申请日:2017-07-27

    Abstract: An optical sensing module is configured to detect a characteristic of a sample. The optical sensing module includes a light source, a light guide plate, a first cladding layer, a light converging layer, a filter layer, and a plurality of sensors. The light source is configured to provide an exciting beam. Positions of the sensors correspond to positions of the holes. After the exciting beam enters the light guide plate, at least one portion of the exciting beam is transmitted to the sample through a portion of the surface of the light guide plate exposed by the holes, the sample is excited by the exciting beam to emit a signal beam, and the signal beam passes through the light converging layer and the filter layer in an order and travels to the sensors. Another optical sensing module is also provided.

    Optical sensing module
    5.
    发明授权

    公开(公告)号:US09778191B2

    公开(公告)日:2017-10-03

    申请号:US15422474

    申请日:2017-02-02

    Abstract: An optical sensing module is configured to detect a characteristic of a sample. The optical sensing module includes a light source, a light guide plate, a first cladding layer, a light converging layer, a filter layer, and a plurality of sensors. The light source is configured to provide an exciting beam. Positions of the sensors correspond to positions of the holes. After the exciting beam enters the light guide plate, at least one portion of the exciting beam is transmitted to the sample through a portion of the surface of the light guide plate exposed by the holes, the sample is excited by the exciting beam to emit a signal beam, and the signal beam passes through the light converging layer and the filter layer in an order and travels to the sensors. Another optical sensing module is also provided.

    Optical sensor and manufacturing method thereof

    公开(公告)号:US10566476B2

    公开(公告)日:2020-02-18

    申请号:US15713012

    申请日:2017-09-22

    Abstract: Some embodiments of the present disclosure provide an optical sensor. The optical sensor includes a semiconductive substrate; a light sensing region on the semiconductive substrate; a waveguide region configured to guide light from a wave insert portion through a waveguide portion and to a sample holding portion; and an interconnect region below the waveguide region, and the interconnect region being disposed above the light sensing region. The waveguide portion includes a first dielectric layer comprising a first refractive index and at least one second dielectric layer comprising a second refractive index, wherein the second refractive index is smaller than the first refractive index.

    OPTICAL SENSING MODULE
    7.
    发明申请

    公开(公告)号:US20170322157A1

    公开(公告)日:2017-11-09

    申请号:US15660961

    申请日:2017-07-27

    Abstract: An optical sensing module is configured to detect a characteristic of a sample. The optical sensing module includes a light source, a light guide plate, a first cladding layer, a light converging layer, a filter layer, and a plurality of sensors. The light source is configured to provide an exciting beam. Positions of the sensors correspond to positions of the holes. After the exciting beam enters the light guide plate, at least one portion of the exciting beam is transmitted to the sample through a portion of the surface of the light guide plate exposed by the holes, the sample is excited by the exciting beam to emit a signal beam, and the signal beam passes through the light converging layer and the filter layer in an order and travels to the sensors. Another optical sensing module is also provided.

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