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公开(公告)号：US09812597B2
公开(公告)日：2017-11-07
申请号：US14823815
申请日：2015-08-11
Applicant: Personal Genomics, Inc.
Inventor： Teng-Chien Yu , Sheng-Fu Lin , Ming-Sheng Yang
IPC: H01L31/0232 , B82Y20/00 , G01N21/64 , G01N21/77 , G02B6/122
CPC classification number: H01L31/02327 , B82Y20/00 , G01N21/6454 , G01N21/648 , G01N21/7703 , G02B6/1226
Abstract: Some embodiments of the present disclosure provide an optical sensor. The optical sensor includes a semiconductive substrate. A light sensing region is on the semiconductive substrate. A waveguide region is configured to guide light from a wave insert portion through a waveguide portion and to a sample holding portion. The waveguide portion includes a first dielectric layer including a first refractive index. A second dielectric layer includes a second refractive index. The second refractive index is smaller than the first refractive index. A first interconnect portion is positioned in the waveguide portion, configured to transmit electrical signal from the light sensing region to an external circuit. The sample holding portion is over the light sensing region.
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公开(公告)号：US10566476B2
公开(公告)日：2020-02-18
申请号：US15713012
申请日：2017-09-22
Applicant: Personal Genomics, Inc.
Inventor： Teng-Chien Yu , Sheng-Fu Lin , Ming-Sheng Yang
Abstract: Some embodiments of the present disclosure provide an optical sensor. The optical sensor includes a semiconductive substrate; a light sensing region on the semiconductive substrate; a waveguide region configured to guide light from a wave insert portion through a waveguide portion and to a sample holding portion; and an interconnect region below the waveguide region, and the interconnect region being disposed above the light sensing region. The waveguide portion includes a first dielectric layer comprising a first refractive index and at least one second dielectric layer comprising a second refractive index, wherein the second refractive index is smaller than the first refractive index.
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