公开(公告)号：US11362223B2

公开(公告)日：2022-06-14

申请号：US16665352

申请日：2019-10-28

Applicant: PERSONAL GENOMICS, INC.

Inventor： Coming Chen ,  Teng-Chien Yu ,  Yuan-Che Lee

IPC: H01L31/0232 ,  G01N21/77 ,  G01N21/64 ,  G01N21/03 ,  H01L31/02 ,  G02B6/42

Abstract: A method for manufacturing an optical sensor is provided. The operations of the method for manufacturing the optical sensor includes providing a semiconductive layer having an electrical circuit area and an optical sensing area; forming a first electrical contact directly over the electrical circuit area; forming a first light guiding part directly over the optical sensing area simultaneously with forming the first electrical contact; forming a first metal layer directly over the first electrical contact; forming a second light guiding part directly over the first light guiding part simultaneously with forming a second electrical contact directly over the first electrical contact; forming a thick metal layer over the electrical circuit area and an optical sensing area; and forming an aperture in the thick metal layer, wherein the aperture aligning with the optical sensing area.