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公开(公告)号:US10903359B2
公开(公告)日:2021-01-26
申请号:US16488199
申请日:2019-01-17
Inventor: Chie Fujioka , Hiroshi Yoshida , Yoshihiro Matsushima , Hideki Mizuhara , Masao Hamasaki , Mitsuaki Sakamoto
IPC: H01L29/78 , H01L23/538 , H01L27/088
Abstract: A semiconductor device includes: a semiconductor layer that includes principal surfaces; a metal layer that includes principal surfaces, is disposed with the principal surface in contact with the principal surface, is thicker than the semiconductor layer, and comprises a first metal material; a metal layer that includes principal surfaces, is disposed with the principal surface in contact with the principal surface, and comprises a metal material having a Young's modulus greater than that of the first metal material; and transistors. The transistor includes a source electrode and a gate electrode on a side facing the principal surface. The transistor includes a source electrode and a gate electrode on a side facing the principal surface.