公开(公告)号：US20160086768A1

公开(公告)日：2016-03-24

申请号：US14852699

申请日：2015-09-14

Applicant: NuFlare Technology, Inc.

Inventor： Yasuyuki TANEDA ,  Yoshiro YAMANAKA

IPC: H01J37/30 ,  H01J37/147 ,  H01J37/04 ,  B01J19/08 ,  H01J37/317

CPC classification number: H01J37/3002 ,  B01J19/087 ,  B01J2219/0801 ,  B01J2219/085 ,  B01J2219/0869 ,  B01J2219/0875 ,  C01B13/10 ,  H01J37/045 ,  H01J37/147 ,  H01J37/3174 ,  H01J2237/006 ,  H01J2237/043 ,  H01J2237/15

Abstract: An ozone supplying apparatus according to an embodiment of the present invention is an ozone gas supplying apparatus which supplies an ozone gas to a vacuum apparatus. The ozone supplying apparatus includes an ozone generator configured to generate the ozone gas, a first flow controller configured to control a flow rate of the ozone gas generated by the ozone generator, a second flow controller configured to control a flow rate of the ozone gas supplied to the vacuum apparatus, and a main pipe provided on a secondary side of the first flow controller and on a primary side of the second flow controller, with the ozone gas being introduced into the main pipe at such a flow rate that an internal pressure of the main pipe is controlled to be lower than atmospheric pressure by the first flow controller.

Abstract translation: 根据本发明的实施方式的臭氧供给装置是向真空装置供给臭氧气体的臭氧气体供给装置。 所述臭氧供给装置具备构成为产生所述臭氧气体的臭氧发生器，构成为控制由所述臭氧发生器产生的臭氧气体的流量的第一流量控制器，构成为控制供给的臭氧气体的流量的第二流量控制器 以及设置在第一流量控制器的次级侧和第二流量控制器的初级侧上的主管，其中臭氧气体以这样的流量被引入到主管中， 主管由第一流量控制器控制为低于大气压力。