ELECTRONIC COMPONENT AND CHARGED PARTICLE BEAM IRRADIATION APPARATUS

    公开(公告)号:US20250095948A1

    公开(公告)日:2025-03-20

    申请号:US18885828

    申请日:2024-09-16

    Abstract: An electronic component of the embodiment includes: a first substrate including first through holes, a first substrate plane, and a second substrate plane; electrode pairs provided in the first through hole and including a first electrode a second electrode, an insulating film, at least a part of the insulating film being provided between an inner side surface of each of the first through holes and an outer side surface of the first electrode; wherein a surface of the insulating film exposed from the first and second electrode in the vicinity of the first and third end is located outside of a first and a third surface, the first surface is an inner side surface of the second portion, and the third surface is an inner side surface of the fifth portion.

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