公开(公告)号：US20240192072A1

公开(公告)日：2024-06-13

申请号：US18063388

申请日：2022-12-08

Applicant: NXP USA, INC.

Inventor： Andrew C. McNeil ,  Chad Dawson ,  Matthew Wayne Muddiman

IPC: G01L17/00 ,  B60C23/04

CPC classification number: G01L17/00 ,  B60C23/0474 ,  B60C23/0488

Abstract: A method for reading pressure may include reading, by a first device, an acceleration of a pressure sensor, wherein the pressure sensor is encapsulated in a medium, and wherein the acceleration alters a reading of the pressure sensor and reading, by a second device, a pressure reading from the pressure sensor. If an output criteria is met, an adjusted pressure reading is produced. A system for reading pressure includes a first device coupled to the pressure sensor and configured to read an acceleration of the pressure sensor. A second device may be configured to read a pressure from the pressure sensor wherein, if an output criteria is met, to adjust the measured pressure of the pressure sensor, based on the measured acceleration, to produce an adjusted pressure reading. An output device is configured to receive an output of the second device and to output an output pressure reading.

公开(公告)号：US20220089435A9

公开(公告)日：2022-03-24

申请号：US16697509

申请日：2019-11-27

Applicant: NXP USA, Inc.

Inventor： Marc Edward Holbein ,  Andrew C. McNeil ,  Jerome Romain Enjalbert

IPC: B81C99/00 ,  B81B7/00

Abstract: A sensor system includes first and second MEMS structures and a processing circuit. The first and second MEMS structures are configured to produce first and second output signals, respectively, in response to a physical stimulus. A method performed by the processing circuit entails receiving the first and second output signals and detecting a defective one of the first and second MEMS structures from the first and second output signals by determining that the first and second output signals are uncorrelated to one another. The method further entails utilizing only the first or the second output signal from a non-defective one of the MEMS structures to produce a processed output signal when one of the MEMS structures is determined to be defective and utilizing the first and second output signals from both of the MEMS structures to produce the processed output signal when neither of the MEMS structures is defective.

公开(公告)号：US10794701B2

公开(公告)日：2020-10-06

申请号：US15967800

申请日：2018-05-01

Applicant: NXP USA, Inc.

Inventor： Andrew C. McNeil

IPC: G01C19/5712

Abstract: An inertial sensor includes a movable element having a mass that is asymmetric relative to a rotational axis and anchors attached to the substrate. First and second spring systems are spaced apart from the surface of the substrate. Each of the first and second spring systems includes a pair of beams, a center flexure interposed between the beams, and a pair of end flexures. One of the end flexures is interconnected between one of the beams and one of the anchors and the other end flexure is interconnected between one of the beams and the movable element. The beams are resistant to deformation relative to the center flexure and the end flexures. The first and second spring systems facilitate rotational motion of the movable element about the rotational axis and the spring systems facilitate translational motion of the movable element substantially parallel to the surface of the substrate.

公开(公告)号：US20240329076A1

公开(公告)日：2024-10-03

申请号：US18295232

申请日：2023-04-03

Applicant: NXP USA, Inc.

Inventor： Jun Tang ,  Jinglun Li ,  Andrew C. McNeil ,  Aaron A. Geisberger

IPC: G01P15/08 ,  B81C1/00

CPC classification number: G01P15/08 ,  B81C1/00198 ,  G01P2015/0837

Abstract: A MEMS device includes a substrate, a set of spring, and a proof mass suspended above and coupled to the substrate by the springs. Each spring includes a corresponding anchor on the substrate and a beam extending away from that anchor. Each beam has a fixed end that is coupled to the anchor by a first linkage at one end of the beam proximal to the anchor and a free end that is coupled to the proof mass by a second linkage at an end of the beam that is distal to the anchor. The anchors are arranged symmetrically around a center of the proof mass. The proof mass translates vertically with respect to the substrate and when a vertical displacement of the proof mass toward the substrate reaches a predefined value, the free end of each spring contacts the substrate and prevents the proof mass from contacting the substrate.

公开(公告)号：US20210155473A1

公开(公告)日：2021-05-27

申请号：US16697509

申请日：2019-11-27

Applicant: NXP USA, Inc.

Inventor： Marc Edward Holbein ,  Andrew C. McNeil ,  Jerome Romain Enjalbert

IPC: B81C99/00 ,  B81B7/00

Abstract: A sensor system includes first and second MEMS structures and a processing circuit. The first and second MEMS structures are configured to produce first and second output signals, respectively, in response to a physical stimulus. A method performed by the processing circuit entails receiving the first and second output signals and detecting a defective one of the first and second MEMS structures from the first and second output signals by determining that the first and second output signals are uncorrelated to one another. The method further entails utilizing only the first or the second output signal from a non-defective one of the MEMS structures to produce a processed output signal when one of the MEMS structures is determined to be defective and utilizing the first and second output signals from both of the MEMS structures to produce the processed output signal when neither of the MEMS structures is defective.

公开(公告)号：US10712359B2

公开(公告)日：2020-07-14

申请号：US15967723

申请日：2018-05-01

Applicant: NXP USA, Inc.

Inventor： Andrew C. McNeil

IPC: G01P15/125 ,  G01P15/18 ,  G01P15/08

Abstract: A flexure for a MEMS device includes an elongated beam and a protrusion element extending outwardly from a sidewall of the elongated beam. A MEMS inertial sensor includes a movable element spaced apart from a surface of a substrate, an anchor attached to the substrate, and a spring system. The spring system includes first and second beams, a center flexure between the first and second beams, a first end flexure interconnected between an end of the first beam and the anchor, and a second end flexure interconnected between an end of the second beam and the movable element. Each of the end flexures includes the elongated beam having first and second ends, and the sidewall defining a longitudinal dimension of the elongated beam, and the protrusion element extending from the sidewall of the elongated beam, the protrusion element being displaced away from the first and second ends of the beam.

公开(公告)号：US20210396781A1

公开(公告)日：2021-12-23

申请号：US16904182

申请日：2020-06-17

Applicant: NXP USA, Inc.

Inventor： Andrew C. McNeil ,  Fengyuan Li

IPC: G01P15/125 ,  B81B3/00

Abstract: A sensor includes a movable element adapted for rotational motion about a rotational axis due to acceleration along an axis perpendicular to a surface of a substrate. The movable element includes first and second ends, a first section having a first length between the rotational axis and the first end, and a second section having a second length between the rotational axis and the second end that is less than the first length. A motion stop extends from the second end of the second section. The first end of the first section includes a geometric stop region for contacting the surface of the substrate at a first distance away from the rotational axis. The motion stop for contacting the surface of the substrate at a second distance away from the rotational axis. The first and second distances facilitate symmetric stop performance between the geometric stop region and the motion stop.

公开(公告)号：US11029327B2

公开(公告)日：2021-06-08

申请号：US16176256

申请日：2018-10-31

Applicant: NXP USA, Inc.

Inventor： Andrew C. McNeil

IPC: G01P15/125 ,  G01P15/08

Abstract: An inertial sensor includes a substrate, a movable element having an edge, and a suspension system retaining the movable element in spaced apart relationship above a surface of the substrate. The suspension system includes an anchor attached to the surface of the substrate, the anchor having a first side laterally spaced apart from the edge of the movable element, and a spring structure having a first attach point coupled to the first side of the anchor and a second attach point coupled to the edge of the movable element. The spring structure includes beam sections serially adjoining one another, the beam sections extending from the first side of the anchor and surrounding the anchor to couple to the edge of the movable element. The spring structure makes no more than one coil around the anchor to position the first attach point in proximity to the second attach point.

公开(公告)号：US10809277B2

公开(公告)日：2020-10-20

申请号：US15845506

申请日：2017-12-18

Applicant: NXP USA, Inc.

Inventor： Jun Tang ,  Andrew C. McNeil ,  Kajal Rahimian Kordestani

IPC: G01P15/08 ,  G01C19/5656 ,  G01P15/13 ,  G01P15/18 ,  G01C19/5755 ,  G01P15/125

Abstract: A single axis inertial sensor includes a proof mass spaced apart from a surface of a substrate. The proof mass has first, second, third, and fourth sections. The third section diagonally opposes the first section relative to a center point of the proof mass and the fourth section diagonally opposes the second section relative to the center point. A first mass of the first and third sections is greater than a second mass of the second and fourth sections. A first lever structure is connected to the first and second sections, a second lever structure is connected to the second and third sections, a third lever structure is connected to the third and fourth sections, and a fourth lever structure is connected to the fourth and first sections. The lever structures enable translational motion of the proof mass in response to Z-axis linear acceleration forces imposed on the sensor.

公开(公告)号：US20190339301A1

公开(公告)日：2019-11-07

申请号：US15967723

申请日：2018-05-01

Applicant: NXP USA, Inc.

Inventor： Andrew C. McNeil

IPC: G01P15/125 ,  G01P15/18

Abstract: A flexure for a MEMS device includes an elongated beam and a protrusion element extending outwardly from a sidewall of the elongated beam. A MEMS inertial sensor includes a movable element spaced apart from a surface of a substrate, an anchor attached to the substrate, and a spring system. The spring system includes first and second beams, a center flexure between the first and second beams, a first end flexure interconnected between an end of the first beam and the anchor, and a second end flexure interconnected between an end of the second beam and the movable element. Each of the end flexures includes the elongated beam having first and second ends, and the sidewall defining a longitudinal dimension of the elongated beam, and the protrusion element extending from the sidewall of the elongated beam, the protrusion element being displaced away from the first and second ends of the beam.