• Patent Title: Inertial sensor with single proof mass and multiple sense axis capability
  • Application No.: US15967800
    Application Date: 2018-05-01
  • Publication No.: US10794701B2
    Publication Date: 2020-10-06
  • Inventor: Andrew C. McNeil
  • Applicant: NXP USA, Inc.
  • Applicant Address: US TX Austin
  • Assignee: NXP USA, Inc.
  • Current Assignee: NXP USA, Inc.
  • Current Assignee Address: US TX Austin
  • Agent Charlene R. Jacobsen
  • Main IPC: G01C19/5712
  • IPC: G01C19/5712
Inertial sensor with single proof mass and multiple sense axis capability
Abstract:
An inertial sensor includes a movable element having a mass that is asymmetric relative to a rotational axis and anchors attached to the substrate. First and second spring systems are spaced apart from the surface of the substrate. Each of the first and second spring systems includes a pair of beams, a center flexure interposed between the beams, and a pair of end flexures. One of the end flexures is interconnected between one of the beams and one of the anchors and the other end flexure is interconnected between one of the beams and the movable element. The beams are resistant to deformation relative to the center flexure and the end flexures. The first and second spring systems facilitate rotational motion of the movable element about the rotational axis and the spring systems facilitate translational motion of the movable element substantially parallel to the surface of the substrate.
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