Invention Grant
- Patent Title: Inertial sensor with single proof mass and multiple sense axis capability
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Application No.: US15967800Application Date: 2018-05-01
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Publication No.: US10794701B2Publication Date: 2020-10-06
- Inventor: Andrew C. McNeil
- Applicant: NXP USA, Inc.
- Applicant Address: US TX Austin
- Assignee: NXP USA, Inc.
- Current Assignee: NXP USA, Inc.
- Current Assignee Address: US TX Austin
- Agent Charlene R. Jacobsen
- Main IPC: G01C19/5712
- IPC: G01C19/5712

Abstract:
An inertial sensor includes a movable element having a mass that is asymmetric relative to a rotational axis and anchors attached to the substrate. First and second spring systems are spaced apart from the surface of the substrate. Each of the first and second spring systems includes a pair of beams, a center flexure interposed between the beams, and a pair of end flexures. One of the end flexures is interconnected between one of the beams and one of the anchors and the other end flexure is interconnected between one of the beams and the movable element. The beams are resistant to deformation relative to the center flexure and the end flexures. The first and second spring systems facilitate rotational motion of the movable element about the rotational axis and the spring systems facilitate translational motion of the movable element substantially parallel to the surface of the substrate.
Public/Granted literature
- US20190339078A1 INERTIAL SENSOR WITH SINGLE PROOF MASS AND MULTIPLE SENSE AXIS CAPABILIITY Public/Granted day:2019-11-07
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