公开(公告)号：US20220170958A1

公开(公告)日：2022-06-02

申请号：US17456953

申请日：2021-11-30

Applicant: NXP USA, Inc.

Inventor： Jerome Romain Enjalbert

IPC: G01P15/125 ,  H01L25/16 ,  H01L23/00

Abstract: A sensor package includes a first die having a capacitor sensor that includes an active sensing portion and a shield surrounding the active sensing portion. The sensor package further includes a second die that includes a voltage regulator configured to produce a shield voltage and a compensation circuit configured to produce a compensation signal. The voltage regulator and the compensation circuit are electrically coupled to the shield. The voltage regulator is configured to regulate the shield to the shield voltage and the compensation signal produced by the compensation circuit is configured to reduce an interference signal on the shield voltage. The compensation circuit includes one or more coupling capacitors that may be programmable capacitor arrays and calibration methodology entails selecting capacitance values for the programmable capacitor arrays that minimizes the error on an output signal of the sensor package.

公开(公告)号：US20180335444A1

公开(公告)日：2018-11-22

申请号：US15951514

申请日：2018-04-12

Applicant: NXP USA, Inc.

Inventor： Thierry Dominique Yves Cassagnes ,  Joel Cameron Beckwith ,  Jerome Romain Enjalbert ,  Jalal Ouaddah

IPC: G01P15/125 ,  H03F1/26 ,  H03G1/00

CPC classification number: G01P15/125 ,  G01D5/241 ,  G01P21/00

Abstract: A system includes a capacitive transducer, an excitation circuit, and a measuring circuit. The excitation circuit is configured to excite the capacitive transducer and the measuring circuit measures an output signal from the capacitive transducer responsive to the excitation voltage. The excitation circuit includes a voltage source for providing a first voltage in response to receipt of a supply voltage, a voltage generator coupled to the voltage source for receiving the first voltage and generating a second voltage that is greater than the supply voltage, and a control circuit coupled to the voltage source and the voltage generator. The control circuit is configured to provide any of a system ground, the first voltage, and the second voltage to first and second terminals of the capacitive transducer, and particularly, being configured to apply the system ground and the second voltage in the form of two consecutive stimuli with opposite polarities.

公开(公告)号：US10393769B2

公开(公告)日：2019-08-27

申请号：US15453306

申请日：2017-03-08

Applicant: NXP USA, Inc.

Inventor： Olivier Bernal ,  Lavinia Elena Ciotirca ,  Thierry Dominique Yves Cassagnes ,  Jerome Romain Enjalbert ,  Helene Catherine Louise Tap

IPC: G01P15/125 ,  G01P15/08

Abstract: A microelectromechanical device comprising a mass, an electromechanical transducer configured to convert, after damping the mass during a first damping period, displacement of the mass in the first and second directions into corresponding first and second electrical signals during corresponding first and second conversion time periods, a derivative unit configured to generate first and second control signals indicative of the velocity of the mass in the first and second direction, and a controller for providing the first and second control signals to respective first and second one or more electrodes of the electromechanical transducer for simultaneously damping the mass in the first and second directions with a first and second damping forces corresponding to the first and second velocity during the damping time period.

公开(公告)号：US20210155473A1

公开(公告)日：2021-05-27

申请号：US16697509

申请日：2019-11-27

Applicant: NXP USA, Inc.

Inventor： Marc Edward Holbein ,  Andrew C. McNeil ,  Jerome Romain Enjalbert

IPC: B81C99/00 ,  B81B7/00

Abstract: A sensor system includes first and second MEMS structures and a processing circuit. The first and second MEMS structures are configured to produce first and second output signals, respectively, in response to a physical stimulus. A method performed by the processing circuit entails receiving the first and second output signals and detecting a defective one of the first and second MEMS structures from the first and second output signals by determining that the first and second output signals are uncorrelated to one another. The method further entails utilizing only the first or the second output signal from a non-defective one of the MEMS structures to produce a processed output signal when one of the MEMS structures is determined to be defective and utilizing the first and second output signals from both of the MEMS structures to produce the processed output signal when neither of the MEMS structures is defective.

公开(公告)号：US20210123946A1

公开(公告)日：2021-04-29

申请号：US17027948

申请日：2020-09-22

Applicant: NXP USA, Inc.

Inventor： Andrew C McNeil ,  Jerome Romain Enjalbert ,  Joel Cameron Beckwith ,  Jun Tang

IPC: G01P15/125 ,  B81B3/00

Abstract: A sensor system includes a transducer for sensing a physical stimulus along at least two orthogonal axes and an excitation circuit. The transducer includes a movable mass configured to react to the physical stimulus and multiple differential electrode pairs of electrodes. Each of the electrode pairs is configured to detect displacement of the movable mass along one of the orthogonal axes. The excitation circuit is connectable to the electrodes in various electrode connection configurations, with different polarity schemes, that enable excitation and sampling of each of the orthogonal axes during every sensing period. For each sensing period, a composite output signal is produced that includes the combined information sensed along each of the orthogonal axes. The individual sense signals for each orthogonal axis may be extracted from the composite output signals.

公开(公告)号：US10545168B2

公开(公告)日：2020-01-28

申请号：US15800222

申请日：2017-11-01

Applicant: NXP USA, Inc.

Inventor： Jerome Romain Enjalbert

IPC: G01P15/125 ,  G01P15/08 ,  G01P21/00

Abstract: A micro-electro-mechanical system (MEMS) device and a method of testing a MEMS device. The device includes a MEMS sensor having first and second mobile elements, first and second electrodes arranged to deflect the mobile elements by the application of test voltages, and a differential detector circuit. The device also includes an input multiplexer circuit configured selectively to connect each electrode to a test voltage source to apply a plurality of test voltages to deflect the mobile elements during a test mode. The test voltages comprise a set of monotonically increasing test voltages and a set of monotonically decreasing voltages for performing a C(V) sweep to test for stiction. The device further includes an output multiplexer circuit configured selectively to connect the first mobile element and/or the second mobile element to a single one of the inputs of the detector circuit to detect the deflection of the mobile element.

公开(公告)号：US20180113147A1

公开(公告)日：2018-04-26

申请号：US15727989

申请日：2017-10-09

Applicant: NXP USA, INC.

Inventor： Jerome Romain Enjalbert

IPC: G01P21/00 ,  G01P15/18 ,  G01P15/125

CPC classification number: G01P21/00 ,  G01P15/125 ,  G01P15/18 ,  G01P2015/0868 ,  G01P2015/0871 ,  G01P2015/0874

Abstract: A method is provided for testing a multi-axis micro-electro-mechanical system (MEMS) acceleration sensor. The method includes applying a first voltage to a first-axis excitation plate to move a first proof mass in contact with a proof mass stop; applying a second voltage to a second-axis excitation plate while maintaining the first voltage to the first-axis excitation plate, to move the first proof mass in a direction orthogonal to the first-axis while in contact with the proof mass stop; applying one or more low voltage excitation signals to the first-axis excitation plate; and detecting if an output voltage of the MEMS device is higher than a threshold voltage.

公开(公告)号：US20170356928A1

公开(公告)日：2017-12-14

申请号：US15453306

申请日：2017-03-08

Applicant: NXP USA, Inc.

Inventor： Olivier Bernal ,  Lavinia Elena Ciotirca ,  Thierry Dominique Yves Cassagnes ,  Jerome Romain Enjalbert ,  Helene Catherine Louise Tap

IPC: G01P15/125

CPC classification number: G01P15/125 ,  G01P15/08 ,  G01P2015/0882

Abstract: A microelectromechanical device comprising a mass, an electromechanical transducer configured to convert, after damping the mass during a first damping period, displacement of the mass in the first and second directions into corresponding first and second electrical signals during corresponding first and second conversion time periods, a derivative unit configured to generate first and second control signals indicative of the velocity of the mass in the first and second direction, and a controller for providing the first and second control signals to respective first and second one or more electrodes of the electromechanical transducer for simultaneously damping the mass in the first and second directions with a first and second damping forces corresponding to the first and second velocity during the damping time period.

公开(公告)号：US20240118307A1

公开(公告)日：2024-04-11

申请号：US18483223

申请日：2023-10-09

Applicant: NXP USA, Inc.

Inventor： Jerome Romain Enjalbert

IPC: G01P15/125

CPC classification number: G01P15/125

Abstract: An embodiment of an accelerometer front-end device includes a substrate and a first proof mass coupled to the substrate and electrically coupled to a first movable electrode and electrically coupled to a first fixed electrode having a first potential and electrically coupled to a second fixed electrode having a second potential. A shield structure is coupled to the substrate, and adjacent the first proof mass, wherein the shield structure is electrically coupled to a fixed ground potential. A second proof mass is coupled to the substrate that includes a second movable electrode that is electrically coupled to a third fixed electrode having a third potential and is electrically coupled to a fourth fixed electrode having a fourth potential, wherein the second proof mass is electrically coupled to the fixed ground potential.

公开(公告)号：US11726107B2

公开(公告)日：2023-08-15

申请号：US17027948

申请日：2020-09-22

Applicant: NXP USA, Inc.

Inventor： Andrew C McNeil ,  Jerome Romain Enjalbert ,  Joel Cameron Beckwith ,  Jun Tang

IPC: G01P15/125 ,  B81B3/00

CPC classification number: G01P15/125 ,  B81B3/0027 ,  B81B2201/0228

Abstract: A sensor system includes a transducer for sensing a physical stimulus along at least two orthogonal axes and an excitation circuit. The transducer includes a movable mass configured to react to the physical stimulus and multiple differential electrode pairs of electrodes. Each of the electrode pairs is configured to detect displacement of the movable mass along one of the orthogonal axes. The excitation circuit is connectable to the electrodes in various electrode connection configurations, with different polarity schemes, that enable excitation and sampling of each of the orthogonal axes during every sensing period. For each sensing period, a composite output signal is produced that includes the combined information sensed along each of the orthogonal axes. The individual sense signals for each orthogonal axis may be extracted from the composite output signals.