公开(公告)号：US09140678B2

公开(公告)日：2015-09-22

申请号：US14096147

申请日：2013-12-04

Applicant: NXP B.V.

Inventor： Dimitri Soccol ,  Youri Victorovitch Ponomarev ,  David van Steenwinckel

IPC: G01N33/00 ,  G01N27/02 ,  G01N22/00

CPC classification number: G01N33/004 ,  G01N22/00 ,  G01N27/02 ,  Y02A50/243 ,  Y02A50/244 ,  Y02A50/248 ,  Y10T436/20 ,  Y10T436/204998

Abstract: An integrated circuit arrangement (100) is disclosed comprising a substrate (210); and a gas such as a CO2 sensor comprising spatially separated electrodes including at least an excitation electrode (132) and a sensing electrode (142); a volume (120) in contact with said pair of electrodes, said volume including a chemical compound for forming a reaction product with said gas in an acid-base reaction; a signal generator (212) conductively coupled to the excitation electrode and adapted to provide the excitation electrode with a microwave signal; and a signal detector (214) conductively coupled to the sensing electrode and adapted to detect a change in said microwave signal caused by a permittivity change in said volume, said permittivity change being caused by said reaction product. A device comprising such an IC arrangement and a method of sensing the presence of a gas using such an IC arrangement are also disclosed.

Abstract translation: 公开了一种集成电路装置（100），其包括衬底（210）; 以及诸如CO 2传感器的气体，其包括至少包括激励电极（132）和感测电极（142）的空间分离的电极; 与所述一对电极接触的体积（120），所述体积包括用于在酸碱反应中与所述气体形成反应产物的化合物; 导电耦合到激励电极并且适于向激励电极提供微波信号的信号发生器（212）; 以及信号检测器（214），其传导耦合到感测电极并且适于检测由所述体积的介电常数变化引起的所述微波信号的变化，所述介电常数变化是由所述反应产物引起的。 还公开了包括这种IC装置的装置和使用这种IC装置来感测气体的存在的方法。

公开(公告)号：US08994194B2

公开(公告)日：2015-03-31

申请号：US14171975

申请日：2014-02-04

Applicant: NXP B.V.

Inventor： David van Steenwinckel ,  Thomas Merelle ,  Franciscus Petrus Widdershoven ,  Viet Hoang Nguyen ,  Dimitri Soccol ,  Jan Leo Dominique Fransaer

IPC: H01L21/02 ,  H01L29/66 ,  H01L29/40 ,  G01N27/414 ,  G01N27/327

CPC classification number: G01N27/4145 ,  G01N27/3275 ,  H01L29/66

Abstract: A method of manufacturing a biosensor semiconductor device in which copper electrodes at a major surface of the device are modified to form Au—Cu alloy electrodes. Such modification is effected by depositing a gold layer over the device, and then thermally treating the device to promote interdiffusion between the gold and the electrode copper. Alloyed gold-copper is removed from the surface of the device, leaving the exposed electrodes. The electrodes are better compatible with further processing into a biosensor device than is the case with conventional copper electrodes, and the process windows are wider than for gold capped copper electrodes. A biosensor semiconductor device having Au—Cu alloy electrodes is also disclosed.

Abstract translation: 一种制造生物传感器半导体器件的方法，其中在器件的主表面上的铜电极被改性以形成Au-Cu合金电极。 通过在器件上沉积金层，然后对该器件进行热处理以促进金和电极铜之间的相互扩散来实现这种修改。 从器件的表面去除合金金铜，留下暴露的电极。 与常规铜电极的情况相比，电极与生物传感器装置的进一步处理更好地兼容，并且处理窗口比金盖铜电极宽。 还公开了具有Au-Cu合金电极的生物传感器半导体器件。

公开(公告)号：US20140170762A1

公开(公告)日：2014-06-19

申请号：US14096147

申请日：2013-12-04

Applicant: NXP B.V.

Inventor： Dimitri Soccol ,  Youri Victorovitch Ponomarev ,  David van Steenwinckel

IPC: G01N27/02

CPC classification number: G01N33/004 ,  G01N22/00 ,  G01N27/02 ,  Y02A50/243 ,  Y02A50/244 ,  Y02A50/248 ,  Y10T436/20 ,  Y10T436/204998

Abstract: An integrated circuit arrangement (100) is disclosed comprising a substrate (210); and a gas such as a CO2 sensor comprising spatially separated electrodes including at least an excitation electrode (132) and a sensing electrode (142); a volume (120) in contact with said pair of electrodes, said volume including a chemical compound for forming a reaction product with said gas in an acid-base reaction; a signal generator (212) conductively coupled to the excitation electrode and adapted to provide the excitation electrode with a microwave signal; and a signal detector (214) conductively coupled to the sensing electrode and adapted to detect a change in said microwave signal caused by a permittivity change in said volume, said permittivity change being caused by said reaction product. A device comprising such an IC arrangement and a method of sensing the presence of a gas using such an IC arrangement are also disclosed.

Abstract translation: 公开了一种集成电路装置（100），其包括衬底（210）; 以及诸如CO 2传感器的气体，其包括至少包括激励电极（132）和感测电极（142）的空间分离的电极; 与所述一对电极接触的体积（120），所述体积包括用于在酸碱反应中与所述气体形成反应产物的化合物; 导电耦合到激励电极并且适于向激励电极提供微波信号的信号发生器（212）; 以及信号检测器（214），其传导耦合到感测电极并且适于检测由所述体积的介电常数变化引起的所述微波信号的变化，所述介电常数变化是由所述反应产物引起的。 还公开了包括这种IC装置的装置和使用这种IC装置来感测气体的存在的方法。

公开(公告)号：US20140159173A1

公开(公告)日：2014-06-12

申请号：US14171975

申请日：2014-02-04

Applicant: NXP B.V.

Inventor： David van Steenwinckel ,  Thomas Merelle ,  Franciscus Petrus Widdershoven ,  Viet Hoang Nguyen ,  Dimitri Soccoi ,  Jan Leo Dominique Fransaer

IPC: G01N27/414

CPC classification number: G01N27/4145 ,  G01N27/3275 ,  H01L29/66

Abstract: A method of manufacturing a biosensor semiconductor device in which copper electrodes at a major surface of the device are modified to form Au—Cu alloy electrodes. Such modification is effected by depositing a gold layer over the device, and then thermally treating the device to promote interdiffusion between the gold and the electrode copper. Alloyed gold-copper is removed from the surface of the device, leaving the exposed electrodes. The electrodes are better compatible with further processing into a biosensor device than is the case with conventional copper electrodes, and the process windows are wider than for gold capped copper electrodes. A biosensor semiconductor device having Au—Cu alloy electrodes is also disclosed.

Abstract translation: 一种制造生物传感器半导体器件的方法，其中在器件的主表面上的铜电极被改性以形成Au-Cu合金电极。 通过在器件上沉积金层，然后对该器件进行热处理以促进金和电极铜之间的相互扩散来实现这种修改。 从器件的表面去除合金金铜，留下暴露的电极。 与常规铜电极的情况相比，电极与生物传感器装置的进一步处理更好地兼容，并且处理窗口比金盖铜电极宽。 还公开了具有Au-Cu合金电极的生物传感器半导体器件。