公开(公告)号：US20190128823A1

公开(公告)日：2019-05-02

申请号：US16094547

申请日：2016-04-21

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Yoav BERLATZKY ,  Valery DEICH ,  Dror SHAFIR ,  Danny GROSSMAN

IPC: G01N21/956 ,  G01N21/95 ,  G01N21/88 ,  G01B9/02

CPC classification number: G01N21/956 ,  G01B9/02007 ,  G01B9/02022 ,  G01B2210/56 ,  G01N21/8806 ,  G01N21/9501

Abstract: A measurement system is presented for use in metrology measurements on patterned samples. The system comprises: at least one light source device configured to generate broadband light, at least one detection device configured to provide spectral information of detected light, and an optical system. The optical system comprises at least an oblique channel system for directing incident light generated by the light source(s) along an oblique illumination channel onto a measurement plane, on which a sample is to be located, and directing broadband light specularly reflected from the sample along a collection channel to the detection device(s). The optical system further comprises an interferometric unit comprising a beam splitting/combining device and a reference reflector device. The beam splitting/combining device is accommodated in the illumination and collection channels and divides light propagating in the illumination channel into sample and reference light beams propagating in sample and reference paths, and combines reflected

公开(公告)号：US20210396511A1

公开(公告)日：2021-12-23

申请号：US17309318

申请日：2019-11-17

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Elad DOTAN ,  Moshe VANHOTSKER ,  Shimon YALOV ,  Valery DEICH ,  Roi RINGEL ,  Beni SHULMAN ,  Yossi BAR ON ,  Shahar BASSON

IPC: G01B11/02 ,  G01B5/00 ,  G01N21/956

Abstract: A measurement system is presented configured for integration with a processing equipment for applying optical measurements to a structure. The measurement system comprises: a support assembly for holding a structure under measurements in a measurement plane, configured and operable for rotation in a plane parallel to the measurement plane and for movement along a first lateral axis in said measurement plane; an optical system defining illumination and collection light channels of normal and oblique optical schemes and comprising an optical head comprising at least three lens units located in the illumination and collection channels; a holder assembly comprising: a support unit for carrying the optical head, and a guiding unit for guiding a sliding movement of the support unit along a path extending along a second lateral axis perpendicular to said first lateral axis; and an optical window arrangement comprising at least three optical windows made in a faceplate located between the optical head at a certain distance from the measurement plane. The optical windows are aligned with the illumination and collection channels for, respectively, propagation of illuminating light from the optical head and propagation of light returned from an illuminated region to the optical head, in accordance with the normal and oblique optical schemes.