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公开(公告)号：US09360763B2
公开(公告)日：2016-06-07
申请号：US14486305
申请日：2014-09-15
申请人： NIKON CORPORATION
发明人： Yasuhiro Omura , Takaya Okada , Hiroyuki Nagasaka
CPC分类号： G03F7/70725 , G02B1/06 , G02B17/08 , G02B17/0892 , G02B21/33 , G03F7/702 , G03F7/70225 , G03F7/70341
摘要： An immersion projection optical system having, for example, a catadioptric and off-axis structure, reduces the portion of an image space filled with liquid (immersion liquid). The projection optical system, which projects a reduced image of a first plane onto a second plane through the liquid, includes a refractive optical element (Lp) arranged nearest to the second plane. The refractive optical element includes a light emitting surface (Lpb) shaped to be substantially symmetric with respect to two axial directions (XY-axes) perpendicular to each other on the second plane. The light emitting surface has a central axis (Lpba) that substantially coincides with a central axis (40a) of a circle (40) corresponding to a circumference of a light entering surface (Lpa) of the refractive optical element. The central axis of the light emitting surface is decentered in one of the two axial directions (Y-axis) from an optical axis (AX).
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公开(公告)号：US09316921B2
公开(公告)日：2016-04-19
申请号：US14070021
申请日：2013-11-01
申请人： NIKON CORPORATION
CPC分类号： G03F7/70875 , G03F7/2041 , G03F7/70341 , G03F7/7075 , G03F7/70891
摘要： An exposure apparatus exposes a substrate by irradiating exposure light on the substrate through liquid. The exposure apparatus has a substrate holder for holding the substrate, a substrate stage capable of moving the substrate held by the substrate holder, and a temperature adjusting system for adjusting the temperature of the substrate holder. The temperature of the substrate is controlled so that there is no difference in temperature between the substrate and the liquid, thereby preventing a reduction in exposure accuracy resulting from variation in temperature of the liquid.
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公开(公告)号：US09310696B2
公开(公告)日：2016-04-12
申请号：US14486216
申请日：2014-09-15
申请人： NIKON CORPORATION
发明人： Yasuhiro Omura , Takaya Okada , Hiroyuki Nagasaka
CPC分类号： G03F7/70725 , G02B1/06 , G02B17/08 , G02B17/0892 , G02B21/33 , G03F7/702 , G03F7/70225 , G03F7/70341
摘要： An immersion projection optical system having, for example, a catadioptric and off-axis structure, reduces the portion of an image space filled with liquid (immersion liquid). The projection optical system, which projects a reduced image of a first plane onto a second plane through the liquid, includes a refractive optical element (Lp) arranged nearest to the second plane. The refractive optical element includes a light emitting surface (Lpb) shaped to be substantially symmetric with respect to two axial directions (XY-axes) perpendicular to each other on the second plane. The light emitting surface has a central axis (Lpba) that substantially coincides with a central axis (40a) of a circle (40) corresponding to a circumference of a light entering surface (Lpa) of the refractive optical element. The central axis of the light emitting surface is decentered in one of the two axial directions (Y-axis) from an optical axis (AX).
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公开(公告)号：US09904174B2
公开(公告)日：2018-02-27
申请号：US14227726
申请日：2014-03-27
申请人： Nikon Corporation
发明人： Yasuhiro Omura
IPC分类号： G02B17/00 , G03F7/20 , G02B9/34 , G02B17/08 , H01L21/027
摘要： A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.
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公开(公告)号：US09823588B2
公开(公告)日：2017-11-21
申请号：US15151123
申请日：2016-05-10
申请人： NIKON CORPORATION
发明人： Yasuhiro Omura , Takaya Okada , Hiroyuki Nagasaka
摘要： An immersion projection optical system having, for example, a catadioptric and off-axis structure, reduces the portion of an image space filled with liquid (immersion 5 liquid), The projection optical system, which projects a reduced image of a first plane onto a second plane through the liquid, includes a refractive optical element (Lp) arranged nearest to the second plane. The refractive optical element includes a light emitting surface (Lpb) shaped to be substantially symmetric with respect to two axial directions (XY·axes) perpendicular to each other on the second plane. The light emitting surface has a central axis (Lpba) that substantially coincides with a central axis (40a) of a circle (40) corresponding to a circumference of a light entering surface (Lpa) of the refractive optical element. The central axis of the light emitting surface is decentered in one of the two axial directions (Y˜axis) from an optical axis (AX).
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公开(公告)号：US09606443B2
公开(公告)日：2017-03-28
申请号：US14227691
申请日：2014-03-27
申请人： Nikon Corporation
发明人： Yasuhiro Omura
IPC分类号： G02B17/00 , G03F7/20 , G02B9/34 , G02B17/08 , H01L21/027
CPC分类号： G03F7/7015 , G02B9/34 , G02B17/0844 , G03F7/70225 , G03F7/70341 , H01L21/027
摘要： A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.
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公开(公告)号：US09442360B2
公开(公告)日：2016-09-13
申请号：US13889780
申请日：2013-05-08
申请人： Nikon Corporation
发明人： Yasuhiro Omura
摘要： A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.
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公开(公告)号：US09933705B2
公开(公告)日：2018-04-03
申请号：US14227726
申请日：2014-03-27
申请人： Nikon Corporation
发明人： Yasuhiro Omura
IPC分类号： G02B17/00 , G03F7/20 , G02B9/34 , G02B17/08 , H01L21/027
CPC分类号： G03F7/7015 , G02B9/34 , G02B17/0844 , G03F7/70225 , G03F7/70341 , H01L21/027
摘要： A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.
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公开(公告)号：US09891539B2
公开(公告)日：2018-02-13
申请号：US15151123
申请日：2016-05-10
申请人： NIKON CORPORATION
发明人： Yasuhiro Omura , Takaya Okada , Hiroyuki Nagasaka
CPC分类号： G03F7/70725 , G02B1/06 , G02B17/08 , G02B17/0892 , G02B21/33 , G03F7/702 , G03F7/70225 , G03F7/70341
摘要： An immersion projection optical system having, for example, a catadioptric and off-axis structure, reduces the portion of an image space filled with liquid (immersion 5 liquid), The projection optical system, which projects a reduced image of a first plane onto a second plane through the liquid, includes a refractive optical element (Lp) arranged nearest to the second plane. The refractive optical element includes a light emitting surface (Lpb) shaped to be substantially symmetric with respect to two axial directions (XY·axes) perpendicular to each other on the second plane. The light emitting surface has a central axis (Lpba) that substantially coincides with a central axis (40a) of a circle (40) corresponding to a circumference of a light entering surface (Lpa) of the refractive optical element. The central axis of the light emitting surface is decentered in one of the two axial directions (Y˜axis) from an optical axis (AX).
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公开(公告)号：US09500943B2
公开(公告)日：2016-11-22
申请号：US13889780
申请日：2013-05-08
申请人： Nikon Corporation
发明人： Yasuhiro Omura
CPC分类号： G03B27/522 , G02B17/08 , G02B17/0812 , G02B17/0828 , G02B17/0844 , G02B17/0892 , G03F7/70225 , G03F7/70341
摘要： A projection objective includes at least four curved mirrors, which include a first curved mirror that is a most optically forward mirror and a second curved mirror that is a second most optically forward mirror, as defined along a light path. In addition, an intermediate lens element is disposed physically between the first and second mirrors, the intermediate lens element being a single pass type lens. The objective forms an image with a numerical aperture of at least substantially 1.0 in immersion.
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