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公开(公告)号：US20080237654A1
公开(公告)日：2008-10-02
申请号：US10592848
申请日：2005-03-04
IPC分类号： H01L27/088 , G01N7/00
CPC分类号： G01N27/4143 , H01L2924/0002 , H01L2924/00
摘要： A device for detecting a gas or gas mixture having at least one first gas sensor designed as an SGFET and at least—one second, additional gas sensor designed as a Lundström-FET. The gas sensors are connected to a processing device designed to analyze the measurement signals from both types of gas sensors in order to detect the gas or gas mixture.
摘要翻译： 一种用于检测气体或气体混合物的装置，其具有设计为SGFET的至少一个第一气体传感器和设计为Lundström-FET的至少一个第二附加气体传感器。 气体传感器连接到设计用于分析来自两种类型的气体传感器的测量信号的处理装置，以便检测气体或气体混合物。
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公开(公告)号：US07554135B2
公开(公告)日：2009-06-30
申请号：US10592848
申请日：2005-03-04
IPC分类号： H01L23/58
CPC分类号： G01N27/4143 , H01L2924/0002 , H01L2924/00
摘要： A device for detecting a gas or gas mixture having at least one first gas sensor designed as an SGFET and at least—one second, additional gas sensor designed as a Lundström-FET. The gas sensors are connected to a processing device designed to analyze the measurement signals from both types of gas sensors in order to detect the gas or gas mixture.
摘要翻译： 一种用于检测气体或气体混合物的装置，其具有设计为SGFET的至少一个第一气体传感器和设计为Lundström-FET的至少一个第二附加气体传感器。 气体传感器连接到设计用于分析来自两种类型的气体传感器的测量信号的处理装置，以便检测气体或气体混合物。
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公开(公告)号：US20090078026A1
公开(公告)日：2009-03-26
申请号：US12142292
申请日：2008-06-19
IPC分类号： G01N27/00
CPC分类号： G01N27/4143
摘要： A gas sensor has at least one gas sensitive layer, which has at least one surface area in which the work function is dependent upon the concentration of a target gas capable of being brought into contact with the surface zone. At least one electric potential sensor is capacitatively coupled to the surface zone over an air gap. The surface zone of the gas sensitive layer is covered with an electrically insulating coating which is inert to the target gas and which is adhesively bound to the gas sensitive layer. The coating is configured so that it is permeable to the target gas and so that when the target gas contacts the surface zone of the gas sensitive layer, it prevents or at least impedes an alteration of the bound state of atoms and/or molecules bound to the surface zone and differing from the target gas.
摘要翻译： 气体传感器具有至少一个气体敏感层，其具有至少一个表面积，其中功函数取决于能够与表面区域接触的目标气体的浓度。 至少一个电位传感器通过气隙电容耦合到表面区域。 气体敏感层的表面区域被对目标气体呈惰性的电绝缘涂层覆盖，并且粘合到气敏层上。 涂层被配置成使得其对目标气体是可渗透的，并且当目标气体接触气敏层的表面区域时，其防止或至少阻止了结合到的原子和/或分子的结合状态的改变 表面区域和目标气体不同。
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4.发明授权Device for detection of a gas or gas mixture and method for manufacturing such a device 有权用于检测气体或气体混合物的装置及其制造方法公开(公告)号：US08242545B2
公开(公告)日：2012-08-14
申请号：US12765339
申请日：2010-04-22
IPC分类号： G01N27/403
CPC分类号： G01N27/4143
摘要： A device for detecting a gas or gas mixture has a first and a second gas sensor. The first gas sensor is a MOSFET, which comprises a first source, a first drain, a first channel zone disposed between the latter elements, and a first gas sensitive layer capacitively coupled to the first channel zone that contains palladium and reacts to a change in the concentration of the gas to be detected with a change in its work function. The second gas sensor has, in a semiconductor substrate, a second source, a second drain, and a second channel zone between the latter elements, which is capacitively coupled via an air gap to a suspended gate. The latter comprises a second gas sensitive layer that reacts to a change in the concentration of the gas to be detected with a change in its work function. The second gas sensitive layer is arranged on a support layer and faces the air gap. The support layer is formed by another semiconductor substrate, and the first gas sensor is integrated in the front side of the second semiconductor substrate facing away from the air gap.
摘要翻译： 用于检测气体或气体混合物的装置具有第一和第二气体传感器。 第一气体传感器是MOSFET，其包括第一源极，第一漏极，设置在后一个元件之间的第一沟道区，以及电容耦合到第一沟道区的第一气体敏感层，所述第一气体敏感层包含钯并且反应于 随着工作功能的变化，要检测的气体的浓度。 第二气体传感器在半导体衬底中具有在后一个元件之间的第二源极，第二漏极和第二沟道区域，其经由空气间隙电容耦合到悬浮栅极。 后者包括第二气体敏感层，其随着其功能的变化而响应待检测气体的浓度的变化。 第二气体敏感层布置在支撑层上并面向气隙。 支撑层由另一个半导体衬底形成，并且第一气体传感器集成在第二半导体衬底的远离气隙的前侧。
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5.发明申请Monolithic arrangement, especially an integrated circuit, with a floating electrode 审中-公开整体布置，特别是具有浮动电极的集成电路公开(公告)号：US20070047172A1
公开(公告)日：2007-03-01
申请号：US11503343
申请日：2006-08-09
IPC分类号： H01G4/255
CPC分类号： H01L23/5222 , H01L2924/0002 , H01L2924/00
摘要： The invention relates to a monolithic arrangement, especially an integrated circuit (IC), with a floating electrode (FE), at least one conductor track (ML) for connecting the floating electrode (FE) to a system component (MS) inside the monolithic arrangement, a plurality of other conductor tracks (L) at least temporarily conducting potential in order to carry signals or currents between components (MS, GND), structures and/or contacts (K), and an insulator (IS) for electrical insulating of the conductor track (ML) and the other conductor tracks (L) from each other, wherein one layout of the conductor track (ML) and of the other conductor tracks (L) is such that the path of the conductor track (ML) does not cross the path of any of the conductor tracks (L). It is advisable to maintain a minimum distance between the measuring conductor track and the other conductor tracks.
摘要翻译： 本发明涉及一种具有浮动电极（FE）的集成电路（IC），至少一个用于将浮动电极（FE）与系统组件（MS）连接在单片 布置，至少临时传导电位以便在组件（MS，GND），结构和/或触点（K）之间传送信号或电流的多个其它导体轨道（L）和用于电绝缘的绝缘体（IS） 所述导体轨道（ML）和所述另一个导体轨道（L）彼此之间，其中所述导体轨道（ML）和所述另一个导体轨道（L）的一个布局使得所述导体轨迹（ML）的路径 不穿过任何导体轨迹（L）的路径。 建议在测量导体轨道和其他导体轨道之间保持最小距离。
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公开(公告)号：US08226892B2
公开(公告)日：2012-07-24
申请号：US12411163
申请日：2009-03-25
CPC分类号： G01N27/4143 , G01N33/005 , G01N33/0059
摘要： A gas sensor has a gas-sensitive layer with a surface area where the electron affinity depends on the concentration of a target gas brought in contact with the surface area. An electrical potential sensor is capacitively coupled to the surface area via an air gap. The surface area of the gas-sensitive layer is covered by an electric insulating layer that is inert to the target gas and is bonded to the gas-sensitive layer. The coating is designed in such a way that it is permeable for the target gas and a different, non-target gas that can be adsorbed on the surface area. The coating has different diffusion constants for the target gas and the non-target gas. The diffusion constants are coordinated with each other in such a way that the sensitivity of the gas sensor to the target gas increases when the target gas concentration exceeds a predetermined concentration threshold in the presence of the non-target gas.
摘要翻译： 气体传感器具有气体敏感层，其具有表面积，其中电子亲和力取决于与表面积接触的目标气体的浓度。 电位传感器通过气隙电容耦合到表面区域。 气敏层的表面积被对目标气体惰性并与气敏层接合的电绝缘层覆盖。 涂层的设计使得其可以渗透目标气体和可吸附在表面区域上的不同的非目标气体。 涂层对于目标气体和非目标气体具有不同的扩散常数。 扩散常数彼此协调，使得当在非目标气体存在时目标气体浓度超过预定浓度阈值时，气体传感器对目标气体的灵敏度增加。
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公开(公告)号：US07918123B2
公开(公告)日：2011-04-05
申请号：US12142292
申请日：2008-06-19
IPC分类号： G01N9/00
CPC分类号： G01N27/4143
摘要： A gas sensor has at least one gas sensitive layer, which has at least one surface area in which the work function is dependent upon the concentration of a target gas capable of being brought into contact with the surface zone. At least one electric potential sensor is capacitatively coupled to the surface zone over an air gap. The surface zone of the gas sensitive layer is covered with an electrically insulating coating which is inert to the target gas and which is adhesively bound to the gas sensitive layer. The coating is configured so that it is permeable to the target gas and so that when the target gas contacts the surface zone of the gas sensitive layer, it prevents or at least impedes an alteration of the bound state of atoms and/or molecules bound to the surface zone and differing from the target gas.
摘要翻译： 气体传感器具有至少一个气体敏感层，其具有至少一个表面积，其中功函数取决于能够与表面区域接触的目标气体的浓度。 至少一个电位传感器通过气隙电容耦合到表面区域。 气体敏感层的表面区域被对目标气体呈惰性的电绝缘涂层覆盖，并且粘合到气敏层上。 涂层被配置成使得其对目标气体是可渗透的，并且当目标气体接触气敏层的表面区域时，其防止或至少阻止了结合到的原子和/或分子的结合状态的改变 表面区域和目标气体不同。
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公开(公告)号：US20090272175A1
公开(公告)日：2009-11-05
申请号：US12411132
申请日：2009-03-25
IPC分类号： G01N25/00
CPC分类号： G01N27/4143
摘要： In a procedure for measuring the concentration of a target gas, a gas sensor is provided whose sensor signal at constant temperature is dependent on a target gas concentration and has a lower measurement sensitivity in a first modulation range than in a second modulation range. The position of the modulation ranges is dependent on the temperature. The temperature of the gas sensor is controlled so that the sensor signal is essentially independent of the target gas concentration and lies within the second modulation range. The temperature of the gas sensor is then a measurement for the target gas concentration.
摘要翻译： 在用于测量目标气体浓度的过程中，提供了一种气体传感器，其传感器信号在恒定温度下取决于目标气体浓度，并且在第一调制范围内具有比在第二调制范围中更低的测量灵敏度。 调制范围的位置取决于温度。 控制气体传感器的温度，使得传感器信号基本上与目标气体浓度无关，并且处于第二调制范围内。 然后，气体传感器的温度是目标气体浓度的测量。
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公开(公告)号：US20090246084A1
公开(公告)日：2009-10-01
申请号：US12411163
申请日：2009-03-25
IPC分类号： G01N27/22
CPC分类号： G01N27/4143 , G01N33/005 , G01N33/0059
摘要： A gas sensor has a gas-sensitive layer with a surface area where the electron affinity depends on the concentration of a target gas brought in contact with the surface area. An electrical potential sensor is capacitively coupled to the surface area via an air gap. The surface area of the gas-sensitive layer is covered by an electric insulating layer that is inert to the target gas and is bonded to the gas-sensitive layer. The coating is designed in such a way that it is permeable for the target gas and a different, non-target gas that can be adsorbed on the surface area. The coating has different diffusion constants for the target gas and the non-target gas. The diffusion constants are coordinated with each other in such a way that the sensitivity of the gas sensor to the target gas increases when the target gas concentration exceeds a predetermined concentration threshold in the presence of the non-target gas.
摘要翻译： 气体传感器具有气体敏感层，其具有表面积，其中电子亲和力取决于与表面积接触的目标气体的浓度。 电位传感器通过气隙电容耦合到表面区域。 气敏层的表面积被对目标气体惰性并与气敏层接合的电绝缘层覆盖。 涂层的设计使得其可以渗透目标气体和可吸附在表面区域上的不同的非目标气体。 涂层对于目标气体和非目标气体具有不同的扩散常数。 扩散常数彼此协调，使得当在非目标气体存在时目标气体浓度超过预定浓度阈值时，气体传感器对目标气体的灵敏度增加。
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公开(公告)号：US08056394B2
公开(公告)日：2011-11-15
申请号：US12411132
申请日：2009-03-25
IPC分类号： G01N25/00
CPC分类号： G01N27/4143
摘要： In a procedure for measuring the concentration of a target gas, a gas sensor is provided whose sensor signal at constant temperature is dependent on a target gas concentration and has a lower measurement sensitivity in a first modulation range than in a second modulation range. The position of the modulation ranges is dependent on the temperature. The temperature of the gas sensor is controlled so that the sensor signal is essentially independent of the target gas concentration and lies within the second modulation range. The temperature of the gas sensor is then a measurement for the target gas concentration.
摘要翻译： 在用于测量目标气体浓度的过程中，提供了一种气体传感器，其传感器信号在恒定温度下取决于目标气体浓度，并且在第一调制范围内具有比在第二调制范围中更低的测量灵敏度。 调制范围的位置取决于温度。 控制气体传感器的温度，使得传感器信号基本上与目标气体浓度无关，并且处于第二调制范围内。 然后，气体传感器的温度是目标气体浓度的测量。
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