公开(公告)号：US20110288674A1

公开(公告)日：2011-11-24

申请号：US13112719

申请日：2011-05-20

申请人： Isao Sugaya ,  Satoru Sanada ,  Hidehiro Maeda ,  Masahiro Yoshihashi ,  Mikio Ushijima

发明人： Isao Sugaya ,  Satoru Sanada ,  Hidehiro Maeda ,  Masahiro Yoshihashi ,  Mikio Ushijima

IPC分类号： G06F17/00 ,  B23Q7/00 ,  B23Q3/00

CPC分类号： H01L21/67092 ,  H01L21/67276 ,  H01L21/67294 ,  Y10T29/49998

摘要： Management of the holding member that holds the semiconductor substrate is efficiently implemented. Provided is a holding member management apparatus that manages a substrate holding member that holds a semiconductor substrate in a manufacturing apparatus that manufactures a stacked semiconductor apparatus by joining a plurality of semiconductor substrates; comprising a history storing part that stores the usage history of the substrate holding member in association with identification information that specifies the substrate holding member and a holding member specifying part that specifies and outputs identification information of the substrate holding member whose usage is to be suspended based on the usage history stored in the history storing part.

摘要翻译： 有效地实施保持半导体基板的保持构件的管理。 提供一种保持构件管理装置，其通过接合多个半导体衬底来管理在制造半导体装置的制造装置中保持半导体衬底的衬底保持构件; 包括历史存储部分，其与用于指定基板保持部件的识别信息相关联地存储基板保持部件的使用历史;以及保持部件指定部，其指定并输出其使用被暂停的基板保持部件的识别信息 关于存储在历史存储部分中的使用历史。

公开(公告)号：US09240339B2

公开(公告)日：2016-01-19

申请号：US14050697

申请日：2013-10-10

申请人： Hidehiro Maeda ,  Masahiro Yoshihashi

发明人： Hidehiro Maeda ,  Masahiro Yoshihashi

IPC分类号： H01L21/683 ,  H01L21/687 ,  H01L21/677

CPC分类号： H01L21/6831 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/68771

摘要： A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.

公开(公告)号：US20140036403A1

公开(公告)日：2014-02-06

申请号：US14050697

申请日：2013-10-10

申请人： Masahiro Yoshihashi ,  Hidehiro Maeda

发明人： Hidehiro Maeda ,  Masahiro Yoshihashi

IPC分类号： H01L21/683

CPC分类号： H01L21/6831 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/68771

摘要： A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.

摘要翻译： 在保持基板的状态下，可靠地输送基板保持架。 提供了一种用于通过由外部源提供的电力产生的静电力来保持基板的基板保持器。 在保持基板的状态下输送基板支架。 衬底保持器包括：具有放置在其上的衬底的保持器主体和通过保持器主体外部暴露的连接器端子，其中连接器端子可附接到外部电源端子并可从其拆卸。 还提供了一种用于通过由从外部源供给的电力产生的静电力来运送保持基板的基板保持架的基板输送装置。 基板输送装置包括：放置部，其具有放置基板保持件的放置面，放置部保持基板保持件;电源端子，其向放置面放置的基板保持器供电。

公开(公告)号：US08570704B2

公开(公告)日：2013-10-29

申请号：US12879779

申请日：2010-09-10

申请人： Hidehiro Maeda ,  Masahiro Yoshihashi

发明人： Hidehiro Maeda ,  Masahiro Yoshihashi

IPC分类号： H01T23/00

CPC分类号： H01L21/6831 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/68771

摘要： A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.

摘要翻译： 在保持基板的状态下，可靠地输送基板保持架。 提供了一种用于通过由外部源提供的电力产生的静电力来保持基板的基板保持器。 在保持基板的状态下输送基板支架。 衬底保持器包括：具有放置在其上的衬底的保持器主体和通过保持器主体外部暴露的连接器端子，其中连接器端子可附接到外部电源端子并可从其拆卸。 还提供了一种用于通过由从外部源供给的电力产生的静电力来运送保持基板的基板保持架的基板输送装置。 基板输送装置包括：放置部，其具有放置基板保持件的放置面，放置部保持基板保持件;电源端子，其向放置面放置的基板保持器供电。

公开(公告)号：US20110007447A1

公开(公告)日：2011-01-13

申请号：US12879779

申请日：2010-09-10

申请人： Hidehiro MAEDA ,  Masahiro Yoshihashi

发明人： Hidehiro MAEDA ,  Masahiro Yoshihashi

IPC分类号： H01L21/683

CPC分类号： H01L21/6831 ,  H01L21/67742 ,  H01L21/67766 ,  H01L21/68771

摘要： A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.

摘要翻译： 在保持基板的状态下，可靠地输送基板保持架。 提供了一种用于通过由外部源提供的电力产生的静电力来保持基板的基板保持器。 在保持基板的状态下输送基板支架。 衬底保持器包括：具有放置在其上的衬底的保持器主体和通过保持器主体外部暴露的连接器端子，其中连接器端子可附接到外部电源端子并且可从外部电源端子拆卸。 还提供了一种用于通过由从外部源供给的电力产生的静电力来运送保持基板的基板保持架的基板输送装置。 基板输送装置包括：放置部，其具有放置基板保持件的放置面，放置部保持基板保持件;电源端子，其向放置面放置的基板保持器供电。

公开(公告)号：US06305846B1

公开(公告)日：2001-10-23

申请号：US09639340

申请日：2000-08-16

申请人： Hidekazu Michioka ,  Katsuya Iida ,  Masahiro Yoshihashi ,  Hiroaki Mochizuki ,  Tadashi Hirokawa

发明人： Hidekazu Michioka ,  Katsuya Iida ,  Masahiro Yoshihashi ,  Hiroaki Mochizuki ,  Tadashi Hirokawa

IPC分类号： F16C2906

CPC分类号： F16C29/0642 ,  F16C29/0607 ,  F16C29/0609 ,  F16C29/0611 ,  F16C29/0635 ,  F16C29/065 ,  F16C29/0692 ,  F16C29/0695 ,  F16C33/3825 ,  F16C33/506

摘要： A linear motion guiding apparatus comprises a guide rail provided with a ball running groove, and a movable block movably arranged along the guide rail through balls. The movable block is provided with a ball running counter-groove, a ball returning passage arranged away from the ball running counter-groove and direction changing passages for connecting these members. A resin-formed body for forming a ball circulation passage comprises a pair of ball passage forming portions, a returning passage forming portion and a pair of direction changing passage-inner guide forming portions. The resin-formed body is separately formed from a body of the movable block. At least two portions of (a) the ball passage forming portions, (b) the returning passage forming portion, (c) one of the direction changing passage-inner guide forming portions and (d) another of the of direction changing passage-inner guide forming portions are connected with each other through integral forming so that the resin-formed body can be built in the body of the movable block.

摘要翻译： 线性运动引导装置包括设置有滚珠行进槽的导轨和沿着导轨通过滚珠可移动地设置的可动块。 可动块设置有球运行的相对槽，与球运行的相对槽相隔离的球返回通道和用于连接这些构件的方向转换通道。 用于形成球循环通道的树脂成型体包括一对球通道形成部分，返回通道形成部分和一对方向改变通道 - 内部引导件形成部分。 树脂成型体与可动块的主体分开形成。 （a）球通道形成部分的至少两部分，（b）返回通道形成部分，（c）方向改变通道 - 内部引导件形成部分之一和（d）方向改变通道内部 引导形成部分通过整体成型彼此连接，使得树脂成形体可以内置在可动块的主体中​​。

公开(公告)号：US08932432B2

公开(公告)日：2015-01-13

申请号：US13594151

申请日：2012-08-24

申请人： Keiichi Tanaka ,  Masahiro Yoshihashi

发明人： Keiichi Tanaka ,  Masahiro Yoshihashi

IPC分类号： B32B38/10 ,  H01L21/67

CPC分类号： H01L21/67092 ,  H01L21/67748 ,  H01L21/68742 ,  Y10S156/932 ,  Y10S156/943 ,  Y10T156/11 ,  Y10T156/1132 ,  Y10T156/1168 ,  Y10T156/1179 ,  Y10T156/1189 ,  Y10T156/19 ,  Y10T156/1944 ,  Y10T156/1972 ,  Y10T156/1983

摘要： A substrate separating method includes: holding, in a predetermined position, a substrate sandwiched between a first holder and a second holder opposed to each other; and relatively moving the first holder and the second holder while the substrate is held in the predetermined position. In holding the substrate, the substrate may be held in the predetermined position by effecting a pressurizing force or a suction force onto the substrate. Also in holding the substrate, the substrate may be held in contact with one of the first holder and the second holder.

摘要翻译： 衬底分离方法包括：在预定位置保持夹在第一保持器和彼此相对的第二保持器之间的衬底; 并且当所述基板保持在所述预定位置时相对移动所述第一保持器和所述第二保持器。 在保持基板时，通过对基板施加加压力或吸力将基板保持在预定位置。 同样在保持基板的同时，基板可以保持与第一保持器和第二保持器中的一个保持接触。

公开(公告)号：US06524003B2

公开(公告)日：2003-02-25

申请号：US09906854

申请日：2001-07-18

申请人： Hidekazu Michioka ,  Katsuya Iida ,  Masahiro Yoshihashi ,  Hiroaki Mochizuki ,  Tadashi Hirokawa

发明人： Hidekazu Michioka ,  Katsuya Iida ,  Masahiro Yoshihashi ,  Hiroaki Mochizuki ,  Tadashi Hirokawa

IPC分类号： F16C2906

CPC分类号： F16C29/0642 ,  F16C29/0607 ,  F16C29/0609 ,  F16C29/0611 ,  F16C29/0635 ,  F16C29/065 ,  F16C29/0692 ,  F16C29/0695 ,  F16C33/3825 ,  F16C33/506

摘要： A linear motion guiding apparatus comprises a guide rail provided with a ball running groove, and a movable block movably arranged along the guide rail through balls. The movable block is provided with a ball running counter-groove, a ball returning passage arranged away from the ball running counter-groove and direction changing passages for connecting these members. A resin-formed body for forming a ball circulation passage comprises a pair of ball passage forming portions, a returning passage forming portion and a pair of direction changing passage-inner guide forming portions. The resin-formed body is separately formed from a body of the movable block. At least two portions of (a) the ball passage forming portions, (b) the returning passage forming portion, (c) one of the direction changing passage-inner guide forming portions and (d) another of the of direction changing passage-inner guide forming portions are connected with each other through integral forming so that the resin-formed body can be built in the body of the movable block.

摘要翻译： 线性运动引导装置包括设置有滚珠行进槽的导轨和沿着导轨通过滚珠可移动地设置的可动块。 可动块设置有球运行的相对槽，与球运行的相对槽相隔离的球返回通道和用于连接这些构件的方向转换通道。 用于形成球循环通道的树脂成型体包括一对球通道形成部分，返回通道形成部分和一对方向改变通道 - 内部引导件形成部分。 树脂成型体与可动块的主体分开形成。 （a）球通道形成部分的至少两部分，（b）返回通道形成部分，（c）方向改变通道 - 内部引导件形成部分之一和（d）方向改变通道内部 引导形成部分通过整体成型彼此连接，使得树脂成形体可以内置在可动块的主体中​​。

公开(公告)号：US6132093A

公开(公告)日：2000-10-17

申请号：US088491

申请日：1998-06-02

申请人： Hidekazu Michioka ,  Katsuya Iida ,  Masahiro Yoshihashi ,  Hiroaki Mochizuki ,  Tadashi Hirokawa

发明人： Hidekazu Michioka ,  Katsuya Iida ,  Masahiro Yoshihashi ,  Hiroaki Mochizuki ,  Tadashi Hirokawa

IPC分类号： F16C29/06 ,  F16C33/38 ,  F16C33/46

CPC分类号： F16C29/0642 ,  F16C29/0607 ,  F16C29/065 ,  F16C29/0692 ,  F16C33/3825 ,  F16C33/506 ,  F16C29/0609 ,  F16C29/0611 ,  F16C29/0635 ,  F16C29/0695

摘要： A linear motion guiding apparatus comprises a guide rail provided with a ball running groove, and a movable block movably arranged along the guide rail through balls. The movable block is provided with a ball running counter-groove, a ball returning passage arranged away from the ball running counter-groove and direction changing passages for connecting these members. A resin-formed body for forming a ball circulation passage comprises a pair of ball passage forming portions, a returning passage forming portion and a pair of direction changing passage-inner guide forming portions. The resin-formed body is separately formed from a body of the movable block. At least two portions of (a) the ball passage forming portions, (b) the returning passage forming portion, (c) one of the direction changing passage-inner guide forming portions and (d) another of the of direction changing passage-inner guide forming portions are connected with each other through integral forming so that the resin-formed body can be built in the body of the movable block.

公开(公告)号：US06510660B1

公开(公告)日：2003-01-28

申请号：US09707733

申请日：2000-11-07

申请人： Hidekazu Michioka ,  Masashi Konomoto ,  Masahiro Yoshihashi ,  Yoshihito Watanabe

发明人： Hidekazu Michioka ,  Masashi Konomoto ,  Masahiro Yoshihashi ,  Yoshihito Watanabe

IPC分类号： E04H902

CPC分类号： E04H9/02 ,  E04H2009/026

摘要： A damping device receiving viscous fluid in an annular gap between a housing and a rotary member within the housing and converting a dynamic energy of the rotary member into a thermal energy is provided. The damping device is constructed to make it possible to move a sealing unit for sealing the annular gap in response to a pressure of the viscous fluid, to change the volume of the annular gap to suppress an adverse affect concomitant with the pressure increase of the viscous fluid to the sealing unit and to enhance reliability and durability of the damping device.

摘要翻译： 提供一种阻尼装置，其在壳体内的壳体和旋转构件之间的环形间隙中接收粘性流体，并将旋转构件的动态能量转换成热能。 阻尼装置被构造成使得可以响应于粘性流体的压力移动用于密封环形间隙的密封单元，以改变环形间隙的体积以抑制伴随粘性的压力增加的不利影响 流体到密封单元并且增强阻尼装置的可靠性和耐久性。