发明申请
- 专利标题： SUBSTRATE HOLDER, SUBSTRATE HOLDER UNIT, SUBSTRATE TRANSPORT APPARATUS, AND SUBSTRATE BONDING APPARATUS
- 专利标题（中）： 基板支架，基板支架单元，基板运输装置和基板接合装置
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申请号： US12879779申请日： 2010-09-10
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公开(公告)号： US20110007447A1公开(公告)日： 2011-01-13
- 发明人: Hidehiro MAEDA , Masahiro Yoshihashi
- 申请人： Hidehiro MAEDA , Masahiro Yoshihashi
- 优先权： JP2008-064926 20080313
- 主分类号： H01L21/683
- IPC分类号： H01L21/683
摘要：
A substrate holder is reliably transported in a state of holding a substrate. There is provided a substrate holder for holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate holder is to be transported in a state of holding the substrate. The substrate holder includes a holder body that is to have the substrate placed thereon, and a connector terminal that is externally exposed through the holder body, where the connector terminal is attachable to and detachable from an external power supply terminal. There is also provided a substrate transport apparatus for transporting a substrate holder holding a substrate by means of electrostatic force generated by power supplied from an external source. The substrate transport apparatus includes a placement section that has a placement surface on which the substrate holder is placed, where the placement section holds the substrate holder, and a power supply terminal that supplies power to the substrate holder placed on the placement surface.
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