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    Multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification
    1.
    发明授权
    Multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification 失效
    用于微尺度和纳米尺度测量，操作和表面改性的多维驻波探头

    公开(公告)号：US07900506B2

    公开(公告)日：2011-03-08

    申请号：US11956915

    申请日：2007-12-14

    申请人： Shane C. Woody ,  Marcin B. Bauza ,  Stuart T. Smith

    发明人： Shane C. Woody ,  Marcin B. Bauza ,  Stuart T. Smith

    IPC分类号： G01B5/28 ,  G01Q20/00 ,  G01Q60/38

    CPC分类号： B25J7/00

    摘要： The present invention provides a multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification, including: a filament having a first free end and a second end that is attached to at least one actuator to apply oscillation cycles to the filament; wherein the oscillation of the filament during at least one complete cycle of oscillation of the actuator causes the free end to move in a multi-dimensional envelope, producing a defined virtual probe tip at the free end, wherein a shape of the virtual probe tip is defined by both a characteristic shape of the oscillation of the free end and a geometry of the filament. Optionally, the actuator includes a monolithic crystal actuator. Preferably, the monolithic crystal actuator includes a crystal having zero grain boundaries. The monolithic crystal actuator also includes a plurality of thin flexure structures. The monolithic crystal actuator further includes a plurality of metallic electrodes disposed on inside or outside surfaces, or a combination thereof, of the plurality of thin flexure structures.

    摘要翻译： 本发明提供了一种用于微尺度和纳米尺度测量，操作和表面改性的多维驻波探头，包括：具有第一自由端和第二端的灯丝，其连接到至少一个致动器以将振荡周期施加到 灯丝; 其中在致动器的振荡的至少一个完整循环期间灯丝的振荡导致自由端在多维包络中移动，从而在自由端产生限定的虚拟探针尖端，其中虚拟探针尖端的形状为 由自由端的振荡的特征形状和细丝的几何形状两者限定。 可选地，致动器包括单片晶体致动器。 优选地，单晶晶体致动器包括具有零晶界的晶体。 单片晶体致动器还包括多个薄弯曲结构。 单片晶体致动器还包括设置在多个薄弯曲结构的内表面或外表面上的多个金属电极或其组合。

    Method and apparatus using a closed loop controlled actuator for surface profilometry
    2.
    发明授权
    Method and apparatus using a closed loop controlled actuator for surface profilometry 有权
    使用闭环控制的执行器进行表面轮廓测量的方法和装置

    公开(公告)号：US06901677B2

    公开(公告)日：2005-06-07

    申请号：US10839384

    申请日：2004-05-05

    申请人： Stuart T. Smith ,  Marcin B. Bauza ,  Pavan Jain ,  Shane C. Woody

    发明人： Stuart T. Smith ,  Marcin B. Bauza ,  Pavan Jain ,  Shane C. Woody

    IPC分类号： G01B5/00 ,  G01B5/20 ,  G01B7/28

    CPC分类号： G01B5/20 ,  G01B5/0002

    摘要： An apparatus for profiling the surface of a workpiece, including a probe adapted to make contact with the surface of a workpiece, a sensor for determining or deriving the force between the probe and the workpiece surface, an actuator that adjusts the position of the probe along an axis, which is generally perpendicular to the surface of the workpiece, in order to maintain a constant force between the probe and the surface, and a closed control loop, including a controller that controls the operation of the actuator based on information from the sensor.

    摘要翻译： 用于对工件的表面进行成形的装置，包括适于与工件的表面接触的探头，用于确定或导出探头和工件表面之间的力的传感器，调节探头沿着位置的致动器 通常垂直于工件表面的轴线，以便在探头和表面之间保持恒定的力，以及闭合的控制回路，包括控制器，其基于来自传感器的信息来控制致动器的操作 。

    MULTI-DIMENSIONAL STANDING WAVE PROBE FOR MICROSCALE AND NANOSCALE MEASUREMENT, MANIPULATION, AND SURFACE MODIFICATION
    3.
    发明申请
    MULTI-DIMENSIONAL STANDING WAVE PROBE FOR MICROSCALE AND NANOSCALE MEASUREMENT, MANIPULATION, AND SURFACE MODIFICATION 失效
    用于微观和纳米尺度测量，操作和表面改性的多维立体波探测

    公开(公告)号：US20080202222A1

    公开(公告)日：2008-08-28

    申请号：US11956915

    申请日：2007-12-14

    申请人： Shane C. Woody ,  Marcin B. Bauza ,  Stuart T. Smith

    发明人： Shane C. Woody ,  Marcin B. Bauza ,  Stuart T. Smith

    IPC分类号： G01B5/28

    CPC分类号： B25J7/00

    摘要： The present invention provides a multi-dimensional standing wave probe for microscale and nanoscale measurement, manipulation, and surface modification, including: a filament having a first free end and a second end that is attached to at least one actuator to apply oscillation cycles to the filament; wherein the oscillation of the filament during at least one complete cycle of oscillation of the actuator causes the free end to move in a multi-dimensional envelope, producing a defined virtual probe tip at the free end, wherein a shape of the virtual probe tip is defined by both a characteristic shape of the oscillation of the free end and a geometry of the filament. Optionally, the actuator includes a monolithic crystal actuator. Preferably, the monolithic crystal actuator includes a crystal having zero grain boundaries. The monolithic crystal actuator also includes a plurality of thin flexure structures. The monolithic crystal actuator further includes a plurality of metallic electrodes disposed on inside or outside surfaces, or a combination thereof, of the plurality of thin flexure structures.

    摘要翻译： 本发明提供了一种用于微尺度和纳米尺度测量，操作和表面改性的多维驻波探头，包括：具有第一自由端和第二端的灯丝，其连接到至少一个致动器以将振荡周期施加到 灯丝; 其中在致动器的振荡的至少一个完整循环期间灯丝的振荡导致自由端在多维包络中移动，从而在自由端产生限定的虚拟探针尖端，其中虚拟探针尖端的形状为 由自由端的振荡的特征形状和细丝的几何形状两者限定。 可选地，致动器包括单片晶体致动器。 优选地，单晶晶体致动器包括具有零晶界的晶体。 单片晶体致动器还包括多个薄弯曲结构。 单片晶体致动器还包括设置在多个薄弯曲结构的内表面或外表面上的多个金属电极或其组合。

    Method and apparatus using a closed loop controlled actuator for surface profilometry
    6.
    再颁专利
    Method and apparatus using a closed loop controlled actuator for surface profilometry 有权
    使用闭环控制的执行器进行表面轮廓测量的方法和装置

    公开(公告)号：USRE41057E1

    公开(公告)日：2009-12-29

    申请号：US11398455

    申请日：2006-04-05

    申请人： Stuart T. Smith ,  Marcin B. Bauza ,  Pavan Jain ,  Shane C. Woody

    发明人： Stuart T. Smith ,  Marcin B. Bauza ,  Pavan Jain ,  Shane C. Woody

    IPC分类号： G01B5/20 ,  G01B7/28

    CPC分类号： G01B5/20 ,  G01B5/0002

    摘要： An apparatus for profiling the surface of a workpiece, including a probe adapted to make contact with the surface of a workpiece, a sensor for determining or deriving the force between the probe and the workpiece surface, an actuator that adjusts the position of the probe along an axis, which is generally perpendicular to the surface of the workpiece, in order to maintain a constant force between the probe and the surface, and a closed control loop, including a controller that controls the operation of the actuator based on information from the sensor.

    摘要翻译： 用于对工件的表面进行成形的装置，包括适于与工件的表面接触的探头，用于确定或导出探头和工件表面之间的力的传感器，调节探头沿着位置的致动器 通常垂直于工件表面的轴线，以便在探头和表面之间保持恒定的力，以及闭合的控制回路，包括控制器，其基于来自传感器的信息来控制致动器的操作 。

    Method of positioning a platform relative to a fixed frame and a small scale positioning device
    7.
    发明授权
    Method of positioning a platform relative to a fixed frame and a small scale positioning device 失效
    相对于固定框架和小型定位装置定位平台的方法

    公开(公告)号：US07308747B2

    公开(公告)日：2007-12-18

    申请号：US10761585

    申请日：2004-01-21

    申请人： Stuart T. Smith ,  Shane C. Woody

    发明人： Stuart T. Smith ,  Shane C. Woody

    IPC分类号： B23Q3/18

    CPC分类号： B81C99/002 ,  Y10T29/4984 ,  Y10T29/49998 ,  Y10T29/53961 ,  Y10T29/53974

    摘要： A small-scale positioning device employing a platform, a levering mechanism and a floating actuator device. The platform is movably attached to a fixed frame by a lever, a pair of levers, or more. The floating actuator device is coupled between at least one lever and the platform. When the actuator device is activated, it generates a force on the platform and an equal but opposite force on the levering mechanism, causing one or more levers to rotate around their respective fulcrums, thereby controlling the position of the movable platform relative to the fixed frame. The amount of displacement of the platform is dependent upon the effective expansion or contraction of the actuator device and the lever ratio. If the pair of levers are symmetrical, then motion is created in only a single degree of motion. Flexures may be included to prevent motion in unwanted directions.

    摘要翻译： 一种采用平台的小型定位装置，杠杆机构和浮动致动装置。 平台通过杠杆，一对杠杆等可移动地附接到固定框架。 浮动执行器装置联接在至少一个杠杆和平台之间。 当致动器装置被启动时，其在平台上产生一个力并且在杠杆机构上产生相等但相反的力，使得一个或多个杠杆围绕它们各自的支点旋转，从而控制可移动平台相对于固定框架的位置 。 平台的位移量取决于执行器装置的有效膨胀或收缩以及杠杆比。 如果一对杠杆是对称的，那么运动只能产生一个单一的运动。 可以包括弯曲以防止在不需要的方向上的运动。

    Closed loop control systems employing relaxor ferroelectric actuators
    8.
    发明授权
    Closed loop control systems employing relaxor ferroelectric actuators 失效
    采用弛豫铁电致动器的闭环控制系统

    公开(公告)号：US06707230B2

    公开(公告)日：2004-03-16

    申请号：US10157095

    申请日：2002-05-29

    申请人： Stuart T. Smith ,  Shane C. Woody ,  Richard M. Seugling

    发明人： Stuart T. Smith ,  Shane C. Woody ,  Richard M. Seugling

    IPC分类号： H01L4108

    CPC分类号： H02N2/062 ,  H01L41/1875 ,  H02N2/0095 ,  H02N2/043

    摘要： A closed loop motion control system employing at least one relaxor actuator which controls the position of a moving member having mass by controlling an electric field applied to the relaxor actuator. The actuator comprises a body of relaxor material dimensionally variable under the influence of the electric field applied in the form of a voltage to electrodes on at least two surfaces of the actuator. The voltage is applied in response to a feedback signal produced by at least one feedback sensor, which may be a displacement sensor or some other type of sensor. Thus, by constantly monitoring the displacement or other variable of the actuator device, the position of the moving member may be precisely controlled.

    摘要翻译： 一种闭环运动控制系统，其采用至少一个放松器致动器，其通过控制施加到所述放松器致动器的电场来控制具有质量的移动构件的位置。 致动器包括在作用于致动器的至少两个表面上的电压的电压形式的电场的影响下尺寸可变的弛豫材料体。 响应于由至少一个反馈传感器产生的反馈信号施加电压，反馈传感器可以是位移传感器或一些其它类型的传感器。 因此，通过不断地监视致动器装置的位移或其他变量，可以精确地控制移动构件的位置。