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公开(公告)号：US08393066B2
公开(公告)日：2013-03-12
申请号：US12709321
申请日：2010-02-19
IPC分类号： B23Q17/00
CPC分类号： B23P19/04 , G21B1/19 , Y02E30/16 , Y10T29/49769 , Y10T29/49778 , Y10T29/4978 , Y10T29/53961 , Y10T29/53978
摘要： An apparatus for assembling a miniaturized device includes a manipulator system including six manipulators operable to position and orient components of the miniaturized device with submicron precision and micron-level accuracy. The manipulator system includes a first plurality of motorized axes, a second plurality of manual axes, and force and torque and sensors. Each of the six manipulators includes at least one translation stage, at least one rotation stage, tooling attached to the at least one translation stage or the at least one rotation stage, and an attachment mechanism disposed at a distal end of the tooling and operable to attach at least a portion of the miniaturized device to the tooling. The apparatus also includes an optical coordinate-measuring machine (OCMM) including a machine-vision system, a laser-based distance-measuring probe, and a touch probe. The apparatus also includes an operator control system coupled to the manipulator system and the OCMM.
摘要翻译： 用于组装小型化装置的装置包括操纵器系统，其包括六个操纵器，其可操作以使亚微米精度和微米级精度的小型化装置的部件定位和定向。 操纵器系统包括第一多个电动轴线，第二多个手动轴线以及力和扭矩和传感器。 所述六个操纵器中的每一个包括至少一个平移台，至少一个旋转台，附接到所述至少一个平移台或所述至少一个旋转台的工具，以及设置在所述工具的远端的附接机构， 将小型化装置的至少一部分附接到工具。 该装置还包括包括机器视觉系统，基于激光的距离测量探针和触摸探针的光学坐标测量机（OCMM）。 该装置还包括耦合到操纵器系统和OCMM的操作员控制系统。
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公开(公告)号：US20100212133A1
公开(公告)日：2010-08-26
申请号：US12709321
申请日：2010-02-19
IPC分类号： B25B27/14
CPC分类号： B23P19/04 , G21B1/19 , Y02E30/16 , Y10T29/49769 , Y10T29/49778 , Y10T29/4978 , Y10T29/53961 , Y10T29/53978
摘要： An apparatus for assembling a miniaturized device includes a manipulator system including six manipulators operable to position and orient components of the miniaturized device with submicron precision and micron-level accuracy. The manipulator system includes a first plurality of motorized axes, a second plurality of manual axes, and force and torque and sensors. Each of the six manipulators includes at least one translation stage, at least one rotation stage, tooling attached to the at least one translation stage or the at least one rotation stage, and an attachment mechanism disposed at a distal end of the tooling and operable to attach at least a portion of the miniaturized device to the tooling. The apparatus also includes an optical coordinate-measuring machine (OCMM) including a machine-vision system, a laser-based distance-measuring probe, and a touch probe. The apparatus also includes an operator control system coupled to the manipulator system and the OCMM.
摘要翻译： 用于组装小型化装置的装置包括操纵器系统，其包括六个操纵器，其可操作以使亚微米精度和微米级精度的小型化装置的部件定位和定向。 操纵器系统包括第一多个电动轴线，第二多个手动轴线以及力和扭矩和传感器。 所述六个操纵器中的每一个包括至少一个平移台，至少一个旋转台，附接到所述至少一个平移台或所述至少一个旋转台的工具，以及设置在所述工具的远端的附接机构， 将小型化装置的至少一部分附接到工具。 该装置还包括包括机器视觉系统，基于激光的距离测量探针和触摸探针的光学坐标测量机（OCMM）。 该装置还包括耦合到操纵器系统和OCMM的操作员控制系统。
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公开(公告)号：US06707230B2
公开(公告)日：2004-03-16
申请号：US10157095
申请日：2002-05-29
IPC分类号： H01L4108
CPC分类号： H02N2/062 , H01L41/1875 , H02N2/0095 , H02N2/043
摘要： A closed loop motion control system employing at least one relaxor actuator which controls the position of a moving member having mass by controlling an electric field applied to the relaxor actuator. The actuator comprises a body of relaxor material dimensionally variable under the influence of the electric field applied in the form of a voltage to electrodes on at least two surfaces of the actuator. The voltage is applied in response to a feedback signal produced by at least one feedback sensor, which may be a displacement sensor or some other type of sensor. Thus, by constantly monitoring the displacement or other variable of the actuator device, the position of the moving member may be precisely controlled.
摘要翻译： 一种闭环运动控制系统，其采用至少一个放松器致动器，其通过控制施加到所述放松器致动器的电场来控制具有质量的移动构件的位置。 致动器包括在作用于致动器的至少两个表面上的电压的电压形式的电场的影响下尺寸可变的弛豫材料体。 响应于由至少一个反馈传感器产生的反馈信号施加电压，反馈传感器可以是位移传感器或一些其它类型的传感器。 因此，通过不断地监视致动器装置的位移或其他变量，可以精确地控制移动构件的位置。
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