-
公开(公告)号:US20150045937A1
公开(公告)日:2015-02-12
申请号:US14390420
申请日:2013-03-07
发明人: Makoto Yamamoto
IPC分类号: B65G1/04 , G05B19/418
CPC分类号: B65G1/0421 , B65G1/04 , B65G1/137 , B65G2201/0297 , G05B19/418 , G05B2219/45031 , H01L21/67294 , H01L21/67769
摘要: A conveyance system includes storage racks that are provided near or adjacent to semiconductor manufacturing devices and store therein objects to be conveyed, a stacker crane that carries the objects into and out of the storage racks, vehicles that convey the objects, an ID tag reader that is provided to the stacker crane and reads ID tags of the objects; and a controller that is configured or programmed to, when identification information acquired by the ID tag reader R coincides with identification information contained in a conveyance command of an object, control the stacker crane to convey the object to a destination specified in the conveyance command. At least one section of each storage rack allows a gripper of each vehicle to take in and out the objects.
摘要翻译: 输送系统包括设置在半导体制造装置附近或邻近半导体制造装置并存储在其中的物品的存储架,将物体进出存储架的堆垛起重机,传送物体的车辆,ID标签读取器 被提供给堆垛机并且读取对象的ID标签; 以及控制器,其被构造或编程为当由ID标签读取器R获取的识别信息与包含在物体的传送命令中的识别信息一致时,控制堆垛机将物体传送到在传送命令中指定的目的地。 每个存储架的至少一个部分允许每个车辆的夹具进出物体。
-
公开(公告)号:US09845193B2
公开(公告)日:2017-12-19
申请号:US14390420
申请日:2013-03-07
发明人: Makoto Yamamoto
IPC分类号: G06F19/00 , B65G1/04 , B65G1/137 , H01L21/67 , H01L21/677 , G05B19/418
CPC分类号: B65G1/0421 , B65G1/04 , B65G1/137 , B65G2201/0297 , G05B19/418 , G05B2219/45031 , H01L21/67294 , H01L21/67769
摘要: A conveyance system includes storage racks that are provided near or adjacent to semiconductor manufacturing devices and store therein objects to be conveyed, a stacker crane that carries the objects into and out of the storage racks, vehicles that convey the objects, an ID tag reader that is provided to the stacker crane and reads ID tags of the objects; and a controller that is configured or programmed to, when identification information acquired by the ID tag reader R coincides with identification information contained in a conveyance command of an object, control the stacker crane to convey the object to a destination specified in the conveyance command. At least one section of each storage rack allows a gripper of each vehicle to take in and out the objects.
-