-
公开(公告)号：US09618321B2
公开(公告)日：2017-04-11
申请号：US14679236
申请日：2015-04-06
申请人： MITUTOYO CORPORATION
发明人： Ken Motohashi , Atsushi Usami
CPC分类号： G01B9/0203 , G01B9/02028 , G01B11/005 , G01B2290/65
摘要： An interference measuring device comprises: a light source; a beam splitter that causes the light to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light passed the reference optical path and reflection light passed the measurement optical path are combined; a reference light diverging part that causes the light diverged into the reference optical path, to further diverge into a plurality of optical paths and that causes reflection light beams respectively passed the optical paths to be input into the beam splitter; and a plurality of reference mirrors that are respectively arranged in the optical paths such that optical path lengths of the optical paths are different from each other, and that reflect reference light. An interference image is imaged by varying the optical path length of either the reference optical path or the measurement optical path.
-
公开(公告)号：US10095003B2
公开(公告)日：2018-10-09
申请号：US14854393
申请日：2015-09-15
申请人： MITUTOYO CORPORATION
发明人： Atsushi Usami
摘要： An autofocus apparatus according to an embodiment of the present invention is provided with an image acquirer, a pattern controller, and a focus controller. The image acquirer includes an optical system which forms an image of an object at a predetermined magnification and an image capturer which photographs the image of the object formed by the optical system. The pattern controller includes a generator which generates a pattern in a size according to the predetermined magnification of the optical system and a projector which projects the pattern generated by the generator onto the object. In the focus controller, an image of the projected pattern formed by the optical system at the predetermined magnification controls a focus position of the optical system based on the image of the object photographed by the image capturer.
-
公开(公告)号：US08953170B2
公开(公告)日：2015-02-10
申请号：US13782084
申请日：2013-03-01
申请人： Mitutoyo Corporation
发明人： Atsushi Usami , Tatsuya Nagahama
CPC分类号： G01B9/02075 , G01B9/02007 , G01B9/02058 , G01B9/0209 , G01B9/04 , G01B2290/70
摘要： A white-light interferometric measuring device includes: a white light source that emits a white light beam; a beam splitter that reflects the white light beam; and an interference objective lens that collects the white light beam having reflected off the beam splitter in the direction of an optical axis and irradiates a measurement workpiece with the white light beam, the interference objective lens generating interference between a measurement light beam obtained by reflection of the white light beam off the measurement workpiece and a reference light beam obtained by branching of the white light beam to be converged on the measurement workpiece. Polarization correcting means that corrects the white light beam to enter the interference objective lens to circularly polarized light is arranged between the white light source and the interference objective lens.
摘要翻译： 白光干涉测量装置包括：发射白光束的白光源; 反射白光束的分束器; 以及干涉物镜，其收集沿光轴方向反射的分束器的白光束，并将白色光束照射测量工件，干涉物镜产生通过反射获得的测量光束之间的干涉 白光束离开测量工件，通过白光束的分支获得的参考光束被聚焦在测量工件上。 在白光源和干涉物镜之间配置有将白光进入干涉物镜的圆偏振光进行偏振校正的装置。
-
公开(公告)号：US11237354B2
公开(公告)日：2022-02-01
申请号：US16161835
申请日：2018-10-16
申请人： MITUTOYO CORPORATION
发明人： Tatsuya Nagahama , Koji Kubo , Yuko Shishido , Masaki Okayasu , Atsushi Usami
摘要： A variable focal length lens apparatus includes an objective lens and an imaging lens that are aligned on the same optical axis; a front side lens system and a rear side lens system that are disposed in a section between the objective lens and the imaging lens on the optical axis, and change a refractive index in accordance with an input drive signal; and a diaphragm disposed in the section between the front side lens system and the rear side lens system on the optical axis.
-
公开(公告)号：US10705263B2
公开(公告)日：2020-07-07
申请号：US15854226
申请日：2017-12-26
申请人： MITUTOYO CORPORATION
发明人： Atsushi Usami , Masaki Okayasu
摘要： A lens system includes a tubular vibrating member that vibrates due to an input drive signal; a case accommodating the vibrating member; a fluid that fills the case and immerses the vibrating member; and a pressure mitigating member that is installed in a gap between the vibrating member and the case, further outward than the vibrating member. A foam body made of fluororubber and having a large number of closed cells is used as the pressure mitigating member.
-
-
-
-
搜索结果
5 条记录 (耗时 0.01 秒)
