-
公开(公告)号：US11237354B2
公开(公告)日：2022-02-01
申请号：US16161835
申请日：2018-10-16
申请人： MITUTOYO CORPORATION
发明人： Tatsuya Nagahama , Koji Kubo , Yuko Shishido , Masaki Okayasu , Atsushi Usami
摘要： A variable focal length lens apparatus includes an objective lens and an imaging lens that are aligned on the same optical axis; a front side lens system and a rear side lens system that are disposed in a section between the objective lens and the imaging lens on the optical axis, and change a refractive index in accordance with an input drive signal; and a diaphragm disposed in the section between the front side lens system and the rear side lens system on the optical axis.
-
公开(公告)号：US11525978B2
公开(公告)日：2022-12-13
申请号：US16519359
申请日：2019-07-23
申请人： MITUTOYO CORPORATION
发明人： Koji Kubo
摘要： A variable focal length lens apparatus is provided with a variable focal length lens in which a focusing position periodically changes in response to a drive signal that is input; a light source that emits detection light at an object via the variable focal length lens; an photodetector that receives the detection light that is reflected by the object, and outputs a light detection signal; a signal processor that, based on the light detection signal that is input, outputs a light emission signal that is synchronized to a focusing time point where the detection light is focused on a surface of the object; an illuminator that provides pulse illumination to the object with illuminating light, based on the light emission signal that is input; and an image capturer that captures an image of the object through the variable focal length lens.
-
公开(公告)号：US10197382B2
公开(公告)日：2019-02-05
申请号：US15724328
申请日：2017-10-04
申请人： Mitutoyo Corporation
发明人： Sadayuki Matsumiya , Kenji Okabe , Koji Kubo , Nobuya Kaneko
摘要： A chromatic confocal sensor includes a light source portion that emits a plurality of light beams having different wavelengths; an objective lens that converges the plurality of light beams at different focal positions; an emission port from which measurement light reflected by an object to be measured at the focal positions out of the plurality of light beams is emitted; a position calculation portion that calculates a position of the object to be measured based on the emitted measurement light; an observation portion including an observation light source that emits observation light and an image sensor; and a beam splitter that emits at least a part of the measurement light that passes through the objective lens to the emission port and emits at least a part of the observation light that passes through the objective lens and is reflected by the object to be measured to the image sensor.
-
公开(公告)号：US10247610B2
公开(公告)日：2019-04-02
申请号：US15726276
申请日：2017-10-05
申请人： Mitutoyo Corporation
发明人： Koji Kubo
摘要： A chromatic confocal sensor includes: a light source portion that emits a plurality of light beams having different wavelengths; a plurality of optical heads that converge the plurality of light beams emitted from the light source portion at different focal positions and emit measurement light reflected by a measurement point at the focal positions; a spectrometer including a line sensor, and an optical system that includes a diffraction grating that diffracts a plurality of measurement light beams emitted from the plurality of optical heads, and emits the plurality of measurement light beams diffracted by the diffraction grating to a plurality of different light-receiving areas of the line sensor; and a position calculation portion that calculates a position of a plurality of measurement points as a measurement target of the plurality of optical heads based on a light-receiving position of the plurality of light-receiving areas of the line sensor.
-
公开(公告)号：US20180112966A1
公开(公告)日：2018-04-26
申请号：US15724328
申请日：2017-10-04
申请人： Mitutoyo Corporation
发明人： Sadayuki Matsumiya , Kenji Okabe , Koji Kubo , Nobuya Kaneko
CPC分类号： G01B11/002 , G01B11/0608 , G01B2210/50 , G01J3/0218 , G01J3/2823
摘要： A chromatic confocal sensor includes a light source portion that emits a plurality of light beams having different wavelengths; an objective lens that converges the plurality of light beams at different focal positions; an emission port from which measurement light reflected by an object to be measured at the focal positions out of the plurality of light beams is emitted; a position calculation portion that calculates a position of the object to be measured based on the emitted measurement light; an observation portion including an observation light source that emits observation light and an image sensor; and a beam splitter that emits at least a part of the measurement light that passes through the objective lens to the emission port and emits at least a part of the observation light that passes through the objective lens and is reflected by the object to be measured to the image sensor.
-
公开(公告)号：US11307330B2
公开(公告)日：2022-04-19
申请号：US17148998
申请日：2021-01-14
申请人： MITUTOYO CORPORATION
发明人： Koji Kubo , Yuko Shishido
摘要： A variable focal length optical system includes: an imaging lens configured to condense a parallel beam of light from an objective lens to form an intermediate image; a relay system including, in sequence from an object side, a first relay lens and a second relay lens and configured to relay the intermediate image to infinity; and a lens system of a liquid resonant type which is located between the first relay lens and the second relay lens. A front principal point of the lens system is located to be conjugated with an exit pupil of the objective lens and an expression, 1.90≤fTube/fR1≤2.15, is satisfied. In the expression, fTube denotes a focal length of the imaging lens and fR1 denote a focal length of the first relay lens.
-
公开(公告)号：US11193757B2
公开(公告)日：2021-12-07
申请号：US16717320
申请日：2019-12-17
申请人： MITUTOYO CORPORATION
发明人： Satoru Yoshida , Tatsuya Nagahama , Masafumi Yamanaka , Hitoshi Isobe , Naoto Oita , Koji Kubo , Yuko Shishido , Nobuo Ohba , Takahisa Ootake , Hiroki Matsui , Masanori Arai , Shiro Igasaki , Yuki Kurahashi , Hiroshi Sakai , Yutaka Watanabe
摘要： An image measurement apparatus, which functions as a non-contact profile-measuring device, includes: an image sensor as an image pick-up device; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from a workpiece to the image sensor; and a controller (image-pickup lens controller and image measurement processor) configured to control the variable focal length lens and process a detected image by the image sensor. The image measurement apparatus, which also functions as a non-contact displacement-detecting device, includes: an image sensor; a variable focal length lens (liquid lens unit) disposed on an optical axis extending from the workpiece to the image sensor; and a controller (displacement-detection lens controller and profile measurement processor) configured to control the variable focal length lens and a detected image by the image sensor.
-
公开(公告)号：US20180113027A1
公开(公告)日：2018-04-26
申请号：US15726276
申请日：2017-10-05
申请人： Mitutoyo Corporation
发明人： Koji Kubo
CPC分类号： G01J3/502 , G01J3/0208 , G01J3/10 , G01J2003/102
摘要： A chromatic confocal sensor includes: a light source portion that emits a plurality of light beams having different wavelengths; a plurality of optical heads that converge the plurality of light beams emitted from the light source portion at different focal positions and emit measurement light reflected by a measurement point at the focal positions; a spectrometer including a line sensor, and an optical system that includes a diffraction grating that diffracts a plurality of measurement light beams emitted from the plurality of optical heads, and emits the plurality of measurement light beams diffracted by the diffraction grating to a plurality of different light-receiving areas of the line sensor; and a position calculation portion that calculates a position of a plurality of measurement points as a measurement target of the plurality of optical heads based on a light-receiving position of the plurality of light-receiving areas of the line sensor.
-
公开(公告)号：US20160258742A1
公开(公告)日：2016-09-08
申请号：US15054722
申请日：2016-02-26
申请人： Mitutoyo Corporation
发明人： Koji Kubo
IPC分类号： G01B11/14
CPC分类号： G01B11/026 , G01B2210/50 , G02B21/0064
摘要： Provided is a chromatic confocal sensor including: a light source section that emits a plurality of light beams having different wavelengths; an optical head that includes an objective lens that converges the plurality of light beams at different focal positions and selects, as measurement light, light reflected by an object to be measured at the focal position out of the plurality of light beams; a spectroscope including diffraction gratings that split the selected measurement light into a plurality of diffracted light beams and a sensor that receives two or more of the plurality of diffracted light beams; and a signal processing/control section that calculates a position of the object to be measured based on a difference between light reception positions of the two or more diffracted light beams received by the sensor.
摘要翻译： 提供一种彩色共焦传感器，包括：发射具有不同波长的多个光束的光源部; 光学头包括物镜，所述物镜在不同的焦点位置会聚所述多个光束，并且将所述多个光束中的所述焦点处的待测量物体反射的光选择为测量光; 包括将所选择的测量光分成多个衍射光束的衍射光栅的分光器和接收多个衍射光束中的两个或更多个的传感器; 以及信号处理/控制部分，其基于由传感器接收的两个或更多个衍射光束的光接收位置之间的差异来计算被测量物体的位置。
-
公开(公告)号：US11801570B2
公开(公告)日：2023-10-31
申请号：US17100022
申请日：2020-11-20
申请人： MITUTOYO CORPORATION
发明人： Koji Kubo
IPC分类号： B23K26/06 , B23K26/0622 , B23K26/066 , B23K26/03 , B23K26/046
CPC分类号： B23K26/0648 , B23K26/032 , B23K26/046 , B23K26/066 , B23K26/0622
摘要： A laser processing machine includes: a variable focal length optical system in which a focus position is periodically changed in response to a drive signal to be inputted; a position-detection light source configured to emit a detection light onto a workpiece through the variable focal length optical system; a light detector configured to receive the detection light reflected on the workpiece and output a light detection signal; a signal processor configured to output a synchronization pulse signal in synchronization with the focus timing when the detection light is focused on the surface of the workpiece in accordance with the inputted light detection signal; and a laser oscillator configured to oscillate a pulse laser beam in accordance with the inputted synchronization pulse signal to radiate the pulse laser beam on the workpiece through the variable focal length optical system.
-
-
-
-
-
-
-
-
-
搜索结果
14 条记录 (耗时 0.016 秒)
