- 专利标题: Interference measuring device
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申请号: US14679236申请日: 2015-04-06
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公开(公告)号: US09618321B2公开(公告)日: 2017-04-11
- 发明人: Ken Motohashi , Atsushi Usami
- 申请人: MITUTOYO CORPORATION
- 申请人地址: JP Kanagawa
- 专利权人: MITUTOYO CORPORATION
- 当前专利权人: MITUTOYO CORPORATION
- 当前专利权人地址: JP Kanagawa
- 代理机构: Greenblum & Bernstein, P.L.C.
- 优先权: JP2014-079593 20140408
- 主分类号: G01B11/02
- IPC分类号: G01B11/02 ; G01B9/02 ; G01B11/00
摘要:
An interference measuring device comprises: a light source; a beam splitter that causes the light to diverge into a reference optical path and a measurement optical path and that outputs a combined wave in which reflection light passed the reference optical path and reflection light passed the measurement optical path are combined; a reference light diverging part that causes the light diverged into the reference optical path, to further diverge into a plurality of optical paths and that causes reflection light beams respectively passed the optical paths to be input into the beam splitter; and a plurality of reference mirrors that are respectively arranged in the optical paths such that optical path lengths of the optical paths are different from each other, and that reflect reference light. An interference image is imaged by varying the optical path length of either the reference optical path or the measurement optical path.
公开/授权文献
- US20150285619A1 INTERFERENCE MEASURING DEVICE 公开/授权日:2015-10-08
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