公开(公告)号：US20020148964A1

公开(公告)日：2002-10-17

申请号：US09834825

申请日：2001-04-13

Applicant: MCNC

Inventor： David E. Dausch ,  Gary E. McGuire

IPC: G01J005/00

CPC classification number: B81B3/0035 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866

Abstract: The present invention provides for an improved electromagnetic radiation detector having a micromachined electrostatic chopping device. The MEMS flexible film chopping device provides reliability, efficiency, noise reduction and temperature fluctuation compensation capabilities to the associated electromagnetic radiation detector. An electromagnetic radiation detector having an electrostatic chopper device comprises a detector material element, first and second electrodes in electrical contact with the detector material element and electrically isolated from one another. Additionally, the chopper device will incorporate a flexible film actuator overlying the detector material layer and moveable relative thereto. The flexible film actuator will typically include an electrode element and a biasing element such that the actuator remains in a fully curled, open state absent electrostatic voltage and moves to a fully uncurled, closed state upon the application of electrostatic voltage. Arrays that incorporate a plurality of electromagnetic radiation detectors and/or electrostatic chopping devices are additionally provided for.

Abstract translation: 本发明提供一种具有微加工静电斩波装置的改进的电磁辐射检测器。 MEMS柔性薄膜切断装置为相关的电磁辐射探测器提供可靠性，效率，降噪和温度波动补偿能力。 具有静电斩波装置的电磁辐射检测器包括检测器材料元件，与检测器材料元件电接触并彼此电隔离的第一和第二电极。 此外，斩波器装置将包括一个柔性膜致动器，覆盖检测器材料层并可相对于其移动。 柔性膜致动器通常将包括电极元件和偏置元件，使得致动器在静电电压下保持完全卷曲的打开状态，并且在施加静电电压时移动到完全未弯曲的闭合状态。 另外提供了并入有多个电磁辐射检测器和/或静电斩波装置的阵列。

公开(公告)号：US20040046123A1

公开(公告)日：2004-03-11

申请号：US10447620

申请日：2003-05-29

Applicant: MCNC Research and Development Institute

Inventor： David E. Dausch

IPC: G01J005/02

CPC classification number: B81B3/0035 ,  G02B26/04 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866

Abstract: The present invention provides for an improved electromagnetic radiation detector having a micromachined electrostatic chopper/shutter device. The MEMS flexible film chopper/shutter device provides reliability, efficiency, noise reduction and temperature fluctuation compensation capabilities to the associated electromagnetic radiation detector. An electromagnetic radiation detector having an electrostatic chopper/shutter device includes a detector material element and flexible film actuator overlying the detector material layer and moveable relative thereto. The flexible film actuator will typically include an electrode element and a biasing element such that the actuator remains in a fully curled, open state absent electrostatic voltage and moves to a fully uncurled, closed state upon the application of electrostatic voltage. Arrays that incorporate a plurality of electromagnetic radiation detectors and/or electrostatic shuttering devices are additionally provided for.

Abstract translation: 本发明提供一种具有微加工静电斩波器/快门装置的改进的电磁辐射检测器。 MEMS柔性薄膜斩波器/快门装置为相关的电磁辐射探测器提供可靠性，效率，降噪和温度波动补偿能力。 具有静电斩波器/快门装置的电磁辐射检测器包括检测器材料元件和覆盖检测器材料层并可相对于其移动的柔性膜致动器。 柔性膜致动器通常将包括电极元件和偏置元件，使得致动器在静电电压下保持完全卷曲的打开状态，并且在施加静电电压时移动到完全未弯曲的闭合状态。 另外提供了并入有多个电磁辐射检测器和/或静电遮蔽装置的阵列。

公开(公告)号：US20030075767A1

公开(公告)日：2003-04-24

申请号：US10045356

申请日：2001-10-23

Applicant: MCNC

Inventor： John M. Lannon JR. ,  David E. Dausch ,  Dorota Temple

IPC: H01L027/14 ,  H01L029/82 ,  H01L029/84

CPC classification number: B82Y25/00 ,  G01J4/00 ,  H01F10/3254 ,  H01F41/325 ,  H01L31/0216 ,  H01L31/02327

Abstract: The present invention provides for an improved polarized-light detector device. The device comprises a photodiode having a first contact disposed on the backside of a light-sensing medium and a second contact disposed on the frontside of the light-sensing medium. A spin filter medium is disposed between the backside of the light-sensing medium and the first contact. The application of a magnetic field aligns the magnetic moments in the spin-filter medium to cause the device to discriminate between different polarizations of an optical signal. The polarization discrimination is affected by introducing a net magnetization into the spin filter medium, thereby allowing selected spin-polarized electrons to either be transmitted through the spin filter medium to the point of detection or deflected from further transmission. Additionally, the invention is embodied in a polarization-selective-light detector array and methods for discriminating a polarized optical signal and selective optical wavelength detection.

Abstract translation: 本发明提供一种改进的偏振光检测器装置。 该装置包括光电二极管，其具有设置在光感测介质的背面上的第一触点和设置在光感测介质的前侧上的第二触点。 旋转过滤介质设置在光感测介质的背面与第一接触件之间。 磁场的应用使自旋滤波器介质中的磁矩对准以使器件鉴别光信号的不同极化。 通过向自旋过滤介质中引入净磁化，从而允许选定的自旋极化电子通过自旋过滤介质传输到检测点或进一步传输偏转，影响极化鉴别。 此外，本发明体现在偏振选择光检测器阵列中以及用于鉴别偏振光信号和选择性光波长检测的方法。

公开(公告)号：US20020089254A1

公开(公告)日：2002-07-11

申请号：US10053439

申请日：2002-01-16

Applicant: MCNC

Inventor： David E. Dausch ,  Gary E. McGuire

IPC: H02N002/00 ,  H01L041/04

CPC classification number: H01H50/005 ,  H01H57/00 ,  H01H2057/006 ,  H01L41/0973

Abstract: A miniature electrical relay including a piezoelectric actuating element where the piezoelectric actuating element includes a piezoelectric thin-film material sandwiched in between two metal electrode layers that function as piezoelectric electrodes. The metal electrode layers are connected to a positive and negative terminal, respectively, of a power source, which results in actuation of the piezoelectric actuating element. The piezoelectric actuating element is affixed to a deformable metal contact through an insulating layer, such that when actuated, the piezoelectric actuating element selectively deforms the deformable metal contact to cause the contact to move into or out of electrical and mechanical connection with a fixed metal contact. A method of making the miniature piezoelectric includes providing a support structure, depositing a first contact on a first portion of the support structure, depositing a second contact on a second portion of the support structure, wherein the second contact is deformable with respect to the first contact for selectively engaging the first contact, and fabricating a piezoelectric actuator that selectively deforms the second contact relative to the first contact.

Abstract translation: 一种包括压电致动元件的微型继电器，其中压电致动元件包括夹在两个用作压电电极的金属电极层之间的压电薄膜材料。 金属电极层分别连接到电源的正极和负极端子，这导致压电致动元件的致动。 压电致动元件通过绝缘层固定到可变形的金属接触件上，使得当致动时，压电致动元件选择性地使可变形的金属接触件变形，以使接触件进入或移出与固定金属接触件的电和机械连接 。 制造微型压电体的方法包括提供支撑结构，在支撑结构的第一部分上沉积第一触点，在支撑结构的第二部分上沉积第二触点，其中第二触点相对于第一触点可变形 用于选择性地接合第一接触件，以及制造压电致动器，其选择性地相对于第一接触件使第二接触件变形。