公开(公告)号：US20040046123A1

公开(公告)日：2004-03-11

申请号：US10447620

申请日：2003-05-29

Applicant: MCNC Research and Development Institute

Inventor： David E. Dausch

IPC: G01J005/02

CPC classification number: B81B3/0035 ,  G02B26/04 ,  G02B26/0833 ,  G02B26/0841 ,  G02B26/0866

Abstract: The present invention provides for an improved electromagnetic radiation detector having a micromachined electrostatic chopper/shutter device. The MEMS flexible film chopper/shutter device provides reliability, efficiency, noise reduction and temperature fluctuation compensation capabilities to the associated electromagnetic radiation detector. An electromagnetic radiation detector having an electrostatic chopper/shutter device includes a detector material element and flexible film actuator overlying the detector material layer and moveable relative thereto. The flexible film actuator will typically include an electrode element and a biasing element such that the actuator remains in a fully curled, open state absent electrostatic voltage and moves to a fully uncurled, closed state upon the application of electrostatic voltage. Arrays that incorporate a plurality of electromagnetic radiation detectors and/or electrostatic shuttering devices are additionally provided for.

Abstract translation: 本发明提供一种具有微加工静电斩波器/快门装置的改进的电磁辐射检测器。 MEMS柔性薄膜斩波器/快门装置为相关的电磁辐射探测器提供可靠性，效率，降噪和温度波动补偿能力。 具有静电斩波器/快门装置的电磁辐射检测器包括检测器材料元件和覆盖检测器材料层并可相对于其移动的柔性膜致动器。 柔性膜致动器通常将包括电极元件和偏置元件，使得致动器在静电电压下保持完全卷曲的打开状态，并且在施加静电电压时移动到完全未弯曲的闭合状态。 另外提供了并入有多个电磁辐射检测器和/或静电遮蔽装置的阵列。