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公开(公告)号：US20220076935A1
公开(公告)日：2022-03-10
申请号：US17415861
申请日：2019-12-23
发明人： Patrick Philipp , Tom Wirtz
IPC分类号： H01J49/00 , G01N23/2258
摘要： A method for analyzing secondary ion mass spectrum data representing respective secondary ion counts for a range of masses at a given mass resolution. The mass spectrum data is obtained by Secondary Ion Mass Spectrometry, SIMS. Automatic quantification of the ion species and/or cluster ions detected in the analyzed spectrum data is provided.
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公开(公告)号：US20230175993A1
公开(公告)日：2023-06-08
申请号：US18104508
申请日：2023-02-01
发明人： Tom Wirtz , Florian Vollnhals
IPC分类号： G01N23/2251 , G01N23/2258 , H01J49/00
CPC分类号： G01N23/2251 , G01N23/2258 , H01J49/0004
摘要： A method for in-situ joint nanoscale three-dimensional imaging and chemical analysis of a sample. A single charged particle beam device is used for generating a sequence of two-dimensional nanoscale images of the sample, and for sputtering secondary ions from the sample. which are analysed using a secondary ion mass spectrometry device. The two-dimensional images are combined into a three-dimensional volume representation of the sample, the data of which is combined with the results of the chemical analysis.
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公开(公告)号：US20190302197A1
公开(公告)日：2019-10-03
申请号：US16317306
申请日：2017-07-17
发明人： Rachid Barrahma , Olivier Bouton , David Dowsett , Tom Wirtz
摘要： A Hall probe comprising a Hall effect sensing element. The probe is capable of precisely measuring the strength of a magnetic field in high-voltage and vacuum environments.
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公开(公告)号：US20190057853A1
公开(公告)日：2019-02-21
申请号：US16076385
申请日：2017-02-07
发明人： Roch Andrzejewski , Rachid Barrahma , David Dowsett , Tom Wirtz
摘要： An electromagnet assembly suitable for mass spectrometer comprising one yoke; and two pole pieces; the pole pieces being comprised in a vacuum chamber and being separated from each other by a pole piece gap defining a passage for the charged particles to be deflected; the yoke forming a bridge over the two pole pieces thus defining a magnetic circuit. The electromagnet assembly further comprises one electrical circuit for generating a magnetic flux in the magnetic circuit, the electrical circuit being included in the yoke. The electromagnet assembly is remarkable in that the pole pieces are electrically insulated from the electrical circuit and from the yoke by first electrical insulating means and are electrically insulated from the vacuum chamber.
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公开(公告)号：US10580635B2
公开(公告)日：2020-03-03
申请号：US16076385
申请日：2017-02-07
发明人： Roch Andrzejewski , Rachid Barrahma , David Dowsett , Tom Wirtz
摘要： An electromagnet assembly suitable for mass spectrometer comprising one yoke; and two pole pieces; the pole pieces being comprised in a vacuum chamber and being separated from each other by a pole piece gap defining a passage for the charged particles to be deflected; the yoke forming a bridge over the two pole pieces thus defining a magnetic circuit. The electromagnet assembly further comprises one electrical circuit for generating a magnetic flux in the magnetic circuit, the electrical circuit being included in the yoke. The electromagnet assembly is remarkable in that the pole pieces are electrically insulated from the electrical circuit and from the yoke by first electrical insulating means and are electrically insulated from the vacuum chamber.
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公开(公告)号：US09564306B2
公开(公告)日：2017-02-07
申请号：US14760639
申请日：2014-01-07
发明人： Hung Quang Hoang , David Dowsett , Tom Wirtz
CPC分类号： H01J49/28 , H01J49/025 , H01J49/20 , H01J49/30
摘要： The present invention relates to a compact and portable mass spectrometer device comprising a source of ions, a non-scanning magnetic sector for separating ions originating at the source of ions according to their mass-to-charge ratios, and a detection means. The magnetic sector comprises an ion entrance plane and at least two ion exit planes, which allow to optimize the resolving power of the mass spectrometer for specific mass-to charge ratio sub-ranges.
摘要翻译： 本发明涉及一种包括离子源的紧凑且便携的质谱仪装置，以及用于根据其质荷比分离源自离子源的离子的非扫描磁性扇区和检测装置。 磁性部分包括离子入射面和至少两个离子出射平面，其允许优化用于特定质量 - 电荷比子范围的质谱仪的分辨能力。
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公开(公告)号：US11784034B2
公开(公告)日：2023-10-10
申请号：US17415861
申请日：2019-12-23
发明人： Patrick Philipp , Tom Wirtz
IPC分类号： H01J49/00 , G01N23/2258
CPC分类号： H01J49/0036 , G01N23/2258
摘要： A method for analyzing secondary ion mass spectrum data representing respective secondary ion counts for a range of masses at a given mass resolution. The mass spectrum data is obtained by Secondary Ion Mass Spectrometry, SIMS. Automatic quantification of the ion species and/or cluster ions detected in the analyzed spectrum data is provided.
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公开(公告)号：US20220293407A1
公开(公告)日：2022-09-15
申请号：US17635475
申请日：2020-08-14
发明人： Hung Quang Hoang , Tom Wirtz
摘要： A detection device for detecting charges particles. The active area of the detector extends along a principal direction over several centimeters and up to 1 meter or more. This allows for its use as a focal plane detector for a mass spectrometer device, allowing to record all mass-to-charge ratios provided by the spectrometer in parallel and within a reduced acquisition time.
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公开(公告)号：US11204397B2
公开(公告)日：2021-12-21
申请号：US16317306
申请日：2017-07-17
发明人： Rachid Barrahma , Olivier Bouton , David Dowsett , Tom Wirtz
摘要： A Hall probe comprising a Hall effect sensing element. The probe is capable of precisely measuring the strength of a magnetic field in high-voltage and vacuum environments.
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公开(公告)号：US20210104394A1
公开(公告)日：2021-04-08
申请号：US17050098
申请日：2019-04-24
发明人： Marina Verruno , David Dowsett , Tom Wirtz
摘要： A secondary ion mass spectrometer comprising a primary ion beam device, and means for collecting, mass filtering and subsequently detecting secondary ions released from a sample due to the sample having been impacted by a plurality of primary ion beams. The secondary ion mass spectrometer is remarkable in that it uses a plurality of primary ion beams in parallel for scanning the surface of the sample.
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