- 专利标题： METHOD AND DEVICE FOR ANALYSING SIMS MASS SPECTRUM DATA
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申请号： US17415861申请日： 2019-12-23
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公开(公告)号： US20220076935A1公开(公告)日： 2022-03-10
- 发明人: Patrick Philipp , Tom Wirtz
- 申请人： LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- 申请人地址： LU Esch-sur-Alzette
- 专利权人： LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- 当前专利权人： LUXEMBOURG INSTITUTE OF SCIENCE AND TECHNOLOGY (LIST)
- 当前专利权人地址： LU Esch-sur-Alzette
- 优先权： EP18215220.7 20181221,LULU101095 20190116
- 国际申请： PCT/EP2019/086920 WO 20191223
- 主分类号： H01J49/00
- IPC分类号： H01J49/00 ; G01N23/2258
摘要：
A method for analyzing secondary ion mass spectrum data representing respective secondary ion counts for a range of masses at a given mass resolution. The mass spectrum data is obtained by Secondary Ion Mass Spectrometry, SIMS. Automatic quantification of the ion species and/or cluster ions detected in the analyzed spectrum data is provided.
公开/授权文献
- US11784034B2 Method and device for analysing SIMS mass spectrum data 公开/授权日：2023-10-10
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