公开(公告)号：US11885036B2

公开(公告)日：2024-01-30

申请号：US17634176

申请日：2020-08-09

申请人： Leading Edge Equipment Technologies, Inc.

发明人： Jesse S. Appel ,  Alison Greenlee ,  Nathan Stoddard ,  Peter Kellerman ,  Parthiv Daggolu ,  Alexander Martinez ,  Saeed Pirooz ,  Brandon Williard ,  Charles Bowen ,  Brian McMullen ,  David Morrell ,  Dawei Sun

IPC分类号： C30B29/64 ,  C30B15/06 ,  C30B29/06 ,  H01L31/04

CPC分类号： C30B15/06 ,  C30B29/06 ,  C30B29/64 ,  H01L31/04

摘要： A ribbon is formed such that the ribbon floats on a melt using a cold initializer facing an exposed surface of the melt. The ribbon is single crystal silicon. The ribbon is pulled from the silicon melt at a low angle off the melt surface. The ribbon is formed at a same rate as the pulling. The ribbon is separated from the melt at a wall of the crucible where a stable meniscus forms. The ribbon has a thickness between a first surface and an opposite second surface from 50 μm to 5 mm. The ribbon includes a first region extending a first depth from the first surface. The first region has a reduced oxygen concentration relative to a bulk of the ribbon.