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1.发明授权Method for fabricating a biosensor chip and the biosensor chip made thereby 有权制造生物传感器芯片的方法和由此制造的生物传感器芯片公开(公告)号：US09091683B2
公开(公告)日：2015-07-28
申请号：US13854847
申请日：2013-04-01
申请人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
发明人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
摘要： A method of fabricating a biosensor chip includes: forming at least one metallic layer on a transparent substrate to form a composite member; disposing the composite member in a vacuumed chamber, and introducing a gas into the vacuumed chamber; applying microwave energy to the gas to produce a microwave plasma of the gas within the vacuumed chamber, and causing the microwave plasma to interact with the metallic layer so that the metallic layer is melted and formed into a plurality of metallic nanoparticles that are spaced apart from each other and that expose partially the surface of the transparent substrate; and disposing a receptor at the surface of the transparent substrate that is exposed among the metallic nanoparticles. A biosensor chip is also disclosed.
摘要翻译： 制造生物传感器芯片的方法包括：在透明基板上形成至少一层金属层以形成复合构件; 将复合构件设置在真空室中，并将气体引入真空室中; 向气体施加微波能量以在真空室内产生气体的微波等离子体，并使微波等离子体与金属层相互作用，使得金属层熔化并形成多个金属纳米颗粒，其与 并且部分地暴露在透明基板的表面上; 以及在所述金属纳米粒子中露出的所述透明基板的表面设置受体。 还公开了生物传感器芯片。
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2.发明申请公开(公告)号：US20130230427A1
公开(公告)日：2013-09-05
申请号：US13854847
申请日：2013-04-01
申请人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
发明人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
IPC分类号： G01N33/53
摘要： A method of fabricating a biosensor chip includes: forming at least one metallic layer on a transparent substrate to form a composite member; disposing the composite member in a vacuumed chamber, and introducing a gas into the vacuumed chamber; applying microwave energy to the gas to produce a microwave plasma of the gas within the vacuumed chamber, and causing the microwave plasma to interact with the metallic layer so that the metallic layer is melted and formed into a plurality of metallic nanoparticles that are spaced apart from each other and that expose partially the surface of the transparent substrate; and disposing a receptor at the surface of the transparent substrate that is exposed among the metallic nanoparticles. A biosensor chip is also disclosed.
摘要翻译： 制造生物传感器芯片的方法包括：在透明基板上形成至少一层金属层以形成复合构件; 将复合构件设置在真空室中，并将气体引入真空室中; 向气体施加微波能量以在真空室内产生气体的微波等离子体，并使微波等离子体与金属层相互作用，使得金属层熔化并形成多个金属纳米颗粒，其与 并且部分地暴露在透明基板的表面上; 以及在所述金属纳米粒子中露出的所述透明基板的表面设置受体。 还公开了生物传感器芯片。
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公开(公告)号：US20100209617A1
公开(公告)日：2010-08-19
申请号：US12470887
申请日：2009-05-22
申请人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
发明人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
IPC分类号： B05D3/04
CPC分类号： G09F7/165 , B82Y30/00 , B82Y40/00 , C03C17/007 , C03C17/09 , C03C17/40 , C03C2217/255 , C03C2217/256 , C03C2217/42 , C03C2218/154 , C03C2218/328 , C23C14/14 , C23C14/5826 , C23C14/584
摘要： A method of forming a metal pattern comprises: (a) providing a substrate; (b) depositing at least one patterned metal layer which includes a metal selected from an inert metal, an inert metal alloy, and combinations thereof; (c) disposing the substrate and the patterned metal layer in a vacuum chamber, vacuuming the vacuum chamber, and introducing a gas into the vacuum chamber; and (d) applying microwave energy to the gas to produce a microwave plasma of the gas within the vacuum chamber so that the patterned metal layer is acted by the microwave plasma and formed into a plurality of spaced apart metal nanoparticles on the substrate.
摘要翻译： 形成金属图案的方法包括：（a）提供基底; （b）沉积至少一个图案化金属层，其包括选自惰性金属，惰性金属合金及其组合的金属; （c）将基板和图案化的金属层设置在真空室中，抽真空室，并将气体引入真空室; 和（d）向气体施加微波能量以产生真空室内的气体的微波等离子体，使得图案化的金属层由微波等离子体起作用并在衬底上形成多个间隔开的金属纳米颗粒。
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公开(公告)号：US07714248B2
公开(公告)日：2010-05-11
申请号：US11439742
申请日：2006-05-24
申请人： Kuan-Jiuh Lin , Jun-Wei Su , Chuen-Yuan Hsu
发明人： Kuan-Jiuh Lin , Jun-Wei Su , Chuen-Yuan Hsu
IPC分类号： B23K10/00
CPC分类号： H01J37/3233 , H01J37/32192
摘要： The present invention discloses a microwave plasma generator which includes a chamber, a conductive inorganic substance, a trace gas and a microwave source. The conductive inorganic substance and the trace gas are housed in the chamber with an inner pressure about 0.001˜10 torr. By irradiating the conductive inorganic substance and exciting the trace gas, clean and uniform plasma will be generated. The plasma generator of this invention is easily operated and can be applied to semiconductor manufacturing processes, for example, material modification, etching/cleaning, roughing and ion doping/hybrid.
摘要翻译： 本发明公开了一种微波等离子体发生器，其包括室，导电无机物质，痕量气体和微波源。 导电无机物质和痕量气体以约0.001〜10乇的内压收容在室内。 通过照射导电性无机物质和激发痕量气体，将产生清洁均匀的等离子体。 本发明的等离子体发生器易于操作，并且可以应用于半导体制造工艺，例如材料改性，蚀刻/清洁，粗加工和离子掺杂/混合。
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5.发明授权Method for fabricating a biosensor chip and the biosensor chip made thereby 有权制造生物传感器芯片的方法和由此制造的生物传感器芯片公开(公告)号：US08663554B2
公开(公告)日：2014-03-04
申请号：US12858959
申请日：2010-08-18
申请人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
发明人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
IPC分类号： A61L2/00 , G01N33/553
摘要： A method of fabricating a biosensor chip includes: forming at least one metallic layer on a transparent substrate to form a composite member; disposing the composite member in a vacuumed chamber, and introducing a gas into the vacuumed chamber; applying microwave energy to the gas to produce a microwave plasma of the gas within the vacuumed chamber, and causing the microwave plasma to interact with the metallic layer so that the metallic layer is melted and formed into a plurality of metallic nanoparticles that are spaced apart from each other and that expose partially the surface of the transparent substrate; and disposing a receptor at the surface of the transparent substrate that is exposed among the metallic nanoparticles. A biosensor chip is also disclosed.
摘要翻译： 制造生物传感器芯片的方法包括：在透明基板上形成至少一层金属层以形成复合构件; 将复合构件设置在真空室中，并将气体引入真空室中; 向气体施加微波能量以在真空室内产生气体的微波等离子体，并使微波等离子体与金属层相互作用，使得金属层熔化并形成多个金属纳米颗粒，其与 并且部分地暴露在透明基板的表面上; 以及在所述金属纳米粒子中露出的所述透明基板的表面设置受体。 还公开了生物传感器芯片。
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公开(公告)号：US20100206720A1
公开(公告)日：2010-08-19
申请号：US12470918
申请日：2009-05-22
申请人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
发明人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
CPC分类号： C23C14/5826 , B22F2998/00 , B22F2999/00 , B82Y30/00 , B82Y40/00 , C01G3/02 , C01G5/00 , C01G7/00 , C01G53/04 , C01P2004/03 , C01P2004/64 , B22F3/003 , B22F1/0018 , B22F9/14 , B22F2202/13
摘要： A method of producing inorganic nanoparticles includes: (a) providing a layered structure including a substrate and an inorganic layer; (b) disposing the layered structure in a vacuum chamber, vacuuming the vacuum chamber, and introducing a gas into the vacuum chamber; and (c) applying microwave energy to the gas to produce a microwave plasma of the gas within the vacuum chamber so that the inorganic layer is acted by the microwave plasma and formed into a plurality of inorganic nanoparticles on the substrate. A system for producing the nanoparticles is also disclosed.
摘要翻译： 制备无机纳米颗粒的方法包括：（a）提供包括基材和无机层的层状结构; （b）将层状结构设置在真空室中，抽真空室，并将气体引入真空室; 和（c）向所述气体施加微波能量以产生所述真空室内的所述气体的微波等离子体，使得所述无机层由所述微波等离子体起作用并在所述基板上形成多个无机纳米颗粒。 还公开了一种用于生产纳米颗粒的系统。
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公开(公告)号：US20070272663A1
公开(公告)日：2007-11-29
申请号：US11439742
申请日：2006-05-24
申请人： Kuan-Jiuh Lin , Jun-Wei Su , Chuen-Yuan Hsu
发明人： Kuan-Jiuh Lin , Jun-Wei Su , Chuen-Yuan Hsu
IPC分类号： B23K9/02
CPC分类号： H01J37/3233 , H01J37/32192
摘要： The present invention discloses a microwave plasma generator which includes a chamber, a conductive inorganic substance, a trace gas and a microwave source. The conductive inorganic substance and the trace gas are housed in the chamber with an inner pressure about 0.001˜10 torr. By irradiating the conductive inorganic substance and exciting the trace gas, clean and uniform plasma will be generated. The plasma generator of this invention is easily operated and can be applied to semiconductor manufacturing processes, for example, material modification, etching/cleaning, roughing and ion doping/hybrid.
摘要翻译： 本发明公开了一种微波等离子体发生器，其包括室，导电无机物质，痕量气体和微波源。 导电无机物质和痕量气体以约0.001〜10乇的内压收纳在室内。 通过照射导电性无机物质和激发痕量气体，将产生清洁均匀的等离子体。 本发明的等离子体发生器易于操作，并且可以应用于半导体制造工艺，例如材料改性，蚀刻/清洁，粗加工和离子掺杂/混合。
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公开(公告)号：US08697196B2
公开(公告)日：2014-04-15
申请号：US12470887
申请日：2009-05-22
申请人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
发明人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
CPC分类号： G09F7/165 , B82Y30/00 , B82Y40/00 , C03C17/007 , C03C17/09 , C03C17/40 , C03C2217/255 , C03C2217/256 , C03C2217/42 , C03C2218/154 , C03C2218/328 , C23C14/14 , C23C14/5826 , C23C14/584
摘要： A method of forming a metal pattern comprises: (a) providing a substrate; (b) depositing at least one patterned metal layer which includes a metal selected from an inert metal, an inert metal alloy, and combinations thereof; (c) disposing the substrate and the patterned metal layer in a vacuum chamber, vacuuming the vacuum chamber, and introducing a gas into the vacuum chamber; and (d) applying microwave energy to the gas to produce a microwave plasma of the gas within the vacuum chamber so that the patterned metal layer is acted by the microwave plasma and formed into a plurality of spaced apart metal nanoparticles on the substrate.
摘要翻译： 形成金属图案的方法包括：（a）提供基底; （b）沉积至少一个图案化金属层，其包括选自惰性金属，惰性金属合金及其组合的金属; （c）将基板和图案化的金属层设置在真空室中，抽真空室，并将气体引入真空室; 和（d）向气体施加微波能量以产生真空室内的气体的微波等离子体，使得图案化的金属层由微波等离子体起作用并在衬底上形成多个间隔开的金属纳米颗粒。
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公开(公告)号：US20120015164A1
公开(公告)日：2012-01-19
申请号：US13135787
申请日：2011-07-14
申请人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
发明人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
CPC分类号： H01L31/02167 , B82Y20/00 , C03C17/09 , C03C23/006 , C03C23/0065 , C03C2217/254 , C03C2217/255 , C03C2217/425 , C03C2218/328 , F24S80/52 , G02B1/002 , Y02E10/40 , Y02E10/50 , Y10T428/2495 , Y10T428/24997 , Y10T428/265
摘要： A glass product includes a glass substrate, and a metallic nano-network layer embedded and continuously extending in the glass substrate. A method for producing the glass product is also disclosed.
摘要翻译： 玻璃制品包括玻璃基板和嵌入并在玻璃基板中连续延伸的金属纳米网络层。 还公开了一种玻璃制品的制造方法。
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10.发明申请公开(公告)号：US20110044857A1
公开(公告)日：2011-02-24
申请号：US12858959
申请日：2010-08-18
申请人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
发明人： Kuan-Jiuh Lin , Chuen-Yuan Hsu
摘要： A method of fabricating a biosensor chip includes: forming at least one metallic layer on a transparent substrate to form a composite member; disposing the composite member in a vacuumed chamber, and introducing a gas into the vacuumed chamber; applying microwave energy to the gas to produce a microwave plasma of the gas within the vacuumed chamber, and causing the microwave plasma to interact with the metallic layer so that the metallic layer is melted and formed into a plurality of metallic nanoparticles that are spaced apart from each other and that expose partially the surface of the transparent substrate; and disposing a receptor at the surface of the transparent substrate that is exposed among the metallic nanoparticles. A biosensor chip is also disclosed.
摘要翻译： 制造生物传感器芯片的方法包括：在透明基板上形成至少一层金属层以形成复合构件; 将复合构件设置在真空室中，并将气体引入真空室中; 向气体施加微波能量以在真空室内产生气体的微波等离子体，并使微波等离子体与金属层相互作用，使得金属层熔化并形成多个金属纳米颗粒，其与 并且部分地暴露在透明基板的表面上; 以及在所述金属纳米粒子中露出的所述透明基板的表面设置受体。 还公开了生物传感器芯片。
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