公开(公告)号：US08764998B2

公开(公告)日：2014-07-01

申请号：US13192500

申请日：2011-07-28

申请人： Kiyoto Araki ,  Takashi Iwamoto ,  Hajime Kando

发明人： Kiyoto Araki ,  Takashi Iwamoto ,  Hajime Kando

IPC分类号： H01B13/00

CPC分类号： H01L21/76254 ,  H01L41/312 ,  H03H3/02 ,  H03H3/08

摘要： A method for manufacturing a composite substrate that prevents undesirable effects of etching a thin film includes a pattern forming step, an ion implanting step, a bonding step, and a separation step. In the pattern forming step, a pattern region and a reverse pattern region are formed on a principal surface of a functional material substrate. In the ion implanting step, by implanting ions into the functional material substrate, a separation layer is formed inside at a certain distance from the surface of each of the pattern region and the reverse pattern region. In the bonding step, the functional material substrate at the pattern region is bonded to a supporting substrate. In the separation step, the pattern region is separated from the functional material substrate, and the reverse pattern region is made to fall off.

摘要翻译： 制造防止薄膜蚀刻的不良影响的复合基板的制造方法包括图案形成工序，离子注入工序，粘合工序以及分离工序。 在图案形成步骤中，在功能材料基板的主表面上形成图案区域和反向图案区域。 在离子注入步骤中，通过将离子注入到功能材料基板中，在与图案区域和反向图案区域中的每一个的表面一定距离处形成分离层。 在接合工序中，图案区域的功能性材料基板与支撑基板接合。 在分离步骤中，图案区域与功能材料基板分离，反向图案区域脱落。

公开(公告)号：US09197184B2

公开(公告)日：2015-11-24

申请号：US13309626

申请日：2011-12-02

申请人： Takashi Iwamoto ,  Hajime Kando

发明人： Takashi Iwamoto ,  Hajime Kando

IPC分类号： H03H3/02 ,  H01L41/04 ,  H03H3/06 ,  H01L41/053 ,  H01L41/08 ,  H01L41/31 ,  H01L41/312 ,  H03H9/05 ,  H03H9/17 ,  H01L21/20 ,  H01L21/304

CPC分类号： H03H3/02 ,  H01L21/2007 ,  H01L21/304 ,  H01L41/04 ,  H01L41/053 ,  H01L41/0805 ,  H01L41/31 ,  H01L41/312 ,  H03H3/06 ,  H03H9/0523 ,  H03H9/173 ,  H03H2003/021 ,  H03H2003/023 ,  H03H2003/027 ,  Y10T29/42 ,  Y10T29/49005 ,  Y10T29/49126

摘要： An ion implantation layer is formed in a piezoelectric single crystal substrate by implanting hydrogen ions. A lower electrode is formed on the surface of the piezoelectric single crystal substrate at a side at which the ion implantation layer is formed. A sacrificial layer is formed on the surface of the piezoelectric single crystal substrate at a side at which the ion implantation layer and the lower electrode are formed. The formation of the sacrificial layer is performed by direct formation thereof on the surface of the piezoelectric single crystal substrate, for example, by sputtering or coating. A support layer is formed on the piezoelectric single crystal substrate on which the sacrificial layer is formed, and after the surface of the support layer is planarized, a support base material is bonded thereto.

摘要翻译： 通过注入氢离子在压电单晶衬底中形成离子注入层。 在形成离子注入层的一侧，在压电单晶基板的表面上形成下电极。 在压电单晶基板的形成有离子注入层和下电极的一侧的表面上形成牺牲层。 牺牲层的形成通过例如通过溅射或涂布在压电单晶衬底的表面上直接形成来进行。 在其上形成有牺牲层的压电单晶基板上形成支撑层，并且在支撑层的表面平坦化之后，将支撑基材接合在其上。

公开(公告)号：US08339015B2

公开(公告)日：2012-12-25

申请号：US13343742

申请日：2012-01-05

申请人： Takashi Iwamoto ,  Hajime Kando

发明人： Takashi Iwamoto ,  Hajime Kando

IPC分类号： H03H9/25

CPC分类号： H03H3/08 ,  Y10T29/42

摘要： An elastic wave device includes a piezoelectric thin film formed from a piezoelectric single crystal substrate by peeling, an inorganic layer formed on a rear surface of the piezoelectric thin film, an elastic layer disposed on a surface of the inorganic layer opposite to the piezoelectric thin film, and a support member adhered to a surface of the elastic layer opposite to the inorganic layer. The elastic layer reduces stress generated when the piezoelectric thin film provided with the inorganic layer and the support member are adhered to each other and has a predetermined elastic modulus. The inorganic layer is formed of a material having a higher elastic modulus than that of the elastic layer and prevents damping generated when the elastic layer is provided.

摘要翻译： 弹性波装置包括通过剥离由压电单晶基板形成的压电薄膜，形成在压电薄膜的后表面上的无机层，设置在无机层的与压电薄膜相对的表面上的弹性层 和与弹性层的与无机层相反的表面粘附的支撑构件。 弹性层减少了当设置有无机层和支撑构件的压电薄膜彼此粘合并具有预定弹性模量时产生的应力。 无机层由具有比弹性层高的弹性模量的材料形成，并且防止当设置弹性层时产生的阻尼。

公开(公告)号：US08932686B2

公开(公告)日：2015-01-13

申请号：US12608120

申请日：2009-10-29

申请人： Norihiro Hayakawa ,  Takashi Iwamoto ,  Hajime Kando

发明人： Norihiro Hayakawa ,  Takashi Iwamoto ,  Hajime Kando

IPC分类号： C23C14/00 ,  H01L41/312 ,  H03H3/02 ,  H01L41/257

CPC分类号： H01L41/312 ,  H01L41/257 ,  H03H3/02

摘要： A method for producing a piezoelectric composite substrate having a single-crystal thin film of a piezoelectric material includes an ion-implantation step and a separation step. In the ion-implantation step, He+ ions are implanted into the single-crystal base made of the piezoelectric material to form localized microcavities in a separation layer located inside the single-crystal base and apart from a surface of the single-crystal base. In the separation step, the microcavities formed in the ion-implantation step are subjected to thermal stress to divide the separation layer of the piezoelectric single-crystal base, thereby detaching the single-crystal thin film.

摘要翻译： 制造具有压电材料的单晶薄膜的压电复合基板的方法包括离子注入步骤和分离步骤。 在离子注入步骤中，将He +离子注入到由压电材料制成的单晶基底中，以在位于单晶基底内部和离开单晶基底表面的分离层中形成局部微腔。 在分离步骤中，在离子注入步骤中形成的微腔经受热应力以分离压电单晶基底的分离层，从而分离单晶薄膜。

公开(公告)号：US09553253B2

公开(公告)日：2017-01-24

申请号：US12608113

申请日：2009-10-29

申请人： Takashi Iwamoto ,  Hajime Kando

发明人： Takashi Iwamoto ,  Hajime Kando

IPC分类号： C23F1/00 ,  H01L41/257 ,  C23C14/58 ,  C23C14/48 ,  H01L41/313 ,  H03H3/02

CPC分类号： H01L41/29 ,  C23C14/48 ,  C23C14/58 ,  H01L41/257 ,  H01L41/313 ,  H01L41/33 ,  H03H3/02 ,  H03H2003/023

摘要： A lower electrode and an adhesive layer made of an insulator are formed on a back surface on the ion implantation layer side of a piezoelectric single crystal substrate. A supporting substrate in which sacrificial layers made of a conductive material have been formed is bonded to the surface of the adhesive layer. By heating the composite body including the piezoelectric single crystal substrate, the lower electrode, the adhesive layer, and the supporting substrate, a layer of the piezoelectric single crystal substrate is detached to form a piezoelectric thin film. A liquid polarizing upper electrode is formed on a detaching interface of the piezoelectric thin film. A pulsed electric field is applied using the polarizing upper electrode and the sacrificial layers as counter electrodes. Consequently, the piezoelectric thin film is polarized.

摘要翻译： 在压电单晶基板的离子注入层侧的背面形成有由绝缘体构成的下电极和粘合层。 已经形成了由导电材料制成的牺牲层的支撑衬底粘合到粘合剂层的表面。 通过加热包括压电单晶衬底，下电极，粘合剂层和支撑衬底的复合体，分离压电单晶衬底的层以形成压电薄膜。 液体偏振上电极形成在压电薄膜的分离界面上。 使用偏振上电极和牺牲层作为对电极施加脉冲电场。 因此，压电薄膜被极化。

公开(公告)号：US08450904B2

公开(公告)日：2013-05-28

申请号：US13181546

申请日：2011-07-13

申请人： Takashi Iwamoto ,  Hajime Kando

发明人： Takashi Iwamoto ,  Hajime Kando

IPC分类号： H03H9/25

CPC分类号： H03H9/25 ,  H03H3/08 ,  H03H9/02992 ,  H03H9/059 ,  Y10T29/42

摘要： A piezoelectric device includes IDT electrodes and solves various problems resulting from the IDT electrodes. The piezoelectric device has a configuration in which a piezoelectric thin-film and a support are bonded together such that the piezoelectric thin-film is supported by the support. IDT electrodes and interconnect electrodes are provided on a surface of the piezoelectric thin-film that is located on the support side. The piezoelectric thin-film includes a region in which the IDT electrodes are provided and on which no support is provided but an opening is formed. This allows the IDT electrodes and the piezoelectric thin-film and the IDT electrode-formed region of the piezoelectric thin-film to not be in contact with the support, thereby defining a membrane including only the piezoelectric thin-film and the IDT electrodes as elements, the piezoelectric thin-film and the IDT electrodes being disposed therein and being important for properties of the piezoelectric device.

摘要翻译： 压电装置包括IDT电极并且解决了由IDT电极引起的各种问题。 压电装置具有将压电薄膜和支撑体接合在一起的构造，使得压电薄膜由支撑体支撑。 IDT电极和互连电极设置在位于支撑侧的压电薄膜的表面上。 压电薄膜包括其中设置有IDT电极的区域，并且没有设置支撑件但形成开口。 这使得IDT电极和压电薄膜的IDT电极形成区域不与支持体接触，从而限定了仅包括压电薄膜和IDT电极的膜作为元件 ，压电薄膜和IDT电极配置在其中，对于压电器件的性能而言是重要的。

公开(公告)号：US09260574B2

公开(公告)日：2016-02-16

申请号：US13514036

申请日：2011-10-18

申请人： Takashi Iwamoto

发明人： Takashi Iwamoto

IPC分类号： C08K9/04 ,  C08K3/34 ,  C08L67/04 ,  B65B55/00 ,  C08J5/18 ,  C08K5/02 ,  C08K5/315 ,  C08K9/02 ,  C08K5/00 ,  C08K7/00

CPC分类号： C08J5/18 ,  C08J2367/04 ,  C08K9/04 ,  C08L67/04

摘要： Provided herein are various bathers and methods of making and using them. In some embodiments, the barriers include a porous crystalline charge-transfer complex and a filler.

摘要翻译： 这里提供了各种沐浴者和制造和使用它们的方法。 在一些实施方案中，阻挡层包括多孔结晶电荷转移络合物和填料。

公开(公告)号：US08669477B2

公开(公告)日：2014-03-11

申请号：US12960259

申请日：2010-12-03

申请人： Takashi Iwamoto

发明人： Takashi Iwamoto

IPC分类号： H05K1/16

CPC分类号： H05K3/4608 ,  H01L2224/16225 ,  H05K1/0206 ,  H05K3/445 ,  Y10T29/4913

摘要： A wiring substrate with improved heat dissipation capability and with reduced size is disclosed. The wiring substrate includes a metal core substrate, a buffer layer formed so as to cover at least a part of the metal core substrate and containing a phase change material or a material with an electrocaloric effect, an electronic device mounted on a surface of a base including the metal core substrate and the buffer layer or inside the base, and a thermal via formed between the electronic device and the buffer layer.

摘要翻译： 公开了具有改善的散热能力和减小尺寸的布线基板。 布线基板包括金属芯基板，形成为覆盖金属芯基板的至少一部分并且包含相变材料或具有电热效应的材料的缓冲层，安装在基板的表面上的电子装置 包括金属芯基板和缓冲层或基体内部，以及形成在电子器件和缓冲层之间的热通孔。

公开(公告)号：US20130323548A1

公开(公告)日：2013-12-05

申请号：US13641288

申请日：2012-06-04

申请人： Takashi Iwamoto

发明人： Takashi Iwamoto

IPC分类号： H01M10/50

CPC分类号： H01M10/615 ,  H01M2/348 ,  H01M10/4207 ,  H01M2200/103 ,  Y10T307/724

摘要： In an aspect, a battery assembly is adapted to accommodate a plurality of unit cells, the battery assembly has: a unit cell wiring configured to provide at least one connection for the unit cells; a cut-off device having a fuse circuit and a heater circuit, the fuse circuit configured to disconnect the connection by heat produced in the heater circuit; and a power supply wiring configured to supply the heater circuit of the cut-off device with an electric power.

摘要翻译： 在一方面，电池组件适于容纳多个单元电池，电池组件具有：单元电池配线，其配置成为单元电池提供至少一个连接; 具有保险丝电路和加热器电路的截止装置，所述熔丝电路被配置为通过所述加热器电路中产生的热量来断开所述连接; 以及被配置为向切断装置的加热电路供给电力的电源配线。

公开(公告)号：US07958779B2

公开(公告)日：2011-06-14

申请号：US12434255

申请日：2009-05-01

申请人： Takafumi Nagano ,  Takashi Iwamoto ,  Tomoko Tanabe

发明人： Takafumi Nagano ,  Takashi Iwamoto ,  Tomoko Tanabe

IPC分类号： G01M15/04

CPC分类号： F02D41/1497 ,  F02D41/009 ,  F02D41/0097 ,  F02D2041/1417 ,  F02D2041/288 ,  F02D2200/1004 ,  F02D2200/1012 ,  G01P3/489 ,  G01P15/165

摘要： An angular velocity/angular acceleration calculator of the crankshaft in an internal combustion engine includes a crank angle detection device, a crank angle correction device, and an angular velocity/angular acceleration calculation device. The crank angle detection device detects a crank angle in the internal combustion engine and a time at the crank angle. The crank angle correction device corrects the crank angle and the time thus detected to an equiangular crank angle and a time corresponding thereto. The angular velocity/angular acceleration calculation device calculates an angular velocity and an angular acceleration of the crankshaft by converting a function of the time with respect to the crank angle that are corrected by the crank angle correction device so as to be regarded as a periodic function, and utilizing the discrete Fourier transform of the converted function.

摘要翻译： 内燃机中曲轴的角速度/角加速度计算器包括曲柄角检测装置，曲柄角校正装置和角速度/角加速度计算装置。 曲柄角检测装置检测内燃机的曲轴转角和曲柄角的时间。 曲轴角度校正装置将曲柄角度和所检测的时间校正为等角曲柄角度和对应的时间。 角速度/角加速度计算装置通过将由曲轴角校正装置校正的曲柄角度的时间函数转换为周期函数来计算曲轴的角速度和角加速度 并利用转换函数的离散付里叶变换。