公开(公告)号：US07006342B2

公开(公告)日：2006-02-28

申请号：US10458005

申请日：2003-06-09

申请人： Kirt R. Williams ,  Farid Matta

发明人： Kirt R. Williams ,  Farid Matta

IPC分类号： H01G7/00 ,  H01G7/06

CPC分类号： H01G5/16 ,  H01G5/14

摘要： A variable capacitor. The variable capacitor has a movable capacitor electrode including a major surface and a fixed capacitor electrode including a major surface. The major surface of the fixed capacitor electrode is opposite the major surface of the movable capacitor electrode and is separated therefrom by a gap. The major surface of the movable capacitor electrode includes a rigidity-increasing feature. The rigidity-increasing feature further provides a capacitance-increasing topography and reduces snap-together of the capacitor electrodes.

摘要翻译： 可变电容器。 可变电容器具有包括主表面的可移动电容器电极和包括主表面的固定电容器电极。 固定电容器电极的主表面与可动电容器电极的主表面相反，并且通过间隙与其分离。 可移动电容器电极的主表面包括刚度增加特征。 刚性增加特征进一步提供电容增加的形貌并减少电容器电极的卡扣。

公开(公告)号：US07367359B2

公开(公告)日：2008-05-06

申请号：US11075057

申请日：2005-03-07

申请人： Nadim I. Maluf ,  Kirt R. Williams ,  Bert P. Van Drieenhuizen ,  Edward Nelson Fuller ,  Richard J. Barron

发明人： Nadim I. Maluf ,  Kirt R. Williams ,  Bert P. Van Drieenhuizen ,  Edward Nelson Fuller ,  Richard J. Barron

IPC分类号： F15C1/04

CPC分类号： F15C5/00 ,  B81B3/0024 ,  F16K99/0001 ,  F16K99/0011 ,  F16K99/0013 ,  F16K99/0034 ,  F16K99/0044 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0098 ,  Y10T137/0396 ,  Y10T137/2213 ,  Y10T137/2224 ,  Y10T137/8242

摘要： The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet ports. The second layer, doped to have a low resistivity and bonded between the first and third layers, defines a cavity having a flow area to permit fluid flow between the inlet and outlet ports. The second layer further defines an actuatable displaceable member, and one or more thermal actuators for actuating the displaceable member to a position between and including an open and a closed position to permit or occlude fluid flow. The third layer provides one wall of the cavity and provides electrical contacts for electrically heating the thermally expandable actuators. The thermal actuators and the displaceable member have high aspect ratios and are formed by deep reactive ion etching such that they are displaceable in the plane of the second layer while being very stiff out of the plane. Thus, both actuation and displacement of the displaceable member are in the plane of the layer.

摘要翻译： 本发明提供具有第一层，第二层和第三层并具有高纵横比几何形状的比例微型阀。 第一层限定具有入口和出口的空腔。 掺杂为具有低电阻率并且接合在第一和第三层之间的第二层限定了具有允许流体在入口和出口之间流动的流动面积的空腔。 第二层进一步限定可致动的可移动构件，以及一个或多个热致动器，用于将可移动构件致动到打开和关闭位置之间并包括打开位置和关闭位置，以允许或阻塞流体流动。 第三层提供腔的一个壁，并提供用于电加热可热膨胀致动器的电触点。 热致动器和可移位构件具有高纵横比，并且通过深反应离子蚀刻形成，使得它们可在第二层的平面中移位，同时非常刚性地离开平面。 因此，可移动构件的致动和位移都在该层的平面内。

公开(公告)号：US06761420B2

公开(公告)日：2004-07-13

申请号：US10024963

申请日：2001-12-18

申请人： Nadim I. Maluf ,  Kirt R. Williams ,  Bert P. van Drieënhuizen ,  Edward Nelson Fuller ,  Richard J. Barron

发明人： Nadim I. Maluf ,  Kirt R. Williams ,  Bert P. van Drieënhuizen ,  Edward Nelson Fuller ,  Richard J. Barron

IPC分类号： B60T836

CPC分类号： F16K99/0001 ,  B81B3/0024 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0044 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0098 ,  Y10T137/0396

摘要： The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet ports. The second layer, doped to have a low resistivity and bonded between the first and third layers, defines a cavity having a flow area to permit fluid flow between the inlet and outlet ports. The second layer further defines an actuatable displaceable member, and one or more thermal actuators for actuating the displaceable member to a position between and including an open and a closed position to permit or occlude fluid flow. The third layer provides one wall of the cavity and provides electrical contacts for electrically heating the thermally expandable actuators. The thermal actuators and the displaceable member have high aspect ratios and are formed by deep reactive ion etching such that they are displaceable in the plane of the second layer while being very stiff out of the plane. Thus, both actuation and displacement of the displaceable member are in the plane of the layer.

摘要翻译： 本发明提供具有第一层，第二层和第三层并具有高纵横比几何形状的比例微型阀。 第一层限定具有入口和出口的空腔。 掺杂为具有低电阻率并且接合在第一和第三层之间的第二层限定了具有允许流体在入口和出口之间流动的流动面积的空腔。 第二层进一步限定可致动的可移动构件，以及一个或多个热致动器，用于将可移动构件致动到打开和关闭位置之间并包括打开位置和关闭位置，以允许或阻塞流体流动。 第三层提供腔的一个壁，并提供用于电加热可热膨胀致动器的电触点。 热致动器和可移位构件具有高纵横比，并且通过深反应离子蚀刻形成，使得它们可在第二层的平面中移位，同时非常刚性地离开平面。 因此，可移动构件的致动和位移都在该层的平面内。

公开(公告)号：US5493177A

公开(公告)日：1996-02-20

申请号：US143220

申请日：1993-10-26

申请人： Richard S. Muller ,  Carlos H. Mastrangelo ,  Kirt R. Williams

发明人： Richard S. Muller ,  Carlos H. Mastrangelo ,  Kirt R. Williams

IPC分类号： G01J3/10 ,  G01P15/08 ,  G03F7/00 ,  H01J3/00 ,  H01J5/00 ,  H01J9/02 ,  H01J21/10 ,  H01J61/30 ,  H01K1/04 ,  H01K1/12 ,  H01K1/28 ,  H01K3/00 ,  H01K7/04 ,  H01K13/00 ,  H01K1/50

CPC分类号： G01J3/108 ,  G01P15/0894 ,  G03F7/00 ,  H01J21/105 ,  H01J3/00 ,  H01J5/00 ,  H01J61/30 ,  H01J9/02 ,  H01K1/04 ,  H01K1/12 ,  H01K1/28 ,  H01K13/00 ,  H01K3/00 ,  H01K7/04

摘要： A surface and/or bulk micromachined hermetically sealed cavity containing at least one suspended structure in a low pressure ambient, and the associated fabrication method. The cavity is bounded by a thin-film membrane and a substrate which may have a recess. The method can be used for the production, for example, of thermionic-emission vacuum tubes, gas filled tubes and electromechanical devices. In vacuum tubes the cathode is a suspended refractory filament. Other electrodes may also be suspended. In electromechanical devices the suspended members may be cantilever beams capable of low friction motion.

摘要翻译： 在低压环境中包含至少一个悬挂结构的表面和/或体积微加工的气密腔，以及相关的制造方法。 空腔由可能具有凹部的薄膜膜和基底界定。 该方法可用于生产例如热离子发射真空管，充气管和机电装置。 在真空管中，阴极是悬浮的耐火长丝。 其他电极也可以被悬挂。 在机电装置中，悬挂构件可以是能够低摩擦运动的悬臂梁。

公开(公告)号：US07011378B2

公开(公告)日：2006-03-14

申请号：US10024957

申请日：2001-12-18

申请人： Nadim I. Maluf ,  Kirt R. Williams ,  Bert P. Van Drieënhuizen ,  Edward Nelson Fuller ,  Richard J. Barron

发明人： Nadim I. Maluf ,  Kirt R. Williams ,  Bert P. Van Drieënhuizen ,  Edward Nelson Fuller ,  Richard J. Barron

IPC分类号： F16K31/02

CPC分类号： F15C5/00 ,  B81B3/0024 ,  F16K99/0001 ,  F16K99/0011 ,  F16K99/0013 ,  F16K99/0034 ,  F16K99/0044 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0098 ,  Y10T137/0396 ,  Y10T137/2213 ,  Y10T137/2224 ,  Y10T137/8242

摘要： The present invention provides a proportional microvalve having a first, second and third layer, and having high aspect ratio geometries. The first layer defines a cavity with inlet and outlet ports. The second layer, doped to have a low resistivity and bonded between the first and third layers, defines a cavity having a flow area to permit fluid flow between the inlet and outlet ports. The second layer further defines an actuatable displaceable member, and one or more thermal actuators for actuating the displaceable member to a position between and including an open and a closed position to permit or occlude fluid flow. The third layer provides one wall of the cavity and provides electrical contacts for electrically heating the thermally expandable actuators. The thermal actuators and the displaceable member have high aspect ratios and are formed by deep reactive ion etching such that they are displaceable in the plane of the second layer while being very stiff out of the plane. Thus, both actuation and displacement of the displaceable member are in the plane of the layer.

公开(公告)号：US06853534B2

公开(公告)日：2005-02-08

申请号：US10458131

申请日：2003-06-09

申请人： Kirt R. Williams

发明人： Kirt R. Williams

IPC分类号： H01G5/14 ,  H01G5/00

CPC分类号： H01G5/14

摘要： A tunable capacitor. The tunable capacitor has a first fixed capacitor electrode and a second fixed capacitor electrode opposite to one another. The tunable capacitor also has a movable element formed of a conductive material. The movable element is moveable between the first fixed capacitor electrode and the second fixed capacitor electrode to adjust the capacitance between the first fixed capacitor electrode and the second fixed capacitor electrode.

摘要翻译： 可调电容器。 可调电容器具有彼此相对的第一固定电容器电极和第二固定电容器电极。 可调谐电容器还具有由导电材料形成的可移动元件。 可移动元件可在第一固定电容器电极和第二固定电容器电极之间移动，以调节第一固定电容器电极和第二固定电容器电极之间的电容。

公开(公告)号：US06845962B1

公开(公告)日：2005-01-25

申请号：US09533893

申请日：2000-03-22

申请人： Richard J. Barron ,  Kirt R. Williams ,  E. Nelson Fuller ,  Harry A. Hunnicutt

发明人： Richard J. Barron ,  Kirt R. Williams ,  E. Nelson Fuller ,  Harry A. Hunnicutt

IPC分类号： B81B3/00 ,  B60T8/36 ,  B60T8/42 ,  B60T8/48 ,  F15B13/04 ,  F15B13/042 ,  F15B13/043 ,  F15C4/00 ,  F15C5/00 ,  F16K7/00 ,  F16K31/12 ,  F16K99/00 ,  G05D7/06 ,  F16K31/02

CPC分类号： F16K99/0001 ,  B60T8/366 ,  B60T8/3695 ,  B60T8/42 ,  B60T8/4275 ,  F15B13/0402 ,  F15B13/0438 ,  F15C5/00 ,  F16K99/0011 ,  F16K99/0059 ,  F16K2099/0076 ,  G05D7/0694 ,  Y10T137/86622 ,  Y10T137/86847 ,  Y10T137/87209

摘要： A microvalve device for controlling fluid flow in a fluid circuit. The microvalve device comprises a body having a cavity formed therein. The body further has first and second pilot ports placed in fluid communication with the cavity. The body also has first and second primary ports placed in fluid communication with the cavity. Each port is adapted for connection with a designated fluid source. A pilot valve supported by the body is movably disposed in the cavity for opening and closing the first and second pilot ports. An actuator is operably coupled to the pilot valve for moving the pilot valve. A microvalve is positioned by the fluid controlled by the pilot valve. The microvalve is a slider valve having a first end and a second end. The slider valve is movably disposed in the cavity for movement between a first position and a second position. The first end of the slider valve is in fluid communication with the first and second pilot ports when the first and second pilot ports are open. The second end of the slider valve is in constant fluid communication with the first primary port. When moving between the first and second positions, the slider valve at least partially blocks and unblocks the second primary port for the purpose of variably restricting fluid flow between the primary ports.

摘要翻译： 一种用于控制流体回路中的流体流动的微型阀装置。 微型阀装置包括其中形成有空腔的主体。 主体还具有与空腔流体连通的第一和第二导向口。 主体还具有与空腔流体连通的第一和第二主要端口。 每个端口适于与指定的流体源连接。 由本体支撑的先导阀可移动地设置在空腔中，用于打开和关闭第一和第二先导端口。 致动器可操作地联接到先导阀，用于移动先导阀。 微阀由由先导阀控制的流体定位。 微型阀是具有第一端和第二端的滑阀。 滑动阀可移动地设置在空腔中，用于在第一位置和第二位置之间移动。 当第一和第二导向口打开时，滑阀的第一端与第一和第二导向口流体连通。 滑阀的第二端与第一主端口恒定流体连通。 当在第一位置和第二位置之间移动时，为了可变地限制主端口之间的流体流动，滑块阀至少部分地阻塞和解锁第二主端口。

公开(公告)号：US06523560B1

公开(公告)日：2003-02-25

申请号：US09326931

申请日：1999-06-04

申请人： Kirt R. Williams ,  Bert P. van Drieenhuizen ,  Dominik P. Jaeggi ,  Nadim I. Maluf ,  Edward N. Fuller ,  Richard J. Barron

发明人： Kirt R. Williams ,  Bert P. van Drieenhuizen ,  Dominik P. Jaeggi ,  Nadim I. Maluf ,  Edward N. Fuller ,  Richard J. Barron

IPC分类号： F16K3102

CPC分类号： F15C5/00 ,  B81B3/0024 ,  F16K99/0001 ,  F16K99/0011 ,  F16K99/0044 ,  F16K2099/0074 ,  F16K2099/008 ,  F16K2099/0098 ,  Y10T137/0396

摘要： Disclosed is a microvalve suitable for use in high pressure applications such as refriigeration. The microvalve has a displaceable member that slides across an inlet port, thereby creating an orifice. A pressure-equalizing contour is positioned beneath the displaceable member and is in fluid contact with the inlet port. The pressure on the displaceable member from the inlet port is equalized by the pressure from the pressure-equalizing contour. Consequently, the microvalve can be configured with its inlet port and outlet port on opposite sides of the microvalve. Pressures in the x and y direction are also equalized because of recesses that permit fluid from the inlet to contact all faces of the displaceable member.

摘要翻译： 公开了一种适用于高压应用如微生物的微型阀。 微型阀具有可滑动穿过入口的可移动构件，从而形成孔口。 压力均衡轮廓位于可移动构件的下方并与入口流体接触。 来自入口的可移动构件上的压力由压力平衡轮廓的压力相等。 因此，微型阀可以配置有在微型阀的相对侧上的入口和出口。 由于允许来自入口的流体接触可移动构件的所有面的凹部，所以x和y方向上的压力也相等。