公开(公告)号：US12159843B2

公开(公告)日：2024-12-03

申请号：US17472474

申请日：2021-09-10

Applicant: Kioxia Corporation

Inventor： Daisuke Kawamura

IPC: H01L23/00 ,  H01L23/48 ,  H01L23/528 ,  H10B41/10 ,  H10B41/27 ,  H10B41/40 ,  H10B43/10 ,  H10B43/27 ,  H10B43/40

Abstract: A semiconductor device according to an embodiment includes a lower layer wiring and a dummy wiring arranged in a first hierarchy, a contact arranged in a second hierarchy above the first hierarchy and connected to the lower layer wiring, and first and second plate-like portions arranged in the second hierarchy, extending in a stacking direction of each layer belonging to the second hierarchy and in a first direction intersecting with the stacking direction, and sandwiching the contact in a second direction intersecting with the stacking direction and the first direction at a position away from the contact, and the dummy wiring has at least three edges arranged at respective positions overlapping with one of the first and second plate-like portions in the stacking direction, and an orientation in which at least one of the three edges intersects with the first or second plate-like portion differs as viewed from the stacking direction from orientations in which the other edges intersect with the first or second plate-like portion.

公开(公告)号：US11665898B2

公开(公告)日：2023-05-30

申请号：US17204487

申请日：2021-03-17

Applicant: Kioxia Corporation

Inventor： Daisuke Kawamura ,  Go Oike

IPC: H01L27/11578 ,  H01L27/11519 ,  H01L27/11526 ,  H01L27/11565 ,  H01L27/11573 ,  H01L27/11551

CPC classification number: H01L27/11578 ,  H01L27/11519 ,  H01L27/11526 ,  H01L27/11551 ,  H01L27/11565 ,  H01L27/11573

Abstract: A semiconductor device of an embodiment includes first and second structures arranged in a first hierarchy, in which the first and second structures are repeatedly arranged in a first direction along a plane of the first hierarchy, and a distance between geometric centers of the first and second structures in a minimum unit of repetition of the first and second structures differs between a first position and a second position in the first direction.