公开(公告)号：US08075789B1

公开(公告)日：2011-12-13

申请号：US08893917

申请日：1997-07-11

申请人： Karl A. Littau ,  Chiliang L. Chen ,  Anand Vasudev

发明人： Karl A. Littau ,  Chiliang L. Chen ,  Anand Vasudev

IPC分类号： C25F1/00 ,  C25F3/30 ,  C25F5/00 ,  B44C1/22 ,  C03C15/00 ,  C03C25/68 ,  C23F3/00

CPC分类号： H01J37/32862 ,  C23C16/4405 ,  C23C16/452

摘要： A method and apparatus for cleaning a chamber in a substrate processing system having less reactivity with the chamber walls and the components contained therein. The method includes mixing a diluent gas with a flow of radicals produced by a plasma remotely disposed with respect to the chamber, at a point located between a plasma applicator and the chamber. The apparatus includes a fluid manifold having multiple inlets and an outlet with the outlet being coupled to an intake port of the chamber. One of the inlets are in fluid communication with the plasma applicator, with the remaining inlets being in fluid communication with a supply of the diluent gas. In this fashion, the diluent gas flow and the flow of reactive radicals mix when traveling between the inlets and the outlet to form a gas-radical mixture egressing from the outlet and traversing through the intake port.

摘要翻译： 一种用于清洁基板处理系统中的室的方法和装置，其具有对室壁及其中所含的部件的反应性较小。 该方法包括在位于等离子体施加器和腔室之间的点处将稀释气体与由相对于腔室远程设置的等离子体产生的自由基流混合。 该装置包括具有多个入口的流体歧管和具有出口连接到腔室的进气口的出口。 一个入口与等离子体施加器流体连通，其余入口与稀释气体的供应流体连通。 以这种方式，当在入口和出口之间行进时，稀释气体流和反应性自由基的流动混合以形成从出口排出并穿过进气口的气 - 自由基混合物。

公开(公告)号：US07222636B2

公开(公告)日：2007-05-29

申请号：US10644598

申请日：2003-08-20

申请人： Anh N. Nguyen ,  Joseph Yudovsky ,  Mark A. Alexander ,  Hungsuk A. Yoon ,  Chiliang L. Chen

发明人： Anh N. Nguyen ,  Joseph Yudovsky ,  Mark A. Alexander ,  Hungsuk A. Yoon ,  Chiliang L. Chen

IPC分类号： F16K31/06

CPC分类号： F16K31/0655 ,  F16K31/0675 ,  Y10T137/0419 ,  Y10T137/4259

摘要： The present invention relates to a method and apparatus for delivery of reactants to a substrate processing chamber. An electronically controlled valve assembly is provided for rapid delivery of pulses of reactants to the chamber. The valve assembly comprises a valve body having a valve seat, and at least one gas inlet and one gas outlet below the seat. The piston is selectively movable within the valve body to open and close the valve. In order to actuate the valve assembly, current is sent to a solenoid coil within the valve body. The solenoid coil generates a magnetic field that acts on an adjacent magnetic member. The solenoid coil, magnetic member and piston are arranged such that relative movement of the coil and magnetic member cause the piston to be moved relative to the valve seat.

摘要翻译： 本发明涉及一种将反应物递送到基板处理室的方法和装置。 提供电子控制阀组件，用于将反应物的脉冲快速输送到室。 阀组件包括具有阀座的阀体，以及座下方的至少一个气体入口和一个气体出口。 活塞可选择性地在阀体内移动以打开和关闭阀。 为了致动阀组件，电流被送到阀体内的螺线管线圈。 螺线管线圈产生作用在相邻磁性部件上的磁场。 电磁线圈，磁性构件和活塞被布置成使得线圈和磁性构件的相对运动导致活塞相对于阀座移动。