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1.发明授权公开(公告)号：US06693790B2
公开(公告)日：2004-02-17
申请号：US10121557
申请日：2002-04-12
IPC分类号： H01L2168
CPC分类号： H01L21/67017
摘要： Insulative viscous fluid or gel material having low hardness is used for at least a first electricity insulating layer as an insulating layer of a static electricity chuck. Since a holding surface of the first electricity insulating layer is deformed in accordance with a back surface shape of a wafer, a substantially entire surface of the holding surface comes into intimate contact with the wafer uniformly. An exposing surface of the electricity insulating layer may be coated with a second electricity insulating layer having corrosion resistance. With this structure, adhesion between the back surface of the wafer and the static electricity chuck apparatus is enhanced, which reduces the contact thermal resistance, and it is possible to obtain a static electricity chuck apparatus which is capable of controlling temperature of a surface of the wafer with high precision and has high plasma resistance and durability.
摘要翻译： 作为静电卡盘的绝缘层的至少第一电绝缘层使用具有低硬度的绝缘粘性流体或凝胶材料。 由于第一电绝缘层的保持表面根据晶片的背面形状而变形，所以保持表面的大致整个表面均匀地与晶片紧密接触。 电绝缘层的暴露表面可以涂覆有具有耐腐蚀性的第二电绝缘层。 利用这种结构，提高了晶片的背面与静电卡盘装置之间的粘附性，这降低了接触热阻，并且可以获得能够控制表面的温度的静电卡盘装置 晶圆精度高，等离子电阻和耐久性好。
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公开(公告)号：US5921088A
公开(公告)日：1999-07-13
申请号：US750596
申请日：1996-12-18
申请人： Hisaakira Imaizumi , Kanichi Kadotani , Bunji Hayakashi , Tetsuo Syakushi , Toshihiko Matsumoto , Genichiro Watanabe , Toshihide Imamura
发明人： Hisaakira Imaizumi , Kanichi Kadotani , Bunji Hayakashi , Tetsuo Syakushi , Toshihiko Matsumoto , Genichiro Watanabe , Toshihide Imamura
CPC分类号： F24F13/22 , F24F3/14 , F24F3/153 , F24F5/0042
摘要： There is provided an air conditioning apparatus including an air duct and provided therein with a blower, a heater, a humidifier and an air cooling dehumidifier comprised of an air-fluid heat exchanger,characterized in that:the said air cooling dehumidifier is disposed at a site that is shifted transversely from an air blowing outlet of the said air duct.
摘要翻译： PCT No.PCT / JP95 / 00682 Sec。 371日期：1996年12月18日 102（e）日期1996年12月18日PCT提交1995年4月6日PCT公布。 公开号WO96 / 01397 日本1996年1月18日提供了一种空气调节装置，其包括空气管道，其中设置有鼓风机，加热器，加湿器和由空气流体热交换器组成的空气冷却除湿器，其特征在于：所述空气冷却 除湿器设置在从所述空气管道的空气吹出口横向偏移的位置处。
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公开(公告)号：US5632333A
公开(公告)日：1997-05-27
申请号：US325428
申请日：1994-10-28
CPC分类号： B01D53/265 , F24F3/044 , F24F3/14 , F24F5/0042 , F24F2011/0038
摘要： A temperature and humidity adjusting apparatus has an air cooling and dehumidifying device, an air heater and a humidifier arranged in order. The air cooling and dehumidifying device includes thermoelements that use the Peltier effect. The humidifier includes hollow yarn bodies, each of which are formed by winding metal wire that serves as a heater on the outer periphery of a hollow yarn that is formed into hollow construction from heat resistant fiber. The humidifier also includes means for supplying water to each of the hollow yarn bodies and a power supply that supplies power to the metal wire.
摘要翻译： PCT No.PCT / JP93 / 00569 Sec。 371日期：1994年10月28日 102（e）日期1994年10月28日PCT 1993年4月28日PCT公布。 公开号WO93 / 22602 日期：1993年11月11日温湿度调节装置具有依次布置的空气冷却除湿装置，空气加热器和加湿器。 空气冷却和除湿装置包括使用珀尔帖效应的热电偶。 加湿器包括中空纱线体，它们通过在由耐热纤维形成中空构造的中空纱线的外周上缠绕用作加热器的金属丝而形成。 加湿器还包括用于向每个中空纱线体提供水的装置和向金属丝供电的电源。
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公开(公告)号：US06347521B1
公开(公告)日：2002-02-19
申请号：US09685805
申请日：2000-10-11
IPC分类号： F25B2102
CPC分类号： H01L21/67103 , F25B21/02 , F25B2500/01 , H01L23/38 , H01L35/32 , H01L2924/0002 , H01L2924/00
摘要： The invention provides a temperature control device with excellent temperature uniformity and thermal response, which can be manufactured easily, and a manufacturing method for the same. A thermoelectric device 21 is arranged between a substrate mounting plate 1 and a cooling plate 3. Copper foil electrodes 5, 5, . . . on the upper side of the thermoelectric device 21 are adhered to a lower surface of the substrate mounting plate 1 with an adhesive sheet 17 covering substantially the entire lower surface of the substrate mounting plate 1, and copper foil electrodes 7, 7, . . . on the lower side of the thermoelectric device 21 are adhered to an upper surface of the cooling plate 3 with an adhesive sheet 19 covering substantially the entire upper surface of the substrate mounting plate 1. The total thickness of the adhesive sheet 17 and the copper foil electrodes 5 adhering to it, and the total thickness of the adhesive sheet 19 and the copper foil electrodes 7 adhering to it, is each set approximately 25 to 1000 &mgr;m thin, so as to make the thermal resistance sufficiently low. Thermoelectric conversion elements 9 and 13 are distributed across a large area covering at least the entire area corresponding to the substrate 2.
摘要翻译： 本发明提供一种具有优异的温度均匀性和热响应的温度控制装置，其可以容易地制造，以及其制造方法。 热电装置21设置在基板安装板1和冷却板3之间。铜箔电极5,5。 。 。 在基板安装板1的下表面上，在基板安装板1的大致整个下表面覆盖有粘接片17和铜箔电极7,7，将热电元件21的上侧粘接。 。 。 在热电装置21的下侧，利用覆盖基板安装板1的整个上表面的粘合片19将冷却板3的上表面粘接。粘合片17和铜箔的总厚度 附着在其上的电极5和附着在其上的粘合片19和铜箔电极7的总厚度分别设定为25〜1000μm左右，使得热阻足够低。 热电转换元件9和13分布在覆盖至少对应于基板2的整个区域的大面积上。
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公开(公告)号：US06236810B1
公开(公告)日：2001-05-22
申请号：US09319321
申请日：1999-06-03
申请人： Kanichi Kadotani
发明人： Kanichi Kadotani
IPC分类号： F24H110
CPC分类号： H01L35/00 , F25B21/02 , F25D2400/28 , F28D2021/0077 , F28F27/00 , H01L35/30
摘要： A fluid temperature control device, which has a high cooling capacity, wide controllable temperature range and an excellent temperature control accuracy. A transparent cylinder (3) is inserted in a cylindrical-shaped vessel (1), and a columnar-shaped heating lamp (5) is inserted in the transparent cylinder (3). A fluid desired to be temperature controlled is made to flow in a passage (25) between the vessel (1) and the transparent cylinder (3). Joined to an outer peripheral al surface of the vessel (1) is a thermoelectric conversion element (7) , to an outer surface of which is joined a cooling pipe (9). A cooling liquid is made to flow in the cooling pipe (9) . Fluid heating is effected by the heating lamp (5). Fluid cooling is effected by the cooling liquid and the thermoelectric conversion element (7) forcibly absorbs heat from the fluid and discharges heat to the cooling liquid to thereby cool the fluid rapidly and cool the fluid to a temperature lower than that of the cooling liquid. Further, the thermoelectric conversion element (7) is used to suppress cooling by the cooling liquid and control an amount of cooling with good accuracy and good responsiveness.
摘要翻译： 一种流体温度控制装置，具有高冷却能力，宽的可控温度范围和极好的温度控制精度。 将透明圆筒（3）插入圆柱形容器（1）中，并将柱状加热灯（5）插入透明圆筒（3）中。 使要温度控制的流体在容器（1）和透明圆柱体（3）之间的通道（25）中流动。 连接到容器（1）的外周面的表面是热电转换元件（7），其外表面与冷却管（9）接合。 使冷却液在冷却管（9）内流动。 流体加热由加热灯（5）进行。 流体冷却通过冷却液进行，热电转换元件（7）强制地从流体吸收热量，并将热量排出到冷却液中，从而快速冷却流体，并将流体冷却到比冷却液低的温度。 此外，热电转换元件（7）用于抑制冷却液的冷却，并以良好的精度和良好的响应性来控制冷却量。
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公开(公告)号：US06175687B1
公开(公告)日：2001-01-16
申请号：US08318726
申请日：1994-10-13
IPC分类号： F22B2900
摘要： A humidifier (5) includes upper and lower water tanks (7) and (8) supported by a support frame (6). In a space between the upper and lower water tank, a plurality of hollow yarn bodies (1) are arranged in communication with upper and lower water tanks. The hollow yarn body is constructed of a parens yarn (2) of the hollow and a thin metal wire (3) connected to the power source thereof and wound around the hollow yarn body.
摘要翻译： 加湿器（5）包括由支撑框架（6）支撑的上部和下部水箱（7）和（8）。 在上下水箱之间的空间中，多个中空纱体（1）与上下水箱相连通。 该中空纱线体由中空部的圆筒状纱线（2）和与其动力源连接的金属线（3）构成，卷绕在中空纱线体上。
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公开(公告)号：US5351884A
公开(公告)日：1994-10-04
申请号：US30198
申请日：1993-03-24
CPC分类号： B60H1/247
摘要： A cabin heating apparatus in accordance with the present invention is provided with a central duct (3) extended to one side of an operator's seat through a front-to-rear changeover damper (2) connected to an air conditioner unit (1), a rear duct (4) extended to the rear of the operator's seat through the front-to-rear changeover damper 2 and outlets (9) formed at an extreme end part of the rear duct (4). The cabin heating apparatus is further provided with a lower outlet (6) for supplying an air flow along a floor through an above-to-below changeover damper (5) connected to an extreme end part of the central duct (3), a front duct (7) rising from the above-to-below changeover damper 6 and a front outlet (8) provided at an extreme end part of the front duct (7). An appropriate air flow distribution ratio is set by these changeover dampers (2, 5).
摘要翻译： PCT No.PCT / JP91 / 01252 Sec。 371日期1993年3月24日 102（e）1993年3月24日PCT PCT 1991年9月20日PCT公布。 公开号WO92 / 05971 日本公开于1992年4月16日。根据本发明的客舱加热装置设置有通过连接到空气的前后转换阻尼器（2）延伸到操作员座位的一侧的中心管道（3） 调节器单元（1），通过前后转换风门2延伸到操作员座椅后部的后管道（4）和形成在后管道（4）的末端部分处的出口（9）。 机舱加热装置还设置有下部出口（6），用于通过连接到中心导管（3）的末端部分的上下转换风阀（5）沿着地板供应空气流，前端 从上到下切换风门6上升的管道（7）和设置在前管道（7）的前端部的前出口（8）。 这些转换阻尼器（2,5）设定适当的气流分配比。
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公开(公告)号：US4566435A
公开(公告)日：1986-01-28
申请号：US434499
申请日：1982-10-15
申请人： Kanichi Kadotani , Yogaku Iwamoto
发明人： Kanichi Kadotani , Yogaku Iwamoto
CPC分类号： F24J2/055 , F24J2/245 , F24J2002/241 , F24J2002/4603 , Y02E10/44
摘要： A solar-heat collecting apparatus of the direct conversion type wherein a black working fluid directly absorbs solar-heat. A plurality of solar-heat collecting tube units are arranged in parallel with each other within a box-like casing. Each tube unit comprises a transparent outer tube and an inner tube mounted within the outer tube with a bottom face of the inner tube being in contact with an inner face of the outer tube. Both ends of each inner tube are closed, forming a fluid passage between each inner and outer tube pair and each end of the respective outer tubes is connected with one of two headers.
摘要翻译： 一种直接转换式的太阳能集热装置，其中黑色工作流体直接吸收太阳热。 多个太阳能集热管单元在盒状壳体内彼此平行地布置。 每个管单元包括透明外管和安装在外管内的内管，内管的底面与外管的内表面接触。 每个内管的两端封闭，在每个内管对之间形成流体通道，并且各个外管的每个端部与两个集管中的一个连接。
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9.发明授权Multi-temperature control system and fluid temperature control device applicable to the same system 有权多温度控制系统和流体温度控制装置适用于同一系统
公开(公告)号：US6148145A
公开(公告)日：2000-11-14
申请号：US388896
申请日：1999-09-02
申请人： Kanichi Kadotani
发明人： Kanichi Kadotani
CPC分类号： F24H1/142 , F24H2250/14
摘要： A fluid temperature control device is improved to be simpler in structure, less in fluid temperature non-uniformity, and able to heat a fluid having a small light absorbability. The fluid temperature control device has a cylindrical inner vessel (20), a cylindrical outer vessel (22) surrounding the inner vessel (20), and a heating lamp (25) inserted into the inner vessel (20). Metal fins (28a) and (28b) are provided on the inner and outer circumferential surfaces of the inner vessel (20). A working fluid is passed through the inner space (21) between the inner vessel (20) and the heating lamp (25) and a cooling liquid is passed through the outer space (23) between the inner vessel (20) and the outer vessel (22). Infrared rays from the heating lamp (25) heat the working fluid, and the cooling liquid cools the working fluid. This device is applicable to, for instance, temperature control of plural process chambers of semiconductor processing apparatus. A plurality of the temperature control devices are arranged in the vicinity of the semiconductor processing apparatus. Each of the devices is assigned to each of plural portions of the process chambers and provides the temperature-controlled fluid exclusively to each portion.
摘要翻译： 流体温度控制装置的结构更简单，流体温度不均匀，能够加热具有小的吸光性的流体。 流体温度控制装置具有圆柱形内部容器（20），围绕内部容器（20）的圆柱形外部容器（22）和插入内部容器（20）中的加热灯（25）。 金属翅片（28a）和（28b）设置在内容器（20）的内圆周表面和外圆周表面上。 工作流体通过内部容器（20）和加热灯（25）之间的内部空间（21），并且冷却液体通过内部容器（20）和外部容器（20）之间的外部空间（23） （22）。 来自加热灯（25）的红外线加热工作流体，冷却液冷却工作流体。 该装置适用于例如半导体处理装置的多个处理室的温度控制。 多个温度控制装置配置在半导体处理装置附近。 将每个装置分配给处理室的多个部分中的每一个，并且将温度控制的流体专用于每个部分。
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10.发明授权
公开(公告)号：US5609296A
公开(公告)日：1997-03-11
申请号：US537865
申请日：1996-01-22
申请人： Toshihide Imamura , Kanichi Kadotani , Bunji Hayakashi , Hisaakira Imaizumi , Tetsuo Shakushi , Toshihiko Matsumoto , Genichiro Watanabe
发明人： Toshihide Imamura , Kanichi Kadotani , Bunji Hayakashi , Hisaakira Imaizumi , Tetsuo Shakushi , Toshihiko Matsumoto , Genichiro Watanabe
CPC分类号： F24F3/044 , F24F6/04 , F24F6/10 , F24F2003/144 , F24F6/043 , Y10S165/171
摘要： There is provided a water feed device for humidification, comprising: an outflow reservoir that is disposed above a humidifier for feeding water into the humidifier by way of a permeation and that is provided with an overflow dam for maintaining a level of the water in the outflow reservoir substantially constant; an inflow reservoir that is disposed upwards of the outflow reservoir and that is provided with a flow inlet; a partition plate that is disposed between the inflow reservoir and the outflow reservoir; and a plurality of drip feed members which are provided in the partition plate for allowing the water in the inflow reservoir to drop by gravity in a form of droplets into the outflow reservoir. There is also provided an air conditioning apparatus having a dehumidifier, a heater, a humidifier and an air blower successively arranged within an air duct connect to an area to be air conditioned; downwards of respective portions of the cooling dehumidifier unit and the humidifier unit in the air duct there are provided a pair of water proof trays, respectively, which are communicated via respective hoses with the cooling dehumidifier unit and the humidifier unit, respectively, and which are provided with a drainage means that is opening to an outside of the housing; and downwards of the water proof trays and downwards of the air duct there is provided a further water proof tray having a drainage means that is opening to an outside of the housing.
摘要翻译： PCT No.PCT / JP94 / 01336 Sec。 371日期1996年1月22日 102（e）日期1996年1月22日PCT 1994年8月11日PCT PCT。 WO95 / 05563 PCT出版物 日期：1995年2月23日提供了一种用于加湿的给水装置，包括：流出储存器，其设置在加湿器上方，用于通过渗透将水输送到加湿器中，并且设置有溢流坝，用于保持水平 流出水箱中的水基本恒定; 一个流入贮存器，设置在流出贮存器的上方并设置有一个流入口; 分配板，设置在所述流入贮存器和所述流出贮存器之间; 以及设置在分隔板中以允许流入容器中的水以液滴的形式通过重力下落到流出储存器中的多个滴注供给构件。 还提供了一种具有除湿机，加热器，加湿器和鼓风机的空气调节装置，其连续地布置在连接到要空调的区域的空气管道内; 在空气管道中的冷却除湿器单元和加湿器单元的各部分的下方分别设有一对防水托盘，它们分别经由各自的软管与冷却除湿器单元和加湿器单元连通， 具有通向壳体外部的排水装置; 并且防水托盘向下和空气管道的下方设置有另外的防水托盘，其具有通向外壳的外部的排水装置。
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