公开(公告)号：US20250052666A1

公开(公告)日：2025-02-13

申请号：US18677487

申请日：2024-05-29

Applicant: KLA Corporation

Inventor： Chao Chang ,  Jongjin Kim ,  David Zimdars

IPC: G01N21/21 ,  G01N21/17 ,  G01N21/23 ,  G01N21/88

Abstract: A measurement system may direct an illumination beam including at least one of a first frequency comb or a second frequency comb to a sample, and generate a sequence of images of the sample based on the first frequency comb and the second frequency comb. The system may include one or more coding optical elements to encode data associated with one or more transfer matrix elements into the sequence of images of the sample. The system may further generate a transfer matrix dataset including measurements of at least one of the one or more transfer matrix elements associated with the sample based on at least one of spectral, spatial, or temporal analysis of the sequence of images, and generate one or more measurements of the sample based on the transfer matrix dataset.

公开(公告)号：US20250076208A1

公开(公告)日：2025-03-06

申请号：US18822901

申请日：2024-09-03

Applicant: KLA Corporation

Inventor： Amnon Manassen ,  Kevin Peterlinz ,  Andrew V. Hill ,  Shankar Krishnan ,  Yonatan Vaknin ,  Ido Dolev ,  Suryanarayanan Ganesan ,  Chao Chang ,  Jongjin Kim ,  David Zimdars

IPC: G01N21/88 ,  G01N21/95 ,  G01N21/956

Abstract: A metrology system may include a dual frequency comb source providing a first comb beam with a first repetition rate and a second comb beam with a second repetition rate, a beamsplitter to generate one or more dual frequency comb illumination beams from the first comb beam and the second comb beam, and a beam combiner to form a dual frequency comb illumination beam from the first comb beam and the second comb beam. The system may further include an illumination sub-system to illuminate a sample with the dual frequency comb illumination beam through an objective lens, a collection sub-system to collect sample light from the sample with the objective lens, and a detector to capture a radio-frequency signal based on the sample light. The system may further extract spectral measurement data associated with the sample from the radio-frequency signal and generate metrology measurements based on the spectral measurement data.