公开(公告)号：US20250146961A1

公开(公告)日：2025-05-08

申请号：US18430350

申请日：2024-02-01

Applicant: KLA Corporation

Inventor： Daniel James Haxton ,  Christopher Liman ,  InKyo Kim ,  Boxue Chen ,  Hyowon Park ,  Thaddeus Gerard Dziura ,  Nakyoon Kim ,  Houssam Chouaib ,  Anderson Chou ,  Dimitry Sanko

IPC: G01N23/20 ,  G01N21/95

Abstract: Methods and systems for determining random variation in one or more structures on a specimen are provided. One method includes determining characteristic(s) of output generated by an output acquisition subsystem for structure(s) formed on a specimen and simulating the characteristic(s) of the output with initial parameter values for the structure(s). The method also includes determining parameter values of the structure(s) formed on the specimen as the initial parameter values that resulted in the simulated characteristic(s) that best match the determined characteristic(s). The determined parameter values are responsive to random variation in parameter(s) of the structure(s) on the specimen.