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公开(公告)号:US20110117686A1
公开(公告)日:2011-05-19
申请号:US13000604
申请日:2009-06-03
申请人: Jun-Ying Zhang , Michael A. Haase , Terry L. Smith
发明人: Jun-Ying Zhang , Michael A. Haase , Terry L. Smith
IPC分类号: H01L33/44
CPC分类号: H01L33/44 , H01L33/08 , H01L33/502 , H01L2933/0091
摘要: Methods of fabricating light extractors are disclosed. The method of fabricating an optical construction for extracting light from a substrate includes the steps of: (a) providing a substrate that has a surface; (b) disposing a plurality of structures on the surface of the substrate, where the plurality of structures form open areas that expose the surface of the substrate; (c) shrinking at least some of the structures; and (d) applying an overcoat to cover the shrunk structures and the surface of the substrate in the open areas.
摘要翻译: 公开了提取光的方法。 制造用于从衬底提取光的光学结构的方法包括以下步骤:(a)提供具有表面的衬底; (b)在所述基板的表面上设置多个结构,其中所述多个结构形成暴露所述基板的表面的敞开区域; (c)收缩至少一些结构物; 和(d)施加外涂层以覆盖开放区域中的收缩结构和基底表面。
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公开(公告)号:US08765611B2
公开(公告)日:2014-07-01
申请号:US12917826
申请日:2010-11-02
申请人: Michael A. Haase , Terry L. Smith , Jun-Ying Zhang
发明人: Michael A. Haase , Terry L. Smith , Jun-Ying Zhang
IPC分类号: H01L21/027
CPC分类号: H01L31/02363 , H01L21/465 , H01L33/0095 , H01L33/22 , H01L2933/0083 , Y02E10/50
摘要: A process for etching semiconductors, such as II-VI or III-V semiconductors is provided. The method includes sputter etching the semiconductor through an etching mask using a nonreactive gas, removing the semiconductor and cleaning the chamber with a reactive gas. The etching mask includes a photoresist. Using this method, light-emitting diodes with light extracting elements or nano/micro-structures etched into the semiconductor material can be fabricated.
摘要翻译: 提供了蚀刻半导体的方法,例如II-VI或III-V半导体。 该方法包括通过使用非反应性气体的蚀刻掩模溅射半导体蚀刻,去除半导体并用反应气体清洁室。 蚀刻掩模包括光致抗蚀剂。 使用这种方法,可以制造具有光提取元件的发光二极管或蚀刻到半导体材料中的纳米/微结构。
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公开(公告)号:US20110101402A1
公开(公告)日:2011-05-05
申请号:US13000592
申请日:2009-06-10
申请人: Jun-Ying Zhang , Terry L. Smith , Michael A. Haase
发明人: Jun-Ying Zhang , Terry L. Smith , Michael A. Haase
IPC分类号: H01L33/00
CPC分类号: H01L33/50 , H01L33/08 , H01L33/44 , H01L2933/0091
摘要: Semiconductor light converting constructions are disclosed. The semiconductor light converting construction includes a semiconductor potential well for converting at least a portion of light at a first wavelength to light at a longer second wavelength; an outer layer that is disposed on the semiconductor potential well and has a first index of refraction; and a structured layer that is disposed on the outer layer and has a second index of refraction that is smaller than the first index of refraction. The structured layer includes a plurality of structures that are disposed directly on the outer layer and a plurality of openings that expose the outer layer. The semiconductor light converting construction further includes a structured overcoat that is disposed directly on at least a portion of the structured layer and a portion of the outer layer in the plurality of openings. The overcoat has a third index of refraction that is greater than the second index of refraction.
摘要翻译: 公开了半导体光转换结构。 半导体光转换结构包括用于将第一波长的至少一部分光转换成较长第二波长的光的半导体势阱; 外层,其设置在所述半导体势阱上并具有第一折射率; 以及设置在外层上并且具有小于第一折射率的第二折射率的结构化层。 结构化层包括直接设置在外层上的多个结构和暴露外层的多个开口。 半导体光转换结构还包括直接设置在结构化层的至少一部分上的多个开口中的外层的一部分的结构化外涂层。 外涂层具有大于第二折射率的第三折射率。
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公开(公告)号:US08846518B2
公开(公告)日:2014-09-30
申请号:US13805825
申请日:2011-06-01
IPC分类号: H01L21/3205 , H01L21/311 , C23C16/34 , H01L21/306 , H01L33/46 , C23C16/02 , B82Y20/00 , C23C14/02 , H01L21/46 , C23C14/06 , H01S5/347 , G02B6/44 , H01S5/183 , H01L33/28
CPC分类号: H01L33/06 , B82Y20/00 , C23C14/021 , C23C14/0652 , C23C16/0227 , C23C16/345 , G02B6/4439 , H01L21/30604 , H01L21/46 , H01L33/28 , H01L33/46 , H01S5/18369 , H01S5/347
摘要: A multilayer construction is disclosed. The multilayer construction includes a -II-VI semiconductor layer (110)x and a Si3N4 layer (120) disposed directly on the II-VI semiconductor layer. To improve the adhesion of the Si3N4 layer (120) a native oxide on the II-VI semiconductor layer is removed.
摘要翻译: 公开了一种多层结构。 多层结构包括直接设置在II-VI半导体层上的-II-VI半导体层(110)x和Si3N4层(120)。 为了改善Si 3 N 4层(120)的附着力,去除了II-VI半导体层上的自然氧化物。
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公开(公告)号:US07389025B2
公开(公告)日:2008-06-17
申请号:US11277769
申请日:2006-03-29
申请人: Terry L. Smith , Barry J. Koch , Michael A. Haase , Jun-Ying Zhang , Robert W. Wilson , Xudong Fan
发明人: Terry L. Smith , Barry J. Koch , Michael A. Haase , Jun-Ying Zhang , Robert W. Wilson , Xudong Fan
IPC分类号: G02B6/26
CPC分类号: G02B6/34 , B82Y20/00 , G01N21/648 , G01N21/7746 , G01N2021/6439 , G02B6/1226 , G02B6/29341
摘要: An optical microresonator device is described including an optical waveguide and an optical microresonator positioned so as to optically couple to the waveguide. The waveguide includes a core and a metal cladding layer on at least part of one boundary of the core.
摘要翻译: 描述了一种光学微谐振器装置,其包括光波导和光学微谐振器,其被定位成光耦合到波导。 波导包括在芯的一个边界的至少一部分上的芯和金属覆层。
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公开(公告)号:US20110101382A1
公开(公告)日:2011-05-05
申请号:US13000608
申请日:2009-06-03
申请人: Terry L. Smith , Michael A. Haase , Jun-Ying Zhang
发明人: Terry L. Smith , Michael A. Haase , Jun-Ying Zhang
IPC分类号: H01L31/173 , H01L31/0232
CPC分类号: H01L33/44 , H01L33/08 , H01L33/502 , H01L2924/0002 , H01L2933/0091 , H01L2924/00
摘要: Light converting constructions are disclosed. The light converting construction includes a phosphor slab that has a first index of refraction for converting at least a portion of light at a first wavelength to light at a longer second wavelength; and a structured layer that is disposed on the phosphor slab and has a second index of refraction that is smaller than the first index of refraction. The structured layer includes a plurality of structures that are disposed directly on the phosphor slab and a plurality of openings that expose the phosphor slab. The light converting construction further includes a structured overcoat that is disposed directly on at least a portion of the structured layer and a portion of the phosphor slab in the plurality of openings. The structured overcoat has a third index of refraction that is greater than the second index of refraction.
摘要翻译: 公开了光转换结构。 光转换结构包括:具有第一折射率的荧光体板,用于将第一波长的至少一部分光转换成较长的第二波长的光; 以及设置在所述荧光体板上并且具有小于所述第一折射率的第二折射率的结构化层。 结构化层包括直接设置在荧光体板上的多个结构以及暴露荧光体板的多个开口。 光转换结构还包括直接设置在结构化层的至少一部分上的结构化外涂层和多个开口中的荧光体板的一部分。 结构化外涂层具有大于第二折射率的第三折射率。
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公开(公告)号:US07532790B2
公开(公告)日:2009-05-12
申请号:US11277770
申请日:2006-03-29
申请人: Terry L. Smith , Barry J. Koch , Michael A. Haase , Jun-Ying Zhang , Robert W. Wilson , Xudong Fan
发明人: Terry L. Smith , Barry J. Koch , Michael A. Haase , Jun-Ying Zhang , Robert W. Wilson , Xudong Fan
CPC分类号: G02B6/122 , G02B6/12007 , G02B6/30 , G02B6/4204
摘要: A method of making a microresonator device includes the steps of providing at least a first substrate and providing a waveguide integrated on the substrate. The waveguide includes a core and a metal cladding layer on at least part of one boundary of the core. Another step is positioning a microresonator so that it is in an optically coupling relationship with the waveguide.
摘要翻译: 制造微谐振器器件的方法包括提供至少第一衬底并提供集成在衬底上的波导的步骤。 波导包括在芯的一个边界的至少一部分上的芯和金属覆层。 另一步是定位微谐振器,使其与波导处于光学耦合关系。
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公开(公告)号:US08461608B2
公开(公告)日:2013-06-11
申请号:US13000608
申请日:2009-06-03
申请人: Terry L. Smith , Michael A. Haase , Jun-Ying Zhang
发明人: Terry L. Smith , Michael A. Haase , Jun-Ying Zhang
IPC分类号: H01L33/00
CPC分类号: H01L33/44 , H01L33/08 , H01L33/502 , H01L2924/0002 , H01L2933/0091 , H01L2924/00
摘要: Light converting constructions are disclosed. The light converting construction includes a phosphor slab that has a first index of refraction for converting at least a portion of light at a first wavelength to light at a longer second wavelength; and a structured layer that is disposed on the phosphor slab and has a second index of refraction that is smaller than the first index of refraction. The structured layer includes a plurality of structures that are disposed directly on the phosphor slab and a plurality of openings that expose the phosphor slab. The light converting construction further includes a structured overcoat that is disposed directly on at least a portion of the structured layer and a portion of the phosphor slab in the plurality of openings. The structured overcoat has a third index of refraction that is greater than the second index of refraction.
摘要翻译: 公开了光转换结构。 光转换结构包括:具有第一折射率的荧光体板,用于将第一波长的至少一部分光转换成较长的第二波长的光; 以及设置在所述荧光体板上并且具有小于所述第一折射率的第二折射率的结构化层。 结构化层包括直接设置在荧光体板上的多个结构以及暴露荧光体板的多个开口。 光转换结构还包括直接设置在结构化层的至少一部分上的结构化外涂层和多个开口中的荧光体板的一部分。 结构化外涂层具有大于第二折射率的第三折射率。
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公开(公告)号:US20130109183A1
公开(公告)日:2013-05-02
申请号:US13805825
申请日:2011-06-01
IPC分类号: H01L21/306
CPC分类号: H01L33/06 , B82Y20/00 , C23C14/021 , C23C14/0652 , C23C16/0227 , C23C16/345 , G02B6/4439 , H01L21/30604 , H01L21/46 , H01L33/28 , H01L33/46 , H01S5/18369 , H01S5/347
摘要: A multilayer construction is disclosed. The multilayer construction includes a -II-VI semiconductor layer (110)x and a Si3N4 layer (120) disposed directly on the II-VI semiconductor layer. To improve the adhesion of the Si3N4 layer (120) a native oxide on the II-VI semiconductor layer is removed.
摘要翻译: 公开了一种多层结构。 多层结构包括直接设置在II-VI半导体层上的-II-VI半导体层(110)x和Si3N4层(120)。 为了改善Si 3 N 4层(120)的附着力,去除了II-VI半导体层上的自然氧化物。
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公开(公告)号:US08324000B2
公开(公告)日:2012-12-04
申请号:US13000604
申请日:2009-06-03
申请人: Jun-Ying Zhang , Michael A. Haase , Terry L. Smith
发明人: Jun-Ying Zhang , Michael A. Haase , Terry L. Smith
IPC分类号: H01L21/00
CPC分类号: H01L33/44 , H01L33/08 , H01L33/502 , H01L2933/0091
摘要: Methods of fabricating light extractors are disclosed. The method of fabricating an optical construction for extracting light from a substrate includes the steps of: (a) providing a substrate that has a surface; (b) disposing a plurality of structures on the surface of the substrate, where the plurality of structures form open areas that expose the surface of the substrate; (c) shrinking at least some of the structures; and (d) applying an overcoat to cover the shrunk structures and the surface of the substrate in the open areas.
摘要翻译: 公开了提取光的方法。 制造用于从衬底提取光的光学结构的方法包括以下步骤:(a)提供具有表面的衬底; (b)在所述基板的表面上设置多个结构,其中所述多个结构形成暴露所述基板的表面的敞开区域; (c)收缩至少一些结构物; 和(d)施加外涂层以覆盖开放区域中的收缩结构和基底表面。
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