公开(公告)号：US07013717B1

公开(公告)日：2006-03-21

申请号：US10006090

申请日：2001-12-06

申请人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

发明人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

IPC分类号： G01N13/10

CPC分类号： G01Q10/04 ,  G01Q10/065

摘要： A probe microscope includes a probe and a scanner, the scanner generating relative motion between a probe and a sample. In addition, a manual input device is provided to control a separation between a sample and a probe. The detector is used to generate a signal related to movement of the probe (for example, deflection). Moreover, the microscope has an alerting device that is responsive to the signal to provide feedback to an operator, the feedback being indicative of interaction between the sample and the probe. Preferably, the manual input device is a rotatable knob. Also, the alerting device is preferably a mechanical resistance device coupled to the knob to provide the feedback to the user.

摘要翻译： 探针显微镜包括探针和扫描仪，扫描仪产生探针和样品之间的相对运动。 此外，提供手动输入装置以控制样品和探针之间的分离。 检测器用于产生与探头移动相关的信号（例如偏转）。 此外，显微镜具有响应于信号以向操作者提供反馈的警报装置，反馈指示样品和探针之间的相互作用。 优选地，手动输入装置是可旋转的旋钮。 此外，警报装置优选地是耦合到旋钮的机械阻力装置以向用户提供反馈。

公开(公告)号：US20060283240A1

公开(公告)日：2006-12-21

申请号：US11383693

申请日：2006-05-16

申请人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

发明人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

IPC分类号： G01B5/28

CPC分类号： G01Q10/065 ,  G01Q60/42 ,  Y10S977/837 ,  Y10S977/85 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/872 ,  Y10S977/881

摘要： A force scanning probe microscope (FSPM) and associated method of making force measurements on a sample includes a piezoelectric scanner having a surface that supports the sample so as to move the sample in three orthogonal directions. The FSPM also includes a displacement sensor that measures movement of the sample in a direction orthogonal to the surface and generates a corresponding position signal so as to provide closed loop position feedback. In addition, a probe is fixed relative to the piezoelectric scanner, while a deflection detection apparatus is employed to sense a deflection of the probe. The FSPM also includes a controller that generates a scanner drive signal based on the position signal, and is adapted to operate according to a user-defined input that can change a force curve measurement parameter during data acquisition.

摘要翻译： 强力扫描探针显微镜（FSPM）和对样品进行力测量的相关方法包括具有支撑样品以使样品沿三个正交方向移动的表面的压电扫描器。 FSPM还包括位移传感器，其测量样品在与表面正交的方向上的运动，并产生相应的位置信号，以便提供闭环位置反馈。 此外，相对于压电扫描器固定探针，而使用偏转检测装置来感测探针的偏转。 FSPM还包括基于位置信号产生扫描器驱动信号的控制器，并且适于根据在数据采集期间可以改变力曲线测量参数的用户定义的输入进行操作。

公开(公告)号：US20050081610A1

公开(公告)日：2005-04-21

申请号：US10756579

申请日：2004-01-13

申请人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

发明人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

IPC分类号： G01Q10/00 ,  G01Q10/06 ,  G01Q60/42 ,  G01Q70/18 ,  H02N2/04 ,  G01N13/10 ,  G01L5/00

CPC分类号： G01Q10/065 ,  G01Q60/42 ,  Y10S977/837 ,  Y10S977/85 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/872 ,  Y10S977/881

摘要： A force scanning probe microscope (FSPM) and associated method of making force measurements on a sample includes a piezoelectric scanner having a surface that supports the sample so as to move the sample in three orthogonal directions. The FSPM also includes a displacement sensor that measures movement of the sample in a direction orthogonal to the surface and generates a corresponding position signal so as to provide closed loop position feedback. In addition, a probe is fixed relative to the piezoelectric scanner, while a deflection detection apparatus is employed to sense a deflection of the probe. The FSPM also includes a controller that generates a scanner drive signal based on the position signal, and is adapted to operate according to a user-defined input that can change a force curve measurement parameter during data acquisition.

摘要翻译： 强力扫描探针显微镜（FSPM）和对样品进行力测量的相关方法包括具有支撑样品以使样品沿三个正交方向移动的表面的压电扫描器。 FSPM还包括位移传感器，其测量样品在与表面正交的方向上的运动，并产生相应的位置信号，以便提供闭环位置反馈。 此外，相对于压电扫描器固定探针，而使用偏转检测装置来感测探针的偏转。 FSPM还包括基于位置信号产生扫描器驱动信号的控制器，并且适于根据在数据采集期间可以改变力曲线测量参数的用户定义的输入进行操作。

公开(公告)号：US07044007B2

公开(公告)日：2006-05-16

申请号：US10756579

申请日：2004-01-13

申请人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

发明人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

IPC分类号： G01N13/10 ,  G01L5/00

CPC分类号： G01Q10/065 ,  G01Q60/42 ,  Y10S977/837 ,  Y10S977/85 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/872 ,  Y10S977/881

摘要： A force scanning probe microscope (FSPM) and associated method of making force measurements on a sample includes a piezoelectric scanner having a surface that supports the sample so as to move the sample in three orthogonal directions. The FSPM also includes a displacement sensor that measures movement of the sample in a direction orthogonal to the surface and generates a corresponding position signal so as to provide closed loop position feedback. In addition, a probe is fixed relative to the piezoelectric scanner, while a deflection detection apparatus is employed to sense a deflection of the probe. The FSPM also includes a controller that generates a scanner drive signal based on the position signal, and is adapted to operate according to a user-defined input that can change a force curve measurement parameter during data acquisition.

公开(公告)号：US07387035B2

公开(公告)日：2008-06-17

申请号：US11383693

申请日：2006-05-16

申请人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

发明人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

IPC分类号： G01L5/00

CPC分类号： G01Q10/065 ,  G01Q60/42 ,  Y10S977/837 ,  Y10S977/85 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/872 ,  Y10S977/881

摘要： A force scanning probe microscope (FSPM) and associated method of making force measurements on a sample includes a piezoelectric scanner having a surface that supports the sample so as to move the sample in three orthogonal directions. The FSPM also includes a displacement sensor that measures movement of the sample in a direction orthogonal to the surface and generates a corresponding position signal so as to provide closed loop position feedback. In addition, a probe is fixed relative to the piezoelectric scanner, while a deflection detection apparatus is employed to sense a deflection of the probe. The FSPM also includes a controller that generates a scanner drive signal based on the position signal, and is adapted to operate according to a user-defined input that can change a force curve measurement parameter during data acquisition.

摘要翻译： 强力扫描探针显微镜（FSPM）和对样品进行力测量的相关方法包括具有支撑样品以使样品沿三个正交方向移动的表面的压电扫描器。 FSPM还包括位移传感器，其测量样品在与表面正交的方向上的运动，并产生相应的位置信号，以便提供闭环位置反馈。 此外，相对于压电扫描器固定探针，而使用偏转检测装置来感测探针的偏转。 FSPM还包括基于位置信号产生扫描器驱动信号的控制器，并且适于根据在数据采集期间可以改变力曲线测量参数的用户定义的输入进行操作。

公开(公告)号：US06677697B2

公开(公告)日：2004-01-13

申请号：US10006085

申请日：2001-12-06

申请人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

发明人： Jens Struckmeier ,  Doug Gotthard ,  Ben Ohler

IPC分类号： G12B2122

CPC分类号： G01Q10/065 ,  G01Q60/42 ,  Y10S977/837 ,  Y10S977/85 ,  Y10S977/863 ,  Y10S977/869 ,  Y10S977/872 ,  Y10S977/881

摘要： A force scanning probe microscope (FSPM) and associated method of making force measurements on a sample includes a piezoelectric scanner having a surface that supports the sample so as to move the sample in three orthogonal directions. The FSPM also includes a displacement sensor that measures movement of the sample in a direction orthogonal to the surface and generates a corresponding position signal so as to provide closed loop position feedback. In addition, a probe is fixed relative to the piezoelectric scanner, while a deflection detection apparatus is employed to sense a deflection of the probe. The FSPM also includes a controller that generates a scanner drive signal based on the position signal, and is adapted to operate according to a user-defined input that can change a force curve measurement parameter during data acquisition.

摘要翻译： 强力扫描探针显微镜（FSPM）和对样品进行力测量的相关方法包括具有支撑样品以使样品沿三个正交方向移动的表面的压电扫描器。 FSPM还包括位移传感器，其测量样品在与表面正交的方向上的运动，并产生相应的位置信号，以便提供闭环位置反馈。 此外，相对于压电扫描器固定探针，而使用偏转检测装置来感测探针的偏转。 FSPM还包括基于位置信号产生扫描器驱动信号的控制器，并且适于根据在数据采集期间可以改变力曲线测量参数的用户定义的输入进行操作。

公开(公告)号：US07478552B2

公开(公告)日：2009-01-20

申请号：US11385273

申请日：2006-03-21

申请人： Doug Gotthard ,  Ben Ohler

发明人： Doug Gotthard ,  Ben Ohler

IPC分类号： G01B5/28 ,  G01N13/10

CPC分类号： G01Q20/02 ,  G01Q70/04 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/86 ,  Y10S977/863 ,  Y10S977/868

摘要： A method of operating a probe based instrument includes a light source that generates and directs a beam of light towards a probe of the instrument to detect a property of probe deflection. The method automatically adjusts the position of the light beam on the probe based on movement of the probe by a Z actuator so as to eliminate apparent parasitic deflection of the probe. A light source assembly for detecting deflection of a probe preferably includes a base, a tip/tilt stage mounted on the base and a light source supported by the tip/tilt stage. The tip/tilt stage includes at least one electrically actuated fine adjustment actuator that controls the tip/tilt stage, preferably independently of movement of the AFM scanner used to move the probe.

摘要翻译： 操作基于探针的仪器的方法包括产生并将光束指向仪器的探针的光源，以检测探针偏转的性质。 该方法基于Z致动器的探头自动调节探头上光束的位置，以消除探针的明显的寄生偏转。 用于检测探针偏转的光源组件优选地包括基座，安装在基座上的尖端/倾斜台和由尖端/倾斜台支撑的光源。 尖端/倾斜台包括至少一个电致动的精细调节致动器，其控制尖端/倾斜台，优选地独立于用于移动探头的AFM扫描器的移动。

公开(公告)号：US20070220958A1

公开(公告)日：2007-09-27

申请号：US11385273

申请日：2006-03-21

申请人： Doug Gotthard ,  Ben Ohler

发明人： Doug Gotthard ,  Ben Ohler

IPC分类号： G01B5/28

CPC分类号： G01Q20/02 ,  G01Q70/04 ,  Y10S977/849 ,  Y10S977/85 ,  Y10S977/86 ,  Y10S977/863 ,  Y10S977/868

摘要： A method of operating a probe based instrument includes a light source that generates and directs a beam of light towards a probe of the instrument to detect a property of probe deflection. The method automatically adjusts the position of the light beam on the probe based on movement of the probe by a Z actuator so as to eliminate apparent parasitic deflection of the probe. A light source assembly for detecting deflection of a probe preferably includes a base, a tip/tilt stage mounted on the base and a light source supported by the tip/tilt stage. The tip/tilt stage includes at least one electrically actuated fine adjustment actuator that controls the tip/tilt stage, preferably independently of movement of the AFM scanner used to move the probe.

摘要翻译： 操作基于探针的仪器的方法包括产生并将光束指向仪器的探针的光源，以检测探针偏转的性质。 该方法基于Z致动器的探头自动调节探头上光束的位置，以消除探针的明显的寄生偏转。 用于检测探针偏转的光源组件优选地包括基座，安装在基座上的尖端/倾斜台和由尖端/倾斜台支撑的光源。 尖端/倾斜台包括至少一个电致动的精细调节致动器，其控制尖端/倾斜台，优选地独立于用于移动探头的AFM扫描器的移动。