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31 条记录 (耗时 0.027 秒)

    Method for forming a pattern on a semiconductor device and semiconductor device resulting from the same
    1.
    发明授权
    Method for forming a pattern on a semiconductor device and semiconductor device resulting from the same 失效
    在半导体器件上形成图案的方法和由其制成的半导体器件

    公开(公告)号：US07510979B2

    公开(公告)日：2009-03-31

    申请号：US11770503

    申请日：2007-06-28

    申请人： Jae-chang Jung ,  Keun Kyu Kong ,  Jin-soo Kim

    发明人： Jae-chang Jung ,  Keun Kyu Kong ,  Jin-soo Kim

    IPC分类号： H01L21/302 ,  C08F234/02 ,  G03F7/00

    CPC分类号： G02B1/111 ,  C09D135/00 ,  G03F7/091 ,  Y10T428/12528

    摘要： Disclosed are a light absorbent agent polymer for organic anti-reflective coating which can prevent diffused light reflection of bottom film layer or substrate and reduce standing waves caused by a variation of thickness of the photoresist itself, thereby, increasing uniformity of the photoresist pattern, in a process for forming ultra-fine patterns of photoresist for photolithography by using 193 nm ArF among processes for manufacturing semiconductor devices, and its preparation method. Also, the present invention discloses an organic anti-reflective coating composition comprising a light absorbent agent polymer for the organic anti-reflective coating and a pattern formation process using the coating composition.

    摘要翻译： 公开了一种用于有机抗反射涂层的光吸收剂聚合物，其可以防止底部薄膜层或基底的扩散光反射，并减少由光致抗蚀剂本身的厚度变化引起的驻波，从而提高光致抗蚀剂图案的均匀性， 其制造半导体装置的制造方法中使用193nm的ArF，形成用于光刻的光刻胶的超微细图案的方法及其制备方法。 此外，本发明公开了一种有机抗反射涂层组合物，其包含用于有机抗反射涂层的光吸收剂聚合物和使用该涂料组合物的图案形成方法。

    Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same
    2.
    发明授权
    Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same 失效
    用于有机抗反射涂层的光吸收剂聚合物，其制备方法和包含其的有机抗反射涂料组合物

    公开(公告)号：US07285370B2

    公开(公告)日：2007-10-23

    申请号：US10963129

    申请日：2004-10-12

    申请人： Jae Chang Jung ,  Keun Kyu Kong ,  Jin-soo Kim

    发明人： Jae Chang Jung ,  Keun Kyu Kong ,  Jin-soo Kim

    IPC分类号： C03C1/825 ,  C08F122/04

    CPC分类号： G02B1/111 ,  C09D135/00 ,  G03F7/091 ,  Y10T428/12528

    摘要： Disclosed are a light absorbent agent polymer for organic anti-reflective coating which can prevent diffused light reflection of bottom film layer or substrate and reduce standing waves caused by a variation of thickness of the photoresist itself, thereby, increasing uniformity of the photoresist pattern, in a process for forming ultra-fine patterns of photoresist for photolithography by using 193 nm ArF among processes for manufacturing semiconductor devices, and its preparation method. Also, the present invention discloses an organic anti-reflective coating composition comprising a light absorbent agent polymer for the organic anti-reflective coating and a pattern formation process using the coating composition.

    摘要翻译： 公开了一种用于有机抗反射涂层的光吸收剂聚合物，其可以防止底部薄膜层或基底的扩散光反射，并减少由光致抗蚀剂本身的厚度变化引起的驻波，从而提高光致抗蚀剂图案的均匀性， 其制造半导体装置的制造方法中使用193nm的ArF，形成用于光刻的光刻胶的超微细图案的方法及其制备方法。 此外，本发明公开了一种有机抗反射涂层组合物，其包含用于有机抗反射涂层的光吸收剂聚合物和使用该涂料组合物的图案形成方法。

    Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same
    4.
    发明申请
    Light absorbent agent polymer useful for organic anti-reflective coating, its preparation method and organic anti-reflective coating composition comprising the same 失效
    用于有机抗反射涂层的光吸收剂聚合物，其制备方法和包含其的有机抗反射涂料组合物

    公开(公告)号：US20060004161A1

    公开(公告)日：2006-01-05

    申请号：US10963129

    申请日：2004-10-12

    申请人： Jae-chang Jung ,  Keun Kong ,  Jin-soo Kim

    发明人： Jae-chang Jung ,  Keun Kong ,  Jin-soo Kim

    IPC分类号： B05D5/06

    CPC分类号： G02B1/111 ,  C09D135/00 ,  G03F7/091 ,  Y10T428/12528

    摘要： Disclosed are a light absorbent agent polymer for organic anti-reflective coating which can prevent diffused light reflection of bottom film layer or substrate and reduce standing waves caused by a variation of thickness of the photoresist itself, thereby, increasing uniformity of the photoresist pattern, in a process for forming ultra-fine patterns of photoresist for photolithography by using 193 nm ArF among processes for manufacturing semiconductor devices, and its preparation method. Also, the present invention discloses an organic anti-reflective coating composition comprising a light absorbent agent polymer for the organic anti-reflective coating and a pattern formation process using the coating composition.

    摘要翻译： 公开了一种用于有机抗反射涂层的光吸收剂聚合物，其可以防止底部薄膜层或基底的扩散光反射，并减少由光致抗蚀剂本身的厚度变化引起的驻波，从而提高光致抗蚀剂图案的均匀性， 其制造半导体装置的制造方法中使用193nm的ArF，形成用于光刻的光刻胶的超微细图案的方法及其制备方法。 此外，本发明公开了一种有机抗反射涂层组合物，其包含用于有机抗反射涂层的光吸收剂聚合物和使用该涂料组合物的图案形成方法。

    Bus system and execution scheduling method for access commands thereof
    6.
    发明授权
    Bus system and execution scheduling method for access commands thereof 有权
    总线系统及其访问命令的执行调度方法

    公开(公告)号：US06782439B2

    公开(公告)日：2004-08-24

    申请号：US09774009

    申请日：2001-01-31

    申请人： Jin-soo Kim

    发明人： Jin-soo Kim

    IPC分类号： G06F1300

    CPC分类号： G06F13/36

    摘要： A bus system and execution scheduling method used for the bus system are provided. The execution scheduling method used for the bus system includes the steps of (a) transmitting one or more access commands issuing from one or more master devices to corresponding slave devices; (b) storing the transmitted access commands; and (c) the slave devices executing the stored access commands in the order in which execution preparation of access commands is completed. According to the method, the order of execution of the access commands is adjusted, thereby providing a bus system having improved data processing speed and the execution scheduling method thereof.

    摘要翻译： 提供了一种用于总线系统的总线系统和执行调度方法。 用于总线系统的执行调度方法包括以下步骤：（a）将从一个或多个主设备发出的一个或多个接入命令发送到对应的从设备; （b）存储发送的访问命令; 以及（c）从属设备以完成访问命令的执行准备的顺序执行存储的访问命令。 根据该方法，调整访问命令的执行顺序，从而提供具有改善的数据处理速度的总线系统及其执行调度方法。

    Bus system
    7.
    发明授权
    Bus system 有权

    公开(公告)号：US06671761B2

    公开(公告)日：2003-12-30

    申请号：US09817756

    申请日：2001-03-27

    申请人： Jin-soo Kim

    发明人： Jin-soo Kim

    IPC分类号： G06F1318

    CPC分类号： G06F13/362

    摘要： A bus system is provided. The bus system includes: an arbiter that receives access commands output from the plurality of master devices and outputs the access commands in an order according to a predetermined arbitration algorithm; an execution scheduler that receives the access commands from the arbiter and outputs the access commands in the order in which execution preparation by corresponding slave devices are complete; a plurality of command execution controllers corresponding to at least one of the slave devices, respectively, each command execution controller stores two or more access commands input from the execution scheduler, extracts access information necessary for execution from the stored access commands, controls the output order of the access commands based on the result of comparing the extracted access information with access information about the command currently being executed so that the total execution time of the stored commands is shorter than the total execution time according to the order in which the commands are input; and a plurality of pseudo-delayers corresponding to at least one of slave devices, respectively, each pseudo-delayer delays and outputs the access command received from the command execution controller to a corresponding slave device so that the latency period of the corresponding slave device may equal the longest of latency periods of the plurality of slave devices. Accordingly, the number of idle clock cycles of a data bus is reduced and the overall system efficiency is improved.

    Prediction image generating apparatus using mask and apparatus for coding, transmitting and decoding a binary image using the same
    8.
    发明授权
    Prediction image generating apparatus using mask and apparatus for coding, transmitting and decoding a binary image using the same 失效
    使用掩模和装置的预测图像生成装置，用于对使用其的二进制图像进行编码，发送和解码

    公开(公告)号：US06269191B1

    公开(公告)日：2001-07-31

    申请号：US09156488

    申请日：1998-09-18

    申请人： Jin-soo Kim

    发明人： Jin-soo Kim

    IPC分类号： G06K936

    CPC分类号： G06T9/004 ,  G06T9/005 ,  H04N1/41 ,  H04N1/417

    摘要： A prediction image generating apparatus using a plurality of masks and an apparatus for coding, transmitting and decoding a binary image using the same. The prediction image generating apparatus includes a maximum value searching unit, a minimum value searching unit, a mean calculation unit, a binarization unit and a comparing unit. The maximum value searching unit searches a maximum value of element values of one of the masks corresponding to a pixel having one binary level among a plurality of pixels located in front of the pixel having the current binary level to be predicted in a window of a predetermined size. The minimum value searching unit searches a minimum value of element values of the one mask corresponding to a pixel having the other binary level among a plurality of pixels located in front of the pixel having the current binary level to be predicted in the window of the predetermined size. The mean calculation unit takes an average of the maximum value and the minimum value searched from the maximum value searching unit and the minimum value searching unit. The binarization unit binarizes the average determined in the mean calculation unit. The comparing unit compares the binarized average with the binary level of the current pixel and outputs prediction image data indicating a successful or a failed prediction. Accordingly, when an image obtained by binarizing a document of pictures as well as text documents is transmitted, good picture quality and high coding efficiency are realized.

    摘要翻译： 一种使用多个掩模的预测图像生成装置和使用该掩模对二进制图像进行编码，发送和解码的装置。 预测图像生成装置包括最大值搜索单元，最小值搜索单元，平均值计算单元，二值化单元和比较单元。 最大值搜索单元在预定的窗口中搜索位于具有当前二进制水平的像素的前面的多个像素中具有一个二进制水平的像素的一个像素的元素值的最大值， 尺寸。 最小值搜索单元在预定的窗口中搜索位于具有当前二进制水平的像素前面的多个像素中具有另一二进制水平的像素的一个掩码的元素值的最小值， 尺寸。 平均值计算单元从最大值搜索单元和最小值搜索单元获取最大值和最小值的平均值。 二值化单元将在平均值计算单元中确定的平均值二值化。 比较单元将二值化平均值与当前像素的二进制水平进行比较，并输出指示成功或失败预测的预测图像数据。 因此，当通过二进制图像文档以及文本文档获得的图像被发送时，实现了良好的图像质量和高的编码效率。

    Page replacement method using page information
    10.
    发明授权
    Page replacement method using page information 有权
    页面替换方法使用页面信息

    公开(公告)号：US07366855B2

    公开(公告)日：2008-04-29

    申请号：US11191074

    申请日：2005-07-28

    申请人： Jin-kyu Kim ,  Kwang-yoon Lee ,  Jin-soo Kim ,  Sun-young Park ,  Chan-ik Park ,  Jeong-uk Kang

    发明人： Jin-kyu Kim ,  Kwang-yoon Lee ,  Jin-soo Kim ,  Sun-young Park ,  Chan-ik Park ,  Jeong-uk Kang

    IPC分类号： G06F12/00

    CPC分类号： G06F12/123 ,  G06F12/08 ,  G06F2212/2022 ,  Y02D10/13

    摘要： A page replacement method is provided. The page replacement method includes (a) establishing a first page list in which a plurality of pages in a main memory are listed in an order that they have been used, (b) establishing a second page list in which some of the pages in the main memory whose images are stored in a storage medium are listed in an order that they have been used, and (c) storing data downloaded from the storage medium in the pages included in the second page list in an order opposite to the order that the corresponding pages are listed in the second page list.

    摘要翻译： 提供页面替换方法。 页面替换方法包括：（a）建立第一页面列表，其中按照已经使用的顺序列出主存储器中的多个页面，（b）建立第二页面列表，其中， 其图像被存储在存储介质中的主存储器以它们已被使用的顺序列出，并且（c）以与第二页列表中包含的顺序相反的顺序将从存储介质下载的数据存储在包括在第二页列表中的页面中 相应的页面列在第二页列表中。