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公开(公告)号：US11072842B2
公开(公告)日：2021-07-27
申请号：US16080036
申请日：2017-03-29
Applicant: JX Nippon Mining & Metals Corporation
Inventor： Masaki Nakano , Hirotoshi Fukunaga , Takeshi Yanai , Hironobu Sawatari
IPC: C23C14/06 , C22C38/00 , C23C14/28 , C23C14/58 , H01F1/057 , H01F10/14 , H01F41/02 , H01F41/20 , H01F10/12
Abstract: Provided is a rare earth thin film magnet having Nd, Fe and B as essential components, which is characterized in that a Nd—Fe—B base film is formed on a Si substrate having an oxide film formed on a surface thereof and has a composition in which the Nd content is higher than that of a stoichiometric composition and that a film (nano composite film) is formed on the base film and has a texture in which an α-Fe phase and Nd2Fe14B are alternately arranged and three-dimensionally dispersed. The rare earth thin film magnet provided is less susceptible to the occurrence of film separation and substrate breakage and exhibits favorable magnetic properties.
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公开(公告)号：US11114225B2
公开(公告)日：2021-09-07
申请号：US16077961
申请日：2017-02-28
Applicant: JX Nippon Mining & Metals Corporation
Inventor： Masaki Nakano , Hirotoshi Fukunaga , Takeshi Yanai , Hironobu Sawatari
Abstract: A rare-earth thin film magnet is provided which includes Nd, Fe and B as essential components, characterized by including a Si substrate having an oxide film present on a surface thereof, a Nd base film formed as a first layer over the Si substrate, and a Nd—Fe—B film formed as a second layer on the first layer. The rare earth thin film magnet and a production process therefor provides a rare earth thin film magnet suffering neither film separation nor substrate breakage and having satisfactory magnetic properties even when the second layer has composition in the range of 0.120 ≤Nd/(Nd+Fe)
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公开(公告)号：US20170356081A1
公开(公告)日：2017-12-14
申请号：US15522037
申请日：2015-10-19
Applicant: JX Nippon Mining & Metals Corporation
Inventor： Masaki Nakano , Hirotoshi Fukunaga , Takeshi Yanai , Hironobu Sawatari
CPC classification number: C23C14/28 , C23C14/14 , C23C14/58 , C23C14/5806 , H01F1/057 , H01F10/126 , H01F10/14 , H01F41/205 , H01F41/32
Abstract: A rare earth thin-film magnet of a Nd—Fe—B film deposited on a Si substrate, wherein, when the film thickness of the rare earth thin film is 70 μm or less, the Nd content satisfies the conditional expression of 0.15≦Nd/(Nd+Fe)≦0.25 in terms of an atomic ratio; when the film thickness of the rare earth thin film is 70 μm to 115 μm (but excluding 70 μm), the Nd content satisfies the conditional expression of 0.18≦Nd/(Nd+Fe)≦0.25 in terms of an atomic ratio; and when the film thickness of the rare earth thin film is 115 μm to 160 μm (but excluding 115 μm), the Nd content satisfies the conditional expression of 0.20≦Nd/(Nd+Fe)≦0.25 in terms of an atomic ratio. An object of the present invention is to provide a rare earth thin-film magnet having a maximum film thickness of 160 μm and which is free from film separation and substrate fracture, and a method of producing such a rare earth thin-film magnet by which the thin film can be stably deposited.
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Patent Agency Ranking
公开(公告)号：US11250976B2
公开(公告)日：2022-02-15
申请号：US15112458
申请日：2015-03-03
Applicant: JX Nippon Mining & Metals Corporation
Inventor： Masaki Nakano , Hirotoshi Fukunaga , Takeshi Yanai , Masaru Itakura , Hironobu Sawatari
IPC: H01F1/00 , C23C14/16 , C22C38/00 , H01F10/12 , H01F41/20 , C22C33/00 , C22C45/02 , C23C14/28 , C23C14/58 , H01F1/053 , H01F41/02
Abstract: The present invention provides a rare earth thin film magnet having Nd, Fe, and B as essential components, wherein the rare earth thin film magnet has a texture in which an α-Fe phase and a Nd2Fe14B phase are alternately arranged three-dimensionally, and each phase has an average crystal grain size of 10 to 30 nm. An object of this invention is to provide a rare earth thin film magnet having superior mass productivity and reproducibility and favorable magnetic properties, as well as to provide the production method thereof and a target for producing the thin film.
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5.发明申请RARE EARTH THIN FILM MAGNET, PROCESS FOR PRODUCING SAME, AND TARGET FOR FORMING RARE EARTH THIN FILM MAGNET 审中-公开稀土薄膜磁铁，其生产方法和形成稀土薄膜磁铁的目标公开(公告)号：US20160343482A1
公开(公告)日：2016-11-24
申请号：US15112458
申请日：2015-03-03
Applicant: JX NIPPON MINING & METALS CORPORATION
Inventor： Masaki Nakano , Hirotoshi Fukunaga , Takeshi Yanai , Masaru Itakura , Hironobu Sawatari
CPC classification number: H01F1/0045 , C22C33/003 , C22C38/00 , C22C38/002 , C22C38/005 , C22C45/02 , C23C14/16 , C23C14/28 , C23C14/5806 , H01F1/053 , H01F10/126 , H01F41/0253 , H01F41/205
Abstract: The present invention provides a rare earth thin film magnet having Nd, Fe, and B as essential components, wherein the rare earth thin film magnet has a texture in which an α-Fe phase and a Nd2Fe14B phase are alternately arranged three-dimensionally, and each phase has an average crystal grain size of 10 to 30 nm. An object of this invention is to provide a rare earth thin film magnet having superior mass productivity and reproducibility and favorable magnetic properties, as well as to provide the production method thereof and a target for producing the thin film.
Abstract translation: 本发明提供一种以Nd，Fe，B为必要成分的稀土类薄膜磁铁，其特征在于稀土类薄膜磁铁具有三维交替配置α-Fe相和Nd2Fe14B相的结构， 各相的平均结晶粒径为10〜30nm。 本发明的目的是提供一种具有优异的批量生产率和再现性以及良好的磁性能的稀土类薄膜磁铁，以及提供其生产方法和制造该薄膜的目的。
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公开(公告)号：US20150262752A1
公开(公告)日：2015-09-17
申请号：US14425083
申请日：2013-09-27
Applicant: JX Nippon Mining & Metals Corporation
Inventor： Hironobu Sawatari
CPC classification number: H01F41/183 , B22F3/14 , B22F3/15 , B22F5/00 , B22F9/04 , C23C14/14 , C23C14/3414 , H01F1/053 , H01J37/3429
Abstract: The present invention relates to a rare-earth magnetic target comprising neodymium, iron, and boron as essential components. The target has an average crystal grain diameter of 10 to 200 μm. It is an object of the present invention to provide a sintered compact target that can form rare-earth magnetic thin films, in particular, neodymium magnetic thin films, having good magnetic characteristics with excellent mass productivity and reproducibility, and provide a method of producing the sintered compact target.
Abstract translation: 本发明涉及包含钕，铁和硼作为必需组分的稀土磁性靶。 靶的平均结晶粒径为10〜200μm。 本发明的目的是提供一种能够形成具有良好的磁特性并且具有优异的批量生产率和再现性的稀土磁性薄膜特别是钕磁性薄膜的烧结致密靶，并且提供一种生产 烧结成型靶。
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公开(公告)号：US10597771B2
公开(公告)日：2020-03-24
申请号：US15522037
申请日：2015-10-19
Applicant: JX Nippon Mining & Metals Corporation
Inventor： Masaki Nakano , Hirotoshi Fukunaga , Takeshi Yanai , Hironobu Sawatari
Abstract: A rare earth thin-film magnet of a Nd—Fe—B film deposited on a Si substrate, wherein, when the film thickness of the rare earth thin film is 70 μm or less, the Nd content satisfies the conditional expression of 0.15≤Nd/(Nd+Fe)≤0.25 in terms of an atomic ratio; when the film thickness of the rare earth thin film is 70 μm to 115 μm (but excluding 70 μm), the Nd content satisfies the conditional expression of 0.18≤Nd/(Nd+Fe)≤0.25 in terms of an atomic ratio; and when the film thickness of the rare earth thin film is 115 μm to 160 μm (but excluding 115 μm), the Nd content satisfies the conditional expression of 0.20≤Nd/(Nd+Fe)≤0.25 in terms of an atomic ratio. An object of the present invention is to provide a rare earth thin-film magnet having a maximum film thickness of 160 μm and which is free from film separation and substrate fracture, and a method of producing such a rare earth thin-film magnet by which the thin film can be stably deposited.
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公开(公告)号：US20190062880A1
公开(公告)日：2019-02-28
申请号：US16080036
申请日：2017-03-29
Applicant: JX Nippon Mining & Metals Corporation
Inventor： Masaki Nakano , Hirotoshi Fukunaga , Takeshi Yanai , Hironobu Sawatari
Abstract: Provided is a rare earth thin film magnet having Nd, Fe and B as essential components, which is characterized in that a Nd—Fe—B base film is formed on a Si substrate having an oxide film formed on a surface thereof and has a composition in which the Nd content is higher than that of a stoichiometric composition and that a film (nano composite film) is formed on the base film and has a texture in which an α-Fe phase and Nd2Fe14B are alternately arranged and three-dimensionally dispersed. The rare earth thin film magnet provided is less susceptible to the occurrence of film separation and substrate breakage and exhibits favorable magnetic properties.
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