Abstract:
A micro lens array includes a plurality of convex micro lenses formed on a transparent substrate in an array. The micro lenses are convex toward a surface of the substrate in a position inward of the surface of the substrate and the top of the convex surface of the micro lenses is lower than the surface of the substrate.
Abstract:
A mask for exposure 1 having an aperture in a prescribed pattern formed on one surface and subjected to proximity field exposure in a state kept in contact with the surface of a wafer 2. The mask 1 is made of a transparent material such as glass or quartz glass. The mask 1 forms a circular shape with a thickness of 1 mm or less, preferably 0.1-0.5 mm.
Abstract:
A metal film consisting of a first metal layer of at least one of Ta, Cr, W and Mo, a second metal layer of at least one of Au, Pt and Ag and a third metal layer of at least one of Ta, Cr, W and Mo superposed one on another in this order is formed on a surface of a substrate. Openings of predetermined shapes are formed in the metal film, and proton exchange is carried out on the surface of the substrate with the metal film used as a mask, thereby forming optical channel waveguides. Then the third metal layer is removed from the metal film, and the metal film consisting of the first and second metal layers into electrodes for applying an electric voltage to the optical channel waveguides.
Abstract:
The liquid ejection head ejects a solution, in which charged particles are dispersed, toward a counter electrode. The head has a head substrate, a solution guide member formed on a surface of the head substrate so as to protrude and include a sharp-pointed portion having a sharply pointed tip end, with the sharp-pointed portion being which is formed by inclined surfaces and having a cross section that is reduced as a distance to the tip end is decreased, and a solution supply path having a solution outflow opening through which the solution flows out to the neighborhood of the sharp-pointed portion so as to form a solution flow around the inclined surfaces. The solution flow is formed around the tip end of the sharp-pointed portion in a direction going across the inclined surface and a part of the solution flow is guided to the tip end and is ejected as a droplet by means of an electrostatic force.
Abstract:
A liquid ejecting head of the invention has ink ejected with the electrostatic force, with a structure having a partition wall separating the flow channel into an inflow region and an outflow region. The wall passing by the positions of the ejecting orifices runs in a serpentine path to traverse the ink flow space in a direction perpendicular to the direction of the ink flow. The partition wall is produced by, first, applying a specified film thickness of photoresist on a substrate, second pressing a molding substrate onto a surface of the applied film of the photoresist to form a ridge-like projections which is to be a projecting solution guides, third forming the wall by etching the patterned photoresist film using a mask having a pattern of lines.
Abstract:
A metal film consisting of a first metal layer of at least one of Ta, Cr, W and Mo, a second metal layer of at least one of Au, Pt and Ag and a third metal layer of at least one of Ta, Cr, W and Mo superposed one on another in this order is formed on a surface of a substrate. Openings of predetermined shapes are formed in the metal film, and proton exchange is carried out on the surface of the substrate with the metal film used as a mask, thereby forming optical channel waveguides. Then the third metal layer is removed from the metal film, and the metal film consisting of the first and second metal layers into electrodes for applying an electric voltage to the optical channel waveguides.
Abstract:
A mask for exposure 1 having an aperture in a prescribed pattern formed on one surface and subjected to proximity field exposure in a state kept in contact with the surface of a wafer 2. The mask 1 is made of a transparent material such as glass or quartz glass. The mask 1 forms a circular shape with a thickness of 1 mm or less, preferably 0.1-0.5 mm.
Abstract:
The present invention provides a method of producing a liquid ejection head having a solution guide member protruding on a head substrate. The solution guide member has a sharp-pointed portion protruding from a liquid surface of a flowing solution in which charged particles are dispersed. The solution guide member guides the solution to the sharp-pointed portion such that the solution is ejected from the sharp-pointed portion by an electrostatic force. The method comprises the steps of forming a photosensitive resin layer on the head substrate; molding a convex portion having the sharp-pointed portion on a surface of the formed photosensitive resin layer by pressing a mold member against the surface of the photosensitive resin layer; and exposing a region of the molded convex portion; and developing the exposed photosensitive resin layer to produce the solution guide member provided on the head substrate.
Abstract:
A wavelength converting element is provided in which a fundamental wave with respect to an optical crystal substrate and a peak of a vertical transverse mode of a second harmonic are made to coincide, the converting efficiency is good, and a beam shape which enables good joining to a lens or an optical fiber is obtained. Given that an angle formed by a surface of the optical crystal substrate and a C axis of the optical crystal substrate is θ, a period at which inverted domains are formed is p, and a distance from a distal end of a comb-shaped electrode for forming the inverted domain to a central position of a waveguide is G, in the ion implantation, a concentration peak of the ion implantation is formed at a distance of substantially (G·tanθ+p/4) from the surface of the optical crystal substrate.
Abstract translation:提供一种波长转换元件,其中使相对于光学晶体基板的基波和二次谐波的垂直横向模式的峰值一致,转换效率良好,并且能够良好地接合到 获得透镜或光纤。 假设由光学晶体基板的表面和光学晶体基板的C轴形成的角度为θ,则形成反转畴的周期为p,并且与梳状电极的远端的距离为 在波导的中心位置处形成反向域为G,在离子注入中离子注入的浓度峰从与光晶体基板的表面基本上(G.tantheta + p / 4)的距离形成 。
Abstract:
A wavelength converting element is provided in which a fundamental wave with respect to an optical crystal substrate and a peak of a vertical transverse mode of a second harmonic are made to coincide, the converting efficiency is good, and a beam shape which enables good joining to a lens or an optical fiber is obtained. Given that an angle formed by a surface of the optical crystal substrate and a C axis of the optical crystal substrate is θ, a period at which inverted domains are formed is p, and a distance from a distal end of a comb-shaped electrode for forming the inverted domain to a central position of a waveguide is G, in the ion implantation, a concentration peak of the ion implantation is formed at a distance of substantially (G·tan θ+p/4) from the surface of the optical crystal substrate.
Abstract translation:提供一种波长转换元件,其中使相对于光学晶体基板的基波和二次谐波的垂直横向模式的峰值一致,转换效率良好,并且能够良好地接合到 获得透镜或光纤。 假设由光学晶体基板的表面和光学晶体基板的C轴形成的角度为θ,则形成反转畴的周期为p,并且与梳状电极的远端的距离为 在波导的中心位置处形成反向域为G,在离子注入中离子注入的浓度峰值形成在与光学晶体表面基本上(G.tanθ+ p / 4)的距离处 基质。