公开(公告)号：US20170294504A1

公开(公告)日：2017-10-12

申请号：US15628782

申请日：2017-06-21

Applicant: International Business Machines Corporation

Inventor： Hariklia Deligianni ,  William J. Gallagher ,  Eugene J, O'Sullivan ,  Naigang Wang

IPC: H01L49/02 ,  H01L21/3205 ,  H01L21/3213 ,  H01F10/32 ,  H01F1/147 ,  H01F41/04 ,  H01F27/24 ,  H01L21/027 ,  H01F27/28

CPC classification number: H01L28/10 ,  C23C14/14 ,  H01F1/147 ,  H01F1/14708 ,  H01F10/3218 ,  H01F10/3254 ,  H01F10/3268 ,  H01F10/3295 ,  H01F17/0006 ,  H01F27/24 ,  H01F27/2804 ,  H01F41/042 ,  H01F41/304 ,  H01F2017/0066 ,  H01F2027/2809 ,  H01L21/0273 ,  H01L21/32051 ,  H01L21/32139

Abstract: Disclosed are magnetic structures, including on-chip inductors comprising laminated layers comprising, in order, a barrier and/or adhesion layer, a antiferromagnetic layer, a magnetic growth layer, a soft magnetic layer, an insulating non-magnetic spacer, a soft magnetic layer, a magnetic growth later, an antiferromagnetic layer. Also disclosed are methods of making such structures.