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公开(公告)号:US11160171B2
公开(公告)日:2021-10-26
申请号:US16485174
申请日:2018-02-14
Applicant: InkTec Co., Ltd.
Inventor: Kwang-Choon Chung , Su Han Kim , Jung Yoon Moon , Hyeon-Jun Seong , Byung Woong Moon
Abstract: The present invention relates to an etching solution composition for selectively etching only silver, a silver alloy, or a silver compound, and to a circuit forming method using the composition. The circuit forming method according to the present invention is characterized in that, in a substrate material in which an electrically conductive seed layer and a circuit layer are formed of heterogeneous metals, only the seed layer is selectively etched to enable the implementation of fine pitches. In addition, the present invention relates to a circuit forming method and an etching solution composition, wherein only a seed layer of silver (Ag), a silver alloy, or a silver compound is selectively etched without etching a copper (Cu) plated circuit.
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公开(公告)号:US11317514B2
公开(公告)日:2022-04-26
申请号:US16484479
申请日:2018-02-09
Applicant: InkTec Co., Ltd.
Inventor: Kwang-Choon Chung , Byung Woong Moon , Su Han Kim , Jung Yoon Moon , Hyeon-Jun Seong , Jae Rin Kim
Abstract: The present invention relates to a method for forming a circuit using a seed layer. The method for forming a circuit using a seed layer according to the present invention, may realize a fine pitch, increase the adhesion of the circuit, and prevent the migration phenomenon.
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公开(公告)号:US11089691B2
公开(公告)日:2021-08-10
申请号:US16489361
申请日:2018-02-27
Applicant: InkTec Co., Ltd.
Inventor: Su Han Kim , Kwang-Choon Chung , Jung Yoon Moon , Sung In Ha , Byung Woong Moon
Abstract: The disclosure relates to a microcircuit forming method. The microcircuit forming method according to the disclosure comprises: a seed-layer forming step for forming a high-reflectivity seed layer on a substrate material by using a conductive material; a pattern-layer forming step for forming a pattern layer on the seed layer, the pattern layer having a pattern hole arranged thereon to allow the seed layer to be selectively exposed therethrough; a plating step for filling the pattern hole with a conductive material; a pattern-layer removing step for removing the pattern layer; and a seed-layer patterning step for removing a part of the seed layer which does not overlap the conductive material in the plating step, wherein the high-reflectivity seed layer has a specular reflection property.
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