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公开(公告)号:US11317514B2
公开(公告)日:2022-04-26
申请号:US16484479
申请日:2018-02-09
Applicant: InkTec Co., Ltd.
Inventor: Kwang-Choon Chung , Byung Woong Moon , Su Han Kim , Jung Yoon Moon , Hyeon-Jun Seong , Jae Rin Kim
Abstract: The present invention relates to a method for forming a circuit using a seed layer. The method for forming a circuit using a seed layer according to the present invention, may realize a fine pitch, increase the adhesion of the circuit, and prevent the migration phenomenon.
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公开(公告)号:US11160171B2
公开(公告)日:2021-10-26
申请号:US16485174
申请日:2018-02-14
Applicant: InkTec Co., Ltd.
Inventor: Kwang-Choon Chung , Su Han Kim , Jung Yoon Moon , Hyeon-Jun Seong , Byung Woong Moon
Abstract: The present invention relates to an etching solution composition for selectively etching only silver, a silver alloy, or a silver compound, and to a circuit forming method using the composition. The circuit forming method according to the present invention is characterized in that, in a substrate material in which an electrically conductive seed layer and a circuit layer are formed of heterogeneous metals, only the seed layer is selectively etched to enable the implementation of fine pitches. In addition, the present invention relates to a circuit forming method and an etching solution composition, wherein only a seed layer of silver (Ag), a silver alloy, or a silver compound is selectively etched without etching a copper (Cu) plated circuit.
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