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公开(公告)号:US11089691B2
公开(公告)日:2021-08-10
申请号:US16489361
申请日:2018-02-27
Applicant: InkTec Co., Ltd.
Inventor: Su Han Kim , Kwang-Choon Chung , Jung Yoon Moon , Sung In Ha , Byung Woong Moon
Abstract: The disclosure relates to a microcircuit forming method. The microcircuit forming method according to the disclosure comprises: a seed-layer forming step for forming a high-reflectivity seed layer on a substrate material by using a conductive material; a pattern-layer forming step for forming a pattern layer on the seed layer, the pattern layer having a pattern hole arranged thereon to allow the seed layer to be selectively exposed therethrough; a plating step for filling the pattern hole with a conductive material; a pattern-layer removing step for removing the pattern layer; and a seed-layer patterning step for removing a part of the seed layer which does not overlap the conductive material in the plating step, wherein the high-reflectivity seed layer has a specular reflection property.