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公开(公告)号：US11600491B2
公开(公告)日：2023-03-07
申请号：US16635097
申请日：2018-07-31
IPC分类号： H01L21/02 , B23K26/0622 , H01L21/67 , H01L27/12 , B23K26/064 , B23K26/073 , B23K26/066 , B23K103/00
摘要： A method of fiber laser processing of thin film deposited on a substrate includes providing a laser beam from at least one fiber laser which is guided through a beam-shaping unit onto the thin film. The beam-shaping optics is configured to shape the laser beam into a line beam which irradiates a first irradiated thin film area Ab on a surface of the thin film, with the irradiated thin film area Ab being a fraction of the thin film area Af. By continuously displacing the beam shaping optics and the film relative to one another in a first direction at a distance dy between sequential irradiations, a sequence of uniform irradiated thin film areas Ab are formed on the film surface defining thus a first elongated column. Thereafter the beam shaped optics and film are displaced relative to one another at a distance dx in a second direction transverse to the first direction with the distance dx being smaller than a length of the irradiated film area Ab. With the steps performed to form respective columns, the elongated columns overlap one another covering the desired thin film area Af. The dx and dy distances are so selected that that each location of the film area Af is exposed to the shaped laser beam during a cumulative predetermined duration.
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2.再颁专利公开(公告)号：USRE48398E1
公开(公告)日：2021-01-19
申请号：US16535316
申请日：2019-08-08
发明人： Alexey Avdokhin , Yuri Erokhin , Manuel Leonardo , Alexander Limanov , Igor Samartsev , Michael von Dadelszen
摘要： The inventive system for crystallizing an amorphous silicon (a-Si) film is configured with a quasi-continuous wave fiber laser source operative to emit a film irradiating pulsed beam. The fiber laser source is operative to emit a plurality of non-repetitive pulses incident on the a-Si. In particular, the fiber laser is operative to emit multiple discrete packets of film irradiating light at a burst repetition rate (BRR), and a plurality of pulses within each packet emitted at a pulse repetition rate (PRR) which is higher than the BRR. The pulse energy, pulse duration of each pulse and the PRR are controlled so that each packet has a desired packet temporal power profile (W/cm2) and packet energy sufficient to provide transformation of a-Si to polysilicon (p-Si) at each location of the film which is exposed to at least one packets.
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公开(公告)号：US10170886B2
公开(公告)日：2019-01-01
申请号：US15511826
申请日：2015-09-16
IPC分类号： G02F1/37 , G02F1/355 , H01S3/067 , H01S3/00 , H01S3/16 , H01S3/23 , H01S3/30 , G03B21/20 , H01S3/094 , G02B27/48
摘要： An RGB light source for a luminaire projector system includes Red, Green and Blue lasers each outputting a randomly polarized (RP) single mode (SM) light with at least a 4 nm spectral linewidth. The Green laser has a MOPFA-structured pump which outputs a pulsed pump beam at a fundamental wavelength in a 1 μm wavelength range and further includes a SHG. The SHG includes an LBO nonlinear crystal receiving the pulsed pump beam and outputting a train of pulses of BB Green light. The Red laser is configured with a QCW fiber laser pump and a frequency converter with an LBO nonlinear crystal outputting a train of pulses of red light in a 6xx nm wavelength range.
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4.发明授权公开(公告)号：US09941120B2
公开(公告)日：2018-04-10
申请号：US14790170
申请日：2015-07-02
发明人： Alexey Avdokhin , Yuri Erokhin , Manuel Leonardo , Alexander Limanov , Igor Samartsev , Michael von Dadelszen
CPC分类号： H01L21/02686 , H01L21/02532 , H01S3/06745 , H01S3/06754 , H01S3/094003 , H01S3/1618
摘要： The inventive system for crystallizing an amorphous silicon (a-Si) film is configured with a quasi-continuous wave fiber laser source operative to emit a film irradiating pulsed beam. The fiber laser source is operative to emit a plurality of non-repetitive pulses incident on the a-Si. In particular, the fiber laser is operative to emit multiple discrete packets of film irradiating light at a burst repetition rate (BRR), and a plurality of pulses within each packet emitted at a pulse repetition rate (PRR) which is higher than the BRR. The pulse energy, pulse duration of each pulse and the PRR are controlled so that each packet has a desired packet temporal power profile (W/cm2) and packet energy sufficient to provide transformation of a-Si to polysilicon (p-Si) at each location of the film which is exposed to at least one packets.
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公开(公告)号：US11673208B2
公开(公告)日：2023-06-13
申请号：US16635877
申请日：2018-07-31
发明人： Alexander Limanov , Michael Von Dadelszen , Joshua Schoenly , James Cordingley , Manuel Leonardo
IPC分类号： B23K26/073 , B23K26/082 , B23K26/352 , H01S3/067
CPC分类号： B23K26/073 , B23K26/0821 , B23K26/352 , H01S3/067
摘要： A surface treating method and apparatus include operating a quasi-continuous wave fiber laser and pre-scan shaping the laser beam such that an instantaneous spot beam has predetermined geometrical dimensions, intensity profile, and power; operating a scanner at an optimal angular velocity and angular range to divide the pre-scan beam into a plurality of sub-beams deflected towards the surface being processed; guiding the sub-beams through a post-scan optical assembly to provide the spot beam with predetermined geometrical dimensions, power, and angular velocity and range, which are selected such that the instantaneous spot beam is dragged in a scan direction over a desired length at a desired scan velocity, which allow the treated surface to be exposed for a predetermined exposure duration and have a predetermined fluence distribution providing the treated surface with a quality comparable to that of the surface processed by an excimer laser or a burst-mode fiber laser.
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公开(公告)号：US10008819B2
公开(公告)日：2018-06-26
申请号：US15511798
申请日：2015-09-16
IPC分类号： G02F1/35 , G02F2/02 , H01S3/00 , G02F1/37 , G02F1/355 , H01S3/30 , H01S3/067 , H01S3/16 , G02B27/48
CPC分类号： H01S3/0092 , G02B27/48 , G02F1/3532 , G02F1/3551 , G02F1/37 , H01S3/0675 , H01S3/06758 , H01S3/08045 , H01S3/094046 , H01S3/1618 , H01S3/2391 , H01S3/302
摘要： A broad line red light generator is configured with a single mode (SM) pulsed ytterbium (“Yb”) fiber laser pump source outputting pump light in a fundamental mode (“FM”) at a pump wavelength which is selected from a 1030-1120 nm wavelength range. The disclosed generator further includes a SM fiber Raman converter spliced to an output of the Yb fiber laser pump source. The Raman converter induces an “n” order frequency Stokes shift of the pump light to output the pump light at a Raman-shifted wavelength within 1220 and 1300 nm wavelength range with a broad spectral line of at least 10 nm. The disclosed light generator further has a single pass second harmonic generator (“SHG”) with a lithium triborate (“LBO”) nonlinear optical crystal having a spectral acceptance linewidth which is sufficient to cover the broad spectral line of the pump light. The SHG generates a SM pulsed broad-line red light with a broad spectral line of at least 4 nm.
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